asm(j) eagle xp – cvd350 - globalfoundries used …€¦ · rf match ctr. precursor cabinet for...

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ASM(J) Eagle XP – CVD350 August 2014

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Page 1: ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For RC3 and RC4 4 Canisters GAS BOX (Dry Gas) Reactor 3 Reactor 4 RC controller RC WATER

ASM(J) Eagle XP – CVD350August 2014

Page 2: ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For RC3 and RC4 4 Canisters GAS BOX (Dry Gas) Reactor 3 Reactor 4 RC controller RC WATER

ASM(J) Eagle XP - 3D model top/ right side view

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Page 3: ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For RC3 and RC4 4 Canisters GAS BOX (Dry Gas) Reactor 3 Reactor 4 RC controller RC WATER

ASM(J) Eagle XP - Top view

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Page 4: ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For RC3 and RC4 4 Canisters GAS BOX (Dry Gas) Reactor 3 Reactor 4 RC controller RC WATER

ASM(J) Eagle XP - Split unit view

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Page 5: ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For RC3 and RC4 4 Canisters GAS BOX (Dry Gas) Reactor 3 Reactor 4 RC controller RC WATER

ASM(J) Eagle XP - precursor vessels drawing

Here: VOL.=1.3 LITERS

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Page 6: ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For RC3 and RC4 4 Canisters GAS BOX (Dry Gas) Reactor 3 Reactor 4 RC controller RC WATER

ASM(J) Eagle XP – gas schematic drawing reactor 3

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Page 7: ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For RC3 and RC4 4 Canisters GAS BOX (Dry Gas) Reactor 3 Reactor 4 RC controller RC WATER

ASM(J) Eagle XP – gas schematic drawing reactor 4

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Page 8: ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For RC3 and RC4 4 Canisters GAS BOX (Dry Gas) Reactor 3 Reactor 4 RC controller RC WATER

ASM(J) Eagle XP – clean room front view picture

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Page 9: ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For RC3 and RC4 4 Canisters GAS BOX (Dry Gas) Reactor 3 Reactor 4 RC controller RC WATER

ASM(J) Eagle XP – clean room left side view picture

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