VTS

VTSs .

, , .

VTSs / Polyimide Film, Mylar, foil . , , , , .

VTS

AWC-550 AWC-550, , .

--, , , , / 4DC 3 (PET, PI, etc.) . 380mm

up to 550 mm 25 to 200

0.1 to 5 M/min

VTS /

, , ,

- I.e.100%

(0.1-5mTorr)

Current Density Distribution Profile

DC Power vs Deposition RatePosition vs Deposition Profile/min VTS /

, , ,

(0.8- 5mTorr)

VTS FCCL

VTS FCCL polyimide polyimide ATEC Polyimide

VTS FCCL polyimide Low Current DensityHigh Current DensityATEC Polyimide

VTS FCCL PMDAODA ., PMDA-ODA polyimideO 1s, N 1s, and C 1sXPS (eV) (eV) , PMDA-ODA polyimideO 1s, N 1s, and C 1sXPS polyimide XPS

VTS FCCL polyimide SAM By Gas A + C By Gas ABy Gas CRaw Film

VTS FCCL Polyimide

VTS FCCL & (150, 168h)

By Gas A + CBy Gas C : : 3 : MD CPI : 38 : 9 : (90) : 50 / min Mean : 0.80 kgf/cm Mean : 0. 78 kgf/cmHCL KOH Mean : 0.79 kgf/cm VTS FCCL

By Gas ABy Gas A + CBy Gas C VTS / :

VTS :

VTS DC :

Pl : : : 0.32 kgf/

: 0.78 kgf/