高速流体制御を用いたオンチップミキシング -...
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高速流体制御を用いたオンチップミキシング○笠井宥佑，佐久間臣耶，新井史人
名古屋大学大学院 工学研究科 マイクロ・ナノ機械理工学専攻
Background : Dynamic stimulation
K. Nakatani et al, Journal of bacteriology, 2015
Volume change of Synechocystis
𝑉𝑉 =𝜋𝜋𝑟𝑟02
4𝛿𝛿 = 20 nl
Maximum volume of membrane pump
𝑓𝑓 =10.212𝜋𝜋𝑟𝑟02
𝐸𝐸ℎ2
12(1 − 𝜇𝜇2)
Natural frequency of membrane pump180 times faster thannatural frequency ofPDMS chip (𝐸𝐸 ≈ 2 MPa)≈ 192 kHz
𝑉𝑉: Volume of membrane pump𝑟𝑟0: Radios of membrane𝛿𝛿: Displacement of membrane pump
𝑓𝑓: Natural frequency of membrane pumpℎ: Thickness of membrane𝐸𝐸: Young’s modulus of material of membrane𝜇𝜇: Poisson’s ratio of material of membrane
𝑟𝑟
𝜃𝜃
𝑟𝑟0
ℎ𝑥𝑥
𝑦𝑦 Cover layerMicrochannel layerBase layer
Main channel crossingng area
𝛿𝛿
Analysis of membrane pump
BenchmarkType Passive Passive Active ActiveMethods Narrow channel Turbulent flow Acoustic oscillation Vortex using flow control
Mixing time ≈ 1 ms 6.6 ms ≈ 100 ms 1.5 msDimensions ofcross-section
(Width) x (Height)200 x 8 µm
(Width) x (Height)500 x 10 µm
(Width) x (Height)400 x 50 µm
(Width) x (Height)200 x 200 µm
Remarks • Simple configuration• Not on/off control
• Simple configuration• Not on/off control
• On/off control• Heating (≈ +40℃)
• On/off control• Few heating (≈ +4.1℃)
W. Buchegger, Microfluid Nanofluid, 2011 T-D. Luong et al, Microfluid Nanofluid, 2011
本研究に関するお問い合わせ先：笠井 宥佑 (Yusuke Kasai)E-mail: [email protected], URL: http://www.biorobotics.mech.nagoya-u.ac.jp/〒464-8601 名古屋市千種区不老町名古屋大学大学院工学研究科マイクロ・ナノ機械理工学専攻新井研究室TEL: 052-789-5220, FAX : 052-789-5027
Abstract: In this paper, we propose an on-demand on-chip micromixer usinglocal high-speed flow which generates vortices in a microchannel. Themicromixer utilizes vortices for mixing by using high-speed flow control. Wesucceeded in generating vortices in a microfluidic chip within 28 μs. Inaddition, we successfully demonstrated on-demand mixing by applyingvarious input signals to the micromixer. The mixing was about 1.5 ms, whichis 66 times faster than previous mixing methods using acoustic oscillation.
Input voltage to piezoelectric actuatorsPump A Pump B
R. Zhang et al, Scientific Reports, 2017
Protein expression of yeast
Next : msec-order stimulation method
On - chip dual membrane pumpswith high - rigidity chip
Vertical sheath inletHorizontal sheath
inletSample inlet
Outlet 1Outlet 2
Priming port
Fixation hole
Mixing time :1.5 ms
0
50
100
150
Brig
htne
ss [-
]
0 102 4 6 8Time [ms]
Mixing principlePump A Pump B Pump A Pump BPump A Pump B
High-rigidity chip
BorosilicateglassSiliconBorosilicateglass
Evaluation of mixing
Vortex generation
200 µm
t = 0 µs
t = 24 µs
t = 40 µs
t = 480 µs
High speedlocal-flow
Main flow
0
0
50
100
150
Brig
htne
ss [-
]
1086420
0-50
50100
-100
0
50
100
150
ROI :1 x 76 pixel(3 x 200 um)
400 µm
Analysis line
200 µm
Before mixing
After mixing
Volta
ge
Time0
Main flow : 20 m/s
Oscillated local-flowwith 10 kHz
AttachmentGlass membrane
Piezoelectric actuatorOn-chip membrane pump
Chip fabrication
(v) Patterning of etching mask for sandblasting
(vi) Sandblasting
Si Cr Au
Glass SU-8
OFPRSCM250
(iii) Patterning of etching maskafteranodic bonding
(i) Patterning ofetching mask
(ii) HF etchingand cleaning
(iv) DRIE
(vii) Anodic bonding
Packaging
Base/Cover layer Cover layer
Channel layer
V. Kumaran et al, Chemical EngineeringScience, 2016
11 times larger thanvolume of crossing area
62.3%
200 µm
Before mixing
After mixing