fallsem2013 14 cp1853 07 aug 2013 rm02 chenming hu ch4 slides
TRANSCRIPT
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-1
Chapter 4 PN and Metal-Semiconductor Junctions
PN junction is present in perhaps every semiconductor device.
diodesymbol
N P
V
I
+
4.1 Building Blocks of the PN Junction Theory
V
I
Reverse bias Forward bias
Donor ions
N-type
P-type
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-2
4.1.1 Energy Band Diagram of a PN Junction
A depletion layerexists at the PN
junction where n0andp0.
Efis constant at
equilibrium
Ecand Evare smooth,
the exact shape to be
determined.
Ecand Evare known
relative to Ef
N-region P-region
(a) Ef
(c)
Ec
Ev
Ef
(b)
Ec
Ef
Ev
Ev
Ec
(d)
Depletion
layer
Neutral
P-region
Neutral
N-regionEc
Ev
Ef
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-3
4.1.2 Built-in Potential
Can the built-in potential be measured with a voltmeter?
(b)
(c)
(a)N-type
Nd
P-type
Na
Nd Na
Ef
Ec
Ev
qfbi
xN xPx
0
V
fbi
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-4
4.1.2 Built-in Potential
d
c
i
acbi
N
N
n
NN
q
kTAB lnln
2f
d
ckTAq
cd N
N
q
kTAeNNn ln N-region
2ln
i
adbi
n
NN
q
kTf
2
2
lni
ackTBq
c
a
i
n
NN
q
kTBeN
N
nn P-region
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-5
4.1.3 Poissons Equation
Gausss Law:
s:permittivity (~12ofor Si)
: charge density (C/cm3)
Poissons equation
Dx
(x) (x+ Dx)
x
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-6
4.2.1 Field and Potential in the Depletion Layer
On the P-sideof the
depletion layer,=qNa
On theN-side, = qNd
4.2 Depletion-Layer Model
s
aqN
dx
d
)()( 1 xxqN
CxqN
x Ps
a
s
a +
)()( Ns
d xxqN
x -
N P
Depletion La yer Ne utral R egion
xn
0 xp
x
xp
xn
qNd
qNa
x
xn xp
0
N eut ral Re gio n
N
N
N P
P
P
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-7
4.2.1 Field and Potential in the Depletion Layer
The electric field is continuous atx= 0.
Na |xP| = Nd|xP|
Which side of the junction is depleted more?
A one-sided junction is called aN+P junctionorP+N junction
N P
D epletion La yer N eutral R egi on
xn 0 xp
N eut ral Region
N P
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-8
4.2.1 Field and Potential in the Depletion Layer
On the P-side,
Arbitrarily choose the
voltage atx = xP asV = 0.
On the N-side,
2)(2
)( xxqN
xV Ps
a
2)(
2
)( Ns
d xxqN
DxV
2)(
2 Ns
dbi xx
qN
f
x
xn xp
Ec
EfEv
fbi ,built-in potential
0
xn
xp
x
fbiV
N
N
P
P
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-9
4.2.2 Depletion-Layer Width
Vis continuous atx =0
IfNa >> Nd, as in a P+Njunction,
What about a N+P junction?
wheredensitydopantlighterNNN ad
1111+
+
da
bisdepNP
NNqWxx
112 f
N
d
bisdep x
qNW
f2
qNW bisdep f2
N P
D epletion La yer N eu tral R egi on
xn 0 xp
N eut ral Re gion
0@ adNP NNxx||||
PN
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-10
EXAMPLE:A P+N junction has Na=1020 cm-3and Nd
=1017cm-3. What is a) its built in potential, b)Wdep, c)xN,
and d) xP?
Solution:
a)
b)
c)
d)
V1cm10
cm1010lnV026.0ln
620
61720
2
i
adbi
n
NN
q
kTf
m12.010106.1
11085.812222/1
1719
14
d
bisdep
qNW
f
m12.0 depN Wx
02.1m102.1 4 adNP NNxx
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-11
4.3 Reverse-Biased PN Junction
densitydopantlighterNNN ad
1111+
Does the depletion layerwiden or shr ink with
increasing reverse bias?
+ V
N P
qN
barrierpotential
qN
VW srbisdep
+
f 2|)|(2
(b) reverse-biased
qV
Ec
EcEfn
Ev
qfbi+ qV Efp
Ev
(a)V = 0
Ec
Ef
Ev
Ef
Ev
qfbiEc
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-12
4.4 Capacitance-Voltage Character istics
IsCdepa good thing?
