長澤佳克 - vinalab.org.vn · separation (chromatographic), chemical analysis, ... physical...
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2015/08/06
JAIMA Seminar in Ho Chi Minh City
長澤 佳克
Yoshikatsu Nagasawa Ph.D
Instrumental Analysis Overview
and
Analysis of Food Packaging Materials
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Change of the Subject in Japan201020052000
Resist material
Plating bath
Electronic paper
Fuel cell
Org-EL
Nano-hybrid materials
Biomedicine
Low-k、High-k
Li-battery Solar cell
MEMS
LED lighting
SiC
CNT,Fullerene
GaN:LEDGaAs
Exhaust gas catalysts
RO membrane
Dioxin
3D-MountingCMP
GHG
Lead-free solderSi deviceTextileFilmResin
Magnetic TapeHard DiskOptical Fiber
Biomass
Sensor
Generic Medicine Compound DrugsRegeneration medicine
Medical devicexxx: Electronics, Device
xxx: Energy, Environmentxxx: New materials
xxx: Life science Automotive
Packaging Materials, Packaging Film , Laminate Film, Nano-Laminated Film
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Constitution of Advanced MaterialsMetal
SemiconductorInorganic materialOrganic material
(Polymer)
Organic material
Composite, Miniaturization, Laminating, Thinning, Integration (Thin layer, Fine particles, Additive)
•Materials forBuilding industry, Machine industry,Energy industry, Food industry, Textile Industry, Electronic industry・・
Electronic Device, Photoelectric conversion element, Functionality fiber, Cosmetics, Dispersing agent, Surfactant, Coating agent, Colors, Pigments, Laminated film, Catalyst ・・
Nanotechnology ! Nano particles, Nano layers
• High-performance materialsHigh strength, Super lightweight, High heat resistance, High electric conductive, Low resistance, High transparence, High response speed, Biodegradability, Biocompatibility, Environment-friendly
These products consist of various materials.
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Constitution of Advanced MaterialsMetal
SemiconductorInorganic materialOrganic material
(Polymer)
Organic material
Composite, Miniaturization, Laminating, Thinning, Integration (Thin layer, Fine particles, Additive)
•Materials forBuilding industry, Machine industry,Energy industry, Food industry, Textile Industry, Electronic industry・・
Electronic Device, Photoelectric conversion element, Functionality fiber, Cosmetics, Dispersing agent, Surfactant, Coating agent, Colors, Pigments, Laminated film, Catalyst ・・
Nanotechnology ! Nano particles, Nano layers
• High-performance materialsHigh strength, Super lightweight, High heat resistance, High electric conductive, Low resistance, High transparence, High response speed, Biodegradability, Biocompatibility, Environment-friendly
These products consist of various materials.
You should Control an Atomic and a Molecular Level Chemical structure, Crystal structure & Morphology !
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The study of the separation, identification, and quantification of the chemical components of
natural and artificial materials using chemical technique, spectrophotometric technique.
The Spread of Instrumental Analysis!
• Study of Qualitative & Quantitative analysisSeparation (chromatographic), Chemical analysis, Spectroscopic analysis
• Pursuit of the high reliability “Precision” “Accuracy”→ 「Quality control, Shipment management」*
• Development of a trace and an ultra trace level quantitative analysis (ppb)
→ 「Mercury, Dioxin, Semiconductor Impurities」*
*Analytical Chemistry in Industry
Analytical Chemistry in 20th Century
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Challenge to ultimate analysis!
A fusion of chemical analysis and datamining technology!
• Measurements of ultralow concentrationDetection of one atom, one molecule. ppt, ppq, fmol, amol.
• Analysis of an atomic and a molecular level Matter Morphology, Composition, Chemical structure, Crystal structure
• Measurements of bioactivity, physiologic functions Comprehensive analysisGenomics, Proteomics, Analysis of gene expression,
High throughput screening
Analytical Chemistry in 21st century
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Analytical Chemistry in 21st century
• In-situ analysis Inline Online analysis, Monitoring system
• Developments of hardware and software– Highly developed, Ultra-high sensitive instruments :
Large scale analysis facility (SOR etc.), Compact analytical device (MEMS utilization)
– Related advanced technologyRobotization, High selective separation technology, High selective or high sensitive detector, High brightness source
– Fusion with digital technologyLarge data transmission, Data mining, Image processing, Connection with LIMS, etc.
