dls-83d & dls-1000
TRANSCRIPT
Deep Level Spectrometer provides a method with the highest sensitivity for characterization and identification of impurities. It allows automatic control of the experimental parameters, automatic evaluation of impurity concentration, activation energy and capture cross section.
www.semilab.com
DLS-83D & DLS-1000Deep LeveL Spectrometer
Influence of annealing on Fe-B pairs Radiation defects in n-type FZ silicon
● Highest sensitivity (below 2x108 atoms/cm3) for detection of trace levels of contaminants
● Complete range of measurement modes including temperature scan, frequency scan, depth profiling, C-V, I-V, capture cross section, optical injections, MOS interface state density distribution measurements
● Controlled by digital or analog settings to allow real ease of operation
● Library database for accurate contamination identification for several semiconductor materials
From 30K to 325K
Closed Cycle He-cryostat
Automatic LN2 cryostat with controlled LN2 flow
Simple bath type LN2 cryostat
From 80K to 550K From 80K to 450K
before heat treatmentafter 30 min heat treatmentat 180 oC
Applications
Features
cryostats
Molybdenium
Fe-interstitial
Fe-B pair