How to minimize junction capacitance?
dep
sdep
WAC
N P
Nd Na
Conductor Insulator Conductor
Wde p
Reverse biased PN junction is
a capacitor.
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-13
4.4 Capacitance-Voltage Character istics
From this C-V data canNaandNdbe determined?
222
2
2
)(21
AqN
V
A
W
C S
bi
s
dep
dep
f
+
Vr
1/Cdep
2
Increasing reverse bias
Slope = 2/qNsA2
fbi
Capacitance data
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-14
EXAMPLE:If the slope of the line in the previous slide is
2x1023F-2 V-1, the intercept is 0.84V, and A is 1 mm2, find the
lighter and heavier doping concentrations Nland Nh .
Solution:
ln 2i
lh
bi n
NN
q
kT
f
318026.0
84.0
15
202
cm108.1106
10
eeNn
N kT
q
l
i
h
bif
Is this an accurate way to determine Nl ? Nh ?
315
28141923
2
cm106)cm101085.812106.1102/(2
)/(2
AqslopeN sl
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-15
4.5 Junction Breakdown
AZener diodeis designed to operate in the breakdown mode.
V
I
VB, breakdown
PN
A
R
Forward Current
Small leakageCurrent
voltage
3.7 V
R
IC
A
B
C
D
Zener diode
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-16
4.5.1 Peak Electric Field
2/1
|)|(2
)0(
+
rbi
s
p VqN
f
bicrits
BqN
V f
2
2
N+ PNa
Neutral Region
0 xp(a)
increasingreverse bias
xxp
(b)
increasing reverse biasp
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-17
4.5.2 Tunneling Breakdown
Dominant if both sides of
a junction are very heavily
doped.
V/cm106
critpV
I
Breakdown
Empty StatesFilled States-
Ev
Ec
peGJ/H
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-18
4.5.3 Avalanche Breakdownimpact ionization: an energetic
electron generating electron and
hole, which can also cause
impact ionization.
qNV critsB
2
2
Impact ionization + positive
feedbackavalanche breakdown
da
BN
1N1
N1V +
EcE
fn
Ec
Ev
Efp
originalelectron
electron-holepair generation
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-19
4.6 Forward BiasCarr ier I njection
M inori ty carr ier injection
+V
N PEc
EfEv
Ec
Efp
Ev
V= 0
Ef n
Forward biased
qf
bi
qV
-
+
qfbiqV
V=0
I=0
Forward biased
Dr if t and dif fusion cancel out
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-20
4.6 Forward Bias
Quasi-equi l ibr ium Boundary Condition
kTEEkTEE
c
kTEE
cfpfnfpcfnc eeNeNxn
/)(/)(/)(
P)(
kTqV
P
kTEE
P enen fpfn /
0
/)(
0
The minority carrierdensities are raised
by eqV/kT
Which side gets more
carrier injection?
Ec
Efp
Ev
Efn
0N 0P
x
Ec
Efn
Efp
Ev
x
Efn
xNxP
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-21
4.6 Carr ier I njection Under Forward Bias
Quasi-equi l ibr ium Boundary Condition
)1()()( 00 kTqV
PPPP ennxnxn
)1()()( 00 kTqV
NNNN eppxpxp
kTVq
a
ikTVq
P eN
nenn
2
0)xP(
kTVq
d
ikTVqN e
Nnepp
2
0)( xP
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-22
EXAMPLE: Carr ier I njection
A PN junction has Na=1019cm-3and Nd=10
16cm-3. The applied
voltage is 0.6 V.
Question: What are the minority carrier concentrations at the
depletion-region edges?
Solution:
Question: What are the excess minority carrier concentrations?