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Comparison of 20th Century and 21st Century
J.Phys.Chem.,82, 1989(1978)
Cadmium Arachidate on Glass by FTIR-ATR Method
Barium Arachidate on Si. In Transmission mode
2 layers (5.59nm)2001
FTIRDuration: A Half Day Duration: 10min.
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Evolution of Analytical Instrument in 21stC
Stability User-friendlyHigh-throughputHigh-sensitivity
High data-processing capacity↑
Contribution of Digital Technology and
Personal Computer
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Role of Analytical Chemistry in Industry
• Qualitative & Quantitative analysis↓
• Clarify the Chemical State and Morphology
• Elucidate Chemical Structure
• Clarify Chemical and Physical Properties.
Development of Composite, Semiconductor, Nano-Material 「Material Characterization」Surface, Interfacial Analysis. Analysis of Crystal Structure, Molecular Orientation, Molecular Interaction.
Measurements of Ultralow ConcentrationDetection of Morphology, Composition, Chemical Structure, Crystal structure at an Atomic level or a Molecular level Matter
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Material Characterization withAnalytical Chemistry
Molecular Structure :Component, Additives, Impurity, ElementsHPLC,GC,FTIR,NMR,GC-MS,LC-MS.MALDI-MS,ICP,IC,XRD,XRF
FTIR,RAMAN, SSNMR, GPC,XRD, DSC,Morphology: Crystallinity, Layer Construction, Phase-Seperation
SEM,TEM(STEM),SPM,AEM,XRD, GD-OESPhysical Property: Thermal Property, Mehcnical Property, etc.
DSC,Viscoelasticity, Pore diameter
Molecular Structure: Molecular Weight, Crystal Structure,aaaaaaaaaOrientation
Design confirmation : Composition, Crystal Structure, Layer Structure
Troubleshooting: Alien Substance, Foreign Materials Change of Color, Break Away
Solve Degradation/Deterioration: Time Degradation, Thermal Degradation, Photo Degradation, Mechanical Deterioration
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Analytical Chemistry in IndustryAnalysis of
Food Packaging Materials
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Analytical TechnologyNecessary from R&D through Production
“Acceptance inspection”“Shipping inspection”
“Failure analysis”
“Degradation mechanism”
TreatmentSynthesisCleaningAssemblingMounting
Clean technologyHigh efficiencyQuality control
Bulk analysisStructure
ComponentTrace
Surface AnalysisInterface AnalysisMicroanalysis
Contamination
Foreign material
Process Development
“Molecular Design”
“Structure Design”
“Physicality Control”
“Interaction”“Patent
Application”
R&D
Production Sales
“Cost cut”“Quality control”“Environmental management”
“Ensuring safety”“Compliance ”“Complaints
handling”
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Analytical Technology necessary from R&D through Production
“Acceptance inspection”“Shipping inspection”
“Failure analysis”
“Degradation mechanism”
TreatmentSynthesisCleaningAssemblingMounting
Clean technologyHigh efficiencyQuality control
Bulk analysisStructure
ComponentTrace
Surface AnalysisInterface AnalysisMicroanalysis
Contamination
Foreign material
Process Development
“Molecular Design”
“Structure Design”
“Physicality Control”
“Interaction”“Patent
Application”
R&D
“Cost cut”“Quality control”“Environmental management”
“Ensuring safety”“Compliance ”“Complaints
handling”
Production Sales
•Problem occurred in technology transfer from R&D to Manufacturing
•Post Marketing Complain occurred (Failure, Defectiveness)
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Classification of Analytical Chemistryin Company
1)Production management • Quality control (Acceptance inspection, Shop floor control,
Shipping inspection, Environmental data measurement)to provide steady production, even quality.
• Process control (process monitoring, Inline Online analysis) for productivity maintenance, prevention of trouble.
2)R&D support works Structure design verification, Reaction confirmation, Application, Patent application, Reverse engineering, Complaints handling
3)Analysis based on regulations, laws and ordinances• Environmental analysis: Public regulation items such as soot particle,
the quality of the water, radiation measurement.
• CSR connection: Inspection examination proof, product proof,
material safety data sheet.
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Classification of Analytical Chemistryin Company
1)Production management • Quality control (Acceptance inspection, Shop floor control,
Shipping inspection, Environmental data measurement)to provide steady production, even quality.
• Process control (process monitoring, Inline Online analysis) for productivity maintenance, prevention of trouble.
2)R&D support works Structure design verification, Reaction confirmation, Application, Patent application, Reverse engineering, Complaints handling
3)Analysis based on regulations, laws and ordinances• Environmental analysis: Public regulation items such as soot particle,
the quality of the water, radiation measurement.
• CSR connection: Inspection examination proof, product proof,
material safety data sheet.
Detection of Morphology, Composition, Chemical Structure, Crystal structure at an Atomic level or a Molecular level Matter
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EDX and FTIR are widely used for analysis of foreign contaminant matter, but recently, these instruments are increasingly being utilized in tandem to conduct contaminant analysis1). While identification using any of these instruments and analytical methods independently is limited to some degree, using them in conjunction with one another permits a more detailed elucidation of the contaminant characteristics, thereby enhancing the validity of the respective results.
Contaminants Analysis in Food Manufacturing Process
-by EDX and FTIR
Application News No.X261 Shimadzu Corporation, 2015
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Pretreatment and Analysis Procedure
Application News No.X261 Shimadzu Corporation, 2015
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Qualitative-Quantitative Result of Sample 1
Sample 1 Characteristics: Metallic luster, hard, silvery white
Application News No.X261 Shimadzu Corporation, 2015
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Qualitative-Quantitative Result of Sample 2
Sample 2 Characteristics: Metallic luster, hard, silver
Application News No.X261 Shimadzu Corporation, 2015
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Qualitative-Quantitative Result by EDX
Sample 3 Characteristics: No metallic luster, brittle, brownish red
Application News No.X261 Shimadzu Corporation, 2015
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80010001200140016001800200024002800320036004000cm-1
Abs
― Polyethylene― Oil/Fat― Polysaccharide― Sample3
Infrared Spectra and Search Result
Application News No.X261 Shimadzu Corporation, 2015
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Measurement Result Possible SourceTotal Findings
Found by EDX and FTIR
EDX
Detected 19K, 20Ca, and other food components.Principal component is 9F and below. (RhK�αC is Fig.2))
Food clumpPolyethylene with
attached food components
FTIRPolyethylene, oils and fats, polysaccharides
Polyethylene with attached oils/fats and polysaccharides
Analysis Results of Sample 3
Application News No.X261 Shimadzu Corporation, 2015
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Qualitative-Quantitative Results of by EDX
Sample 4 Characteristics: Non-metallic luster, hard, black
Application News No.X261 Shimadzu Corporation, 2015
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Infrared Spectra and Search Result of Sample 4
Analysis Results for Sample 4
Application News No.X261 Shimadzu Corporation, 2015
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Qualitative-Quantitative Results of by EDX
Sample 5 Characteristics: Some metallic luster, hard, black silver color
Regarding the EDX quantitative analysis results• Organic material is represented by CH2O, and was balanced.• Abundant, small quantity, etc. are relative reference values.
(In order to collectively set plating, film and deposits, etc.)Application News No.X261 Shimadzu Corporation, 2015
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Infrared Spectra and Search Result of Sample 5
Analysis Results for Sample 5
Application News No.X261 Shimadzu Corporation, 2015
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Micro-Analysis (FTIR)
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→ Cannot avoid the trouble by the Foreign Materials
Foreign Material!, Aliant !, Foreign Matter!
Foreign Material?
Necessary of Microanalysis
Grasp Circumstances of Foreign Material Occurring
Observe Shape Morphology
Information of Element
Information of Component
To solve the problem
Foreign material is defined as any material that does not originate from the material (Product) or grew in a Product, which is not
familiar with the main material and produces a trouble.
Emphasizing the light, thin, short and small
.
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Inorganic Plate
Micro-sampling Method(FTIR)
Foreign Material
Limit of Sampling
Impossible for Sampling
~5μm(On solid Substrate)~10μm(In Resin)
Liquid, Low viscosity, In Sticky Material
Optical Microscope x200)
FTIR Microscope
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1000 1500 2000 2000 3000
Wavenumbers (cm-1)
Abs
(1)Around Foreign particle
(2)Normal Area
Difference Spectrum (1) –(2)
Never found Spectrum of Foreign Particle
IR
PP Film Cross Section
SampleSample
Direct MethodDirect
Method
Direct MethodDirect MethodPP film 30μm thickness
Direct Transmission Methods
10μm
Foreign Particle
Foreign Particle
Foreign Particle in Polypropylene film
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1000 1500 2000 2000 3000
Wavenumbers (cm-1)
Technique of Micro-Sampling
Step3/Squash Foreign Material and Measure by Transmission Mode
Micro-Sampling with Infrared Transmission Microscope is effective to o
btain much information exactly.
ResultsResults
Step2
Step3
Ge板
Step1/Leave PP on Foreign material and Open
吸収帯の歪
SiOx
Organics besides PP
10μm
Abs
Step2/Pick Up Foreign Material and Measure by Transmission Mode
Ge板
Distortion of BandMicro-Sampling with Hands
10μm
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Trouble Shooting :Foreign Small Particle
10mm15m 20mmBase Film
Embedding Resign ca.5mm thick
拡大
SurfaceCross Section
Confirm Position Thickness
Direct Measurement
Micro-SamplingIsolation from Base Film
Resign Embedding・Cross Section Making
4000 3000 2000 1000
wavenumber (cm-1)4000 3000 2000 1000
wavenumber (cm-1)
《IR Spectrum》
PMMA
《Raman Spectrum》
PMMA
CHCH
C=O
C-O
CH
CHC=O
C-C
Black Particle :Fe2O3
Raman Spectrum
The TRC News No.116 (Mar. 2013)
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Trouble Shooting : Contaminant on Surface
<Quantitative Analysis by NMR Silicone Oil on PET>
Internal Standard :I.S.
※1,1,2,2-Tetrabromoethane(TBE)
1H-NMRI.S.
(TBE)↓
×× ×
×:solvent
▼:PET oligomer
▼
▼
Si-CH3
↓
《1H-NMR Spectrum of Recovered Extract》
9 8 7 6 5 4 1 0 (ppm)
~ ~
Film
Vessel for Collect Extract
Sample Vessel
Extract
《Recovering Contaminant of Surface》:One-Side Extraction
~ ~
Silicone 5.4g
10cmΦ
The TRC News No.116 (Mar. 2013)
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Importance of Interface in Packaging Materials
Packaging films are majorly used to enhance the shelf life of the food products or consumer goods.
Packaging films also offers protection and quality to the products.
The requirements of barrier properties of packaging materials against environmental factors vary with food products and, the increased level of system miniaturization and integration requires the deposition of thin films which are highly uniform, homogenous, conformal, dense, and free from defects, cracks and pinholes.
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Packaging Connections.HP
Plastic lamination films are big families. Every kind of film has its advantage which other plastic film may not have. So, combination with several of them will obtain all-in- one unique physical characters.
Being printed logo and pretty designs on the surface film will make the laminated films become much colorful, attractive and more valuable. Charming printing is one of the most important sales means to expand business anyway.
No matter how many layers there would be, the inner layer must be sealable by heat blades of bag -converting machine, the outer layer must be printable and the middle layer or layers must have main barrier functions according to design purpose of packaging.
Packaging Connections HP
Laminated Film
http://www.beeradvocate.com/
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Analysis of Gas in a Tablet Package
Storage Condition : ①Room Temperature (25±3 ℃), Normal Humidity(60%)②High Temperature (80℃), High Humidity(100%), 20Hrs
Outer Packaging : Pillow-TypeMaterial : PE,PETVolume: ca 100mL
Inner Packaging : PTPMaterial : PVC, M(Al Foil)Volume: ca 0.5mL/1pocket
HPLC Derivatization TPD-MS
RT,NH
HT,HH
RT,NHHT,HH
Sealing in Air CO2 to N2 Ratio Increased
Aldehyde compound 1-10C
Conc. (ng/mL)Component
TRC Poster Session 2014
4
Analysis of Gas in a Tablet Package
GC/MS
Aldehyde of the C6 from C1
RT,NH
HT,HH
RT,NH
HT,HH
Aldehyde, Ketone and Toluene Increased
Organic Gases were generated from the package by heating in humid environment.