Solution:
-311026.06.00 cm1010)( eenxn kTVqPP
-314026.06.040 cm1010)( eepxp
kTVq
NN
-311110 cm101010)()( PPP nxnxn
-3144140 cm101010)()( NNN pxpxp
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-23
4.7 Current Continuity Equation
pq
xxJxxJ pp D D+
)()(
pxA
q
xxJA
q
xJA
pp D+D+
)()(
pq
dx
dJp
Dx
p
Jp(x+ Dx)
x
area
A
Jp(x)
Volume =ADx
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-24
4.7 Current Continuity Equation
Minority drift current is negligible;Jp=qDpdp/dx
Lpand Lnare the diffusion lengths
p
qdx
dJp
p
p
pq
dx
pdqD
2
2
22
2
ppp L
p
D
p
dx
pd
ppp DL
22
2
nL
n
dx
nd
nnn DL
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-25
4.8 Forward Biased Junction-- Excess Carr iers
22
2
pL
p
dx
pd
0)( p
)1()( /0 kTqV
NN epxp
pp LxLx BeAexp//
)( +
N
LxxkTqV
N xxeepxp pN ,)1()( //0
P N+
xP-xN
0
x
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-26
P
LxxkTqV
P xxeenxn nP
,)1()(
//
0
4.8 Excess Carr ier Distr ibutions
0.5
1.0
3Ln 2Ln Ln 0 Lp 2Lp3Lp 4Lp
N-side
Nd= 21017
cm-3
pN' ex /L
P-side
nP'ex /L
Na= 1017 cm -3
n p
N
LxxkTqV
N xxeepxp pN ,)1()( //0
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-27
EXAMPLE: Carr ier Distri bution in Forward-biased PN Diode
Sketch n'(x) on the P-side.313026.06.0
17
20/
2
0 cm1010
10)1()1()( ee
N
nenxn kTqV
a
ikTqV
PP
N-typeNd= 5cm-3
Dp=12 cm2/s
p= 1 ms
P-typeNa= 1017cm-3
Dn=36.4cm2 /s
n= 2 ms
x
N-side P-side1013cm-3
2
n ( =p )
p( = n )
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-28
How does Lncompare with a typical device size?
m8510236 6 nnn DL
What is p'(x) on the P- side?
EXAMPLE: Carr ier Distri bution in Forward-biased PN Diode
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-29
4.9 PN Diode I -V Character istics
pN LxxkTVqN
p
p
ppN eepL
Dq
dx
xpdqDJ
)1()(
0
nP LxxkTVqP
n
nnnP een
L
Dq
dx
xndqDJ
)1(
)(0
xJ
enL
Dqp
L
DqxJxJ kTVqP
n
nN
p
p
PnPNpN
allat
)1()()(currentTotal 00
++
0P-side N-side
Jtotal
JpNJnP
x
0P-side N-side
Jtotal
JpNJnP
Jn= JtotalJpJp= JtotalJn
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-30
The PN Junction as a Temperature Sensor
What causes the IV curves to shif t to lower V at higher T ?
)1(0 kTVqeII
+
an
n
dp
pi
NLD
NL
DAqnI 20
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-31
4.9.1 Contributions from the Depletion Region
dep
depi
leakage
WqnAII + 0
Space-Charge Region (SCR) current
kTqV
i
enpn 2/
)1(
:raten)(generatioionrecombinatNet
2/ kTqV
dep
i en
)1()1( 2//0 + kTqV
dep
depikTqV e
WqnAeII
Under forward bias, SCR current is an extracurrent with a slope 120mV/decade
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-32
4.10 Charge Storage
What is the relationship betweens(charge-storage time)
and(carrier lifetime)?
x
N-side P-side1013cm-3
2
n'
p
IQ
sQI sIQ
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Modern Semiconductor Devices for Integrated Circuits (C. Hu)Slide 4-33
4.11 Small-signal Model of the Diode
kTqVkTqV eIdVdeI
dVd
dVdI
RG /0/0 )1(1
What isG at 300K andIDC= 1 mA?
Diffusion Capacitance:
q
kT/IG
dV
dI
dV
dQC
DCsss
Which is larger, diffusion or depletion capacitance?
CRV
I
q
kTIeI
kT
qDC
kTqV /)( /0
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-34
4.12 Solar CellsSolar Cells is also known
asphotovoltaic cells.
Converts sunlight to
electricity with 10-30%
conversion efficiency.
1 m2solar cell generate
about 150 W peak or 25 W
continuous power.
Low cost and highefficiency are needed for
wide deployment.
Part I I : Application to Optoelectronic Devices
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-35
4.12.1 Solar Cell Basics
sc
kTVq IeII )1(0
V0.7 V
Isc Maximum
power-output
Solar Cell
IV
I
Dark IV
0
Eq.(4.9.4)
Eq.(4.12.1)
N P
-
Short Circuitlight
Isc
+(a)
Ec
Ev
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Direct-Gap and Indirect-Gap Semiconductors
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-36
Electrons