Outer Packaging : Pillow-Type
GC/MS
Inner Packaging : PTP
Conc. (ng/mL)
Component
ComponentConc. (ng/mL)
TRC Poster Session 2014
5
Importance of Surface & Interface
1. Role of Surface propertyWettability, Adhesiveness, Stickiness, Frictionality, Lubricity, Chemical Reactivity, Charging Property
2. Change, Degradation, Deterioration of SurfaceOxidation, Photo Deterioration, Chemical Deterioration, Bread Out of Additive and Oligomer
3. Surface Treatment, AlternationCoating, Graft Polymerization, Ion Implantation,Acid Treatment, Corona Discharge, Plasma Processing,UV Irradiation
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Adhesion Mechanisms at InterfaceA Various Theory of Adhesion Mechanism: Diffusion, Lifshitz-van
der Waals interactions, Molecular interactions, Mechanicalinterlock, Chemical bonding, Electrostatic
The strength of the adhesion between two materials depends on which of the above mechanisms occur between the two materials, and the surface area over which the two materials contact. Adhesion level also depends on the substrate materials and process temperature and Humidity
Poor Adhesion, Peeling Defects ←Inhibiting Adhesion Factors
Physical Bonding
Dispersive, Non-DispersiveForces (Polar, HydrogenBond…)
+ - + -+ - +-
Mechanical Interlock
Adhesive flowing into pores and get physically stuck upon polymerizing.
Chemical Bonding
Formation of chemical bonds between adhesive and adherent
C
B
A
C
B
A
C
B
A
C
B
A
Diffusion
Adhesive Weaving into Adherent or Both Polymers Cross Interface.
TRC Poster Session 2015
7
Cause of Poor Adhesion, Peeling Defects
Poor Adhesion, Peeling Defects have Several Patters
Destruction in Layer
Check the Pattern in Morphological Observation
Peeling at Interface
Exists Inhibiting Factor between Interface
Destruction in Adhesive
Exists Inhibiting Factor in Adhesive
Destruction in Adherent
Exists Inhibiting Factor in Adherent
adhesive
substrate
TRC Poster Session 2015
In the issue of peeling , we have to identify the peeling surface.→ FTIR-ATR, XPS, SEM-EDX
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FTIR-ATR Spectra of Peeling Surface
ATR spectrumof Peeling Surface
ATR Spectrum of Base Film
1000150020002500300035004000
abso
rban
ceab
sorb
ance
1000150020002500300035004000
Difference Spectrum
1000150020002500300035004000
abso
rban
ce
Silicone
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Causative agent of Poor Adhesion, Peeling Defects
→ Surface Contaminant, Bleed Out,Existence of Foreign Material
• Contaminant from Air
• Residue of Release Agent
• Residual Monomer and Oligomer from Resin.• Void Jammed by Air or Degas from Resin.
• Lack of Surface Treatment (Washing, Corona
Processing, Plasma Processing)
Analysis : TOF-SIMS, XPS, FT-IR, Micro-IR, Contact Angle, SEM, TEM [Detection of Contaminant, Foreign Material.]
Peeling at Interface
Peeling at Interface
Exists Inhibiting Factor between Interface
adhesive
substrate
TRC Poster Session 2015
10
Causative agent of Poor Adhesion, Peeling Defects
→ Deterioration of Polymer
• The Polymer is easy to be hydrolyzed?
• Contacts with Reactive Metal?
• How about environment? (Heat, Ultraviolet Rays, Oxygen, Ozone, Water, Acids, Existence of the alkali)
• Excessive Surface Treatment? (Excessive Washing,
Corona, Processing, Plasma Processing made Brittle
Surface Layer.)
Analysis to Identify Deterioration:FT-IR, NMR, XPS, GPC, TPD-MS, SEM,TEM
Destruction of PolymerDestruction
in Layer
Lack of Polymerization or Excessive Reaction ⇒ made Brittle Layer
TRC Poster Session 2015
11
Factors Influence adhesive property and Analytical Techniques
Factors influence Adhesive Property Analytical Technique Potentials
Wetability, Surface Free EnergyContact Angle (Caluculation ofSurface Free Energy)
Establishing Adherent ModelRelation with Adhesive Strength
GD-OES High Sensitivity, Rapid Depth Profile
XPS (with Chemical Modification)High Surface Sensitivity, GoodQuantitativity
TOF-SIMS (GCIB Sputtering)High Surface Sensitivity,High Spacial Resolution,High Detection Limit
FT-IRA lot of Structure InformationMolecular Orientation
Surface Fine Structure SEM EDXObserve Highly Sensitively SurfaceShape, Easy to Use
Interface Ultra Fine Structure TEM EDXObserve nm order InterfaceStructure
Anchoring Effect, (Increase Surface Area) AFM Quantification of Surface Roughness
Mechanical & Thermal Property of Surface VE-AFMHigh Spacial Resolution,Semi-Quantification
Nano IndentationEvaluate Hardness and Elastisity ofnumber of the outer layers 10nm,
μTA, Fast-DSC Tg, Mp of Small Area, Small Sample(VE-AFM:Visco-Elasticity Atomic Force Microscopy)
Cohesion of Adherend, Stress Concentrationin Peering
Composition, Chemical Structure, FunctionalGroup of Surface
(Chemical Bond, Intermolecular Force)
TRC Poster Session 2015
12
Corona Discharge Treating on PETCorona Discharge Treatment for Bonding Easily
Contact Angle and Surface Free EnergyContact Angle of Probe Liquids
0 20 40 60
After
Before
Surface Free Energy (mN/m)
Dispersion Component
Polar Component Hydrogen Bond Component
Droplet Shape of Ethylene Glycol
Before
After
Gas Phase Chemical Modification for XPS Trifluoro-acetic Acid modification
Surface microscopic observation by AFM
Surface Roughness
Before After
AFM Image(400 nm□)
O/C -COH/C -COOH/C
Before 0.40 0.004 0.003
After 0.45 0.023 0.017
Atomic Ratio and Amount of Functional Group Ra Rms Rmax 表面積超過
Before 0.65 nm 0.81 nm 5.9 nm 0.58 %
After 0.95 nm 1.24 nm 9.2 nm 1.13 %
Before 65.5゜ 48.3゜ 37.7゜ 22.3゜
After 54.0゜ 29.9゜ 15.9゜ 26.4゜
WaterFormamideHCONH2
Ethylene Glycol(CH2)2(OH)2
Methylene iodideCH2I2
LiquidSample
Before
After
TRC Poster Session 2015
13
GD-OES : Pulsed RF Glow Discharge Spectrometry
RF Electric Power
Ar+
Sputtering
Excitation
Emission
Emission Spectrum Analysis
• Measurement of Emission from Excited Species in Ar Plasma.• Rapid Spattering enable to investigate to more than 150 microns depth with as
good as 1 nm depth resolution.
Sample
.
Pulsed RF GD-OES is the only technique that can provide both surface, depth profile and bulk composition, and with high sensitivity to all elements for almost all solid materials, including metals, metal alloy coatings, glass, semiconductors, polymer coatings, etc.It relies on the controlled sputtering of a representative area of the material of interest and the simultaneous detection of the sputtered species. Pulsed RF GDOES is the ideal tool to investigate from the surface down to more than 150 microns with a depth resolution that can.
The TRC News No.116 (Mar. 2013)
HORIBA Ltd. HP
14
GD-OES Results of Laminated Packaging film
Laminated Film Non-chlorine-based Film
Depth Depth
Cl : Originated from PVDC High Si Concentration at
Surface
Nor
mal
ized
In
ten
sity
Nor
mal
ized
In
ten
sity
TRC Poster Session 2015
15
What is the Gas Cluster Ion Beam?The Gas Cluster Ion Beam (GCIB) technology is an advanced technology from Japan,
developed at Kyoto University. GCIB is an ion beam consisting of several thousand gas atoms (molecules) such as argon, which enables ion beam etching with extremely low energy per atom and surface flattening after etching, not possible with other ion beam technologies.
Comparison of the characteristics of ion beams of the past and cluster ion beams
ULVAC-PHI, INCORPORATED HP
16
What is the Gas Cluster Ion Beam?In surface analyses such as XPS and TOF-SIMS, cluster ions have always been used. Among
cluster ions, C60 ions in particular are capable of surface cleaning and low damage sputter etching on many polymers and organic materials, and are thus used in many commercial analyzers, with several dozen currently in practical use for surface analysis around the world. Ar gas cluster ion beams leave hardly any recognizable chemical change caused by the irradiation ion on the post-etching surface, it enables low damage/high depth resolution etching with ultra-low energy ion etching at approximately 1 to 20 eV per atom, which cannot be accomplished with C60.
Overview of gas cluster ion beam instrument
ULVAC-PHI, INCORPORATED HP
Overview of gas cluster ion beam instrument
17
GCIB/TOF-SIMS Analysis of Laminated Polymer film
GCIB enables the depth profile of Laminate Film!
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Al/Polymer Interface AnalysisGCIB-TOF-SIMS Analysis
PET/PE①/Al/PE②/LLDPE Primary Ion :Bi3+, Etching Ion :Ar +Cluster
From Front Surface (PET Film)
From Back Surface (LLDPE Film)
New Thin-Film Preparation
In GC=IB, Etching Rate of Metal is very slow!
Long Etching Time and Existence of Inorganic Filler Roughen Measurement Surface.
New Thin-Film Preparation Technique Altars Depth
Resolution about Fifty Times
Existence of PET Oligomer, PDMS and Mg at Al/PE
Interface.Preparation
Analysis
TRC Poster Session 2015
19
Before and After One Side Elution TestGCIB-TOF-SIMs Result after Elution Test of Food Packaging Material
One Side Elution Test : 50% EtOH, 110℃, 10hrs
Before After
CNO :Origin of Nylon
Cl :Origin of PVC
Surfactant
CNO :Origin of Nylon
Cl :Origin of PVC
Surfactant
AntioxidantAntioxidant
UV AbsorberUV Absorber
Cl and Surfactant Distributions Varying!
Surfactant near Interface Spread into Nylon Layer and Phosphorus-based Antioxidant-assistant also Spreads into Nylon Side.
TRC Poster Session 2015
Elution Penetration
SolventJig
Food side layer
Functional layerLaminate film
Outer layer
1
SEM Image of Al Evaporated PP filmFiller
Evaporated Al
Evaporated Al 50nm
Ink
Polypropylene
SAMPLE PREPARATION BY MICROTOME
SAMPLE PREPARATION BY ION POLISHING
Enlargement Enlargement
Nitto Analytical Techno-Center Co HP
22
FIB-SEM RESULTS (Cross Section of Wrapper )Overall Image of
Cross sectionFIB Image
Backscattered Electron Composition image (BEC)
SEM Image (SEI)
Enlargement
33
FIB-SEM RESULTS (Cross Section of Wrapper )
Ti Particle Layer
Organic Layer (C,O etc.)
Al Layer
Presented by JEOL Ltd.
4
TEM Image of Metallic Luster Forming Film
Co-Polymerization PET
TORAY Advanced Material Symposium 2006TORAY HP
Metallic Luster Forming FilmAn entirely new film with metallic luster without using metal
Items: Environment-friendliness, light transmittance, electromagnetic wave transmission, formability
Focus: To develop a film with superior properties of environment-friendliness, light transmittance, electromagnetic wave transmission and formability by not using metal
Impacts: We were able to achieve metallic luster and light transmittance with innovation of film structure alone. The film can replace plating, coating and metal vapor deposition
5
Method, Instrument
Wave Length Nature Spatial
Resolution Information
Micro-FTIR 10μm Molecular Vibration
~10μm Functional Group, Orientation,
Crystallinity Molecular Interraction
RAMAN Microprobe
1μm Molecular Vibration
~1μm Skeleton Structure, Orientation,
Crystallinity
UV-VIS Microscope
300nm Electronic Transition
~1μm Electric Structure
XPS 10nm Electronic Transition
10μm Surface Element, Functional Group
TOF-SIMS 100eV Ion Mass 200 nm Chemical Element, Chemical Structure,
Mapping
TEM・SEM-EDX 100keV Electric State (XRF)
0.1nm Chemical Element, Element Mapping
TEM-EELS 100keV Elastic Scattering Core Excitation
0.1nm Chemical Element, Mapping
Instruments for Micro-Analysis
6
Instruments for Surface AnalysisMethod
InstrumentProbe Detect signal
Application Implementation
DepthResolution
Detection Limit
SpatialResolution
XPS(ESCA) X-ray Photo ElectronElement Chemical
Shift, Map2~5 nm % 10 µm
TOF-SIMS Ion Second. IonElement, Chemical
bond, Map1~2 nm ppm 200 nm
EPMA Electron Beam X-ray Element, Map 1 µm % 1 µm
SEMSurface
Morphology1 µm % 0.7 nm
TEM, STEM, Electron Beam Electron Morphology, 0.1 nm 0.1 nm 0.1 nm
SPM Needle Atomic force etc.Surface
Morphology, Roughness
0.1~nm 0.01 nm 0.1 nm
Laser RAMAN Visible Ray Raman scattering
Chemical bond,Orientation、Crystallinity, Identification
10 nm % 0.5 µm
FTIR Infrared RayTransmissionReflection Ray
Chemical bond,Orientation、
Second. Structure,, Identification
100 nm % 8 µm
7
Devices for Preparation
Bulk Analysis• Microwave Digestion
• Ultra-centrifugal Separator
• Preparative HPLC
Surface Analysis, Micro-Analysis• Cutting Machine: Microtome, Diagonal Cutting
• Etching Device ; Dry Etching, Reactive Ion Etching, Ion milling, Ion polishing, FIB(Focused Ion Beam)
• Hybrid Techniques; FIB-SEM, IP-SEM, SIMS
Inorganic, Organic Analysis
8
まとめSummery of Analysis Procedure
8
Observation of Peeling Area
Peeling at Interface
Destruction in Layer
Contaminant, Foreign Material
1.Deterioration of Resin
2.Interface Destruction, Cohesive Failure
TOF-SIMS, XPS, FTIR, Micro-IR, Contact Angle, SEM etc.
TEM, SEM, TOF-SIMS, FT-IR etc.
FTIR, NMR, XPS, GPC, TPD-MS etc.
FTIR, RAMAN, DSC, XRD, KF method, TPD-MS, GC,Linear Expansion Coefficient, Polarizing Microscope etc.
1
Appendix
2
Features of EDX, FTIR
EDX-7000
IRTracer-100+AIM-8800
Application News No.X261 Shimadzu Corporation, 2015
3
Analytical Conditions [EDX]
Instrument : EDX-7000
Elements : Na-U
Analytical Group : Qualitative-quantitative
Detector : SDD
X-ray Tube : Rh target
Tube Voltage [kV] : 15,50
Current [μA] : Auto
Collimator [mmφ] : 1
Primary Filter : #2
Atmosphere : Vacuum
Integration Time [sec] : 50 /ch(3ch)
Analytical Conditions [FTIR]
Instruments : IRTracer-100,AIM-8800Resolution : 8cm-1
Accumulation : 40Apodization : Sqr-TriangleDetector : MCTMode : Microscope
with ATR Attachment
Analytical Instruments and Analytical Conditions
Application News No.X261 Shimadzu Corporation, 2015
4
Raman Spectrometer
4
Sample
Spectrometer
Grating
CCD detector
Data processor
Notch filter
5
IR Microscope
Cass grain type lens Objective lens & CCD camera
Infrared semitransparent mirror
Aperture, Mask
Cass grain type lens
Stage & Sample
Cass grain type lens
Infrared semitransparent mirror
(Aperture, Mask)
Visible light
MCT detector
Infrared ray
6
Attenuated Total Reflection(ATR)
Incident Angle : θWave Length : λ
Sample
n1
n2
Refractive Index :nn1> n2
θ
ATR Crystal
dp :Penetration Depth
Multiple Reflections
θ
Ge=4.0
Metal Plate
Diamond ATR
CrystalSample
IR ray Supporting Element
Single Reflection Attachment
Shimadzu Cooperation. HP
7
Cross Section Polisher
図1-1 CPの模式図 図1-2 加工時の模式図
Ar Ion Gun
Masking Plate
Specimen
Masking Plate
Specimen
Principle of CP Principle of CP with a Masking Plate
Cross Section
Jeol HP
The CP uses an argon beam to mill cross sections or polish virtually any material that is affixed to the continuously rotating sample holder. There is no precedent for a cross sectioning instrument of this type for SEM, EPMA, and SAM sample preparation.
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Surface Analysis
Electron Beam
Backscatteredelectron
X-ray
ION
Backscattered ion
X-ray
Photon X-ray
Photon
Auger electron
PhotonX-ray
Secondary electron :SEM
Auger Electron :AESX-ray :EDX,EPMA
X-ray :XPS(ESCA)Photon :FTIR, RAMAN
Secondary ion:SIMS
TOF-SIMSBackscattered ion
:RBS
Secondary electron
Auger electron
Secondary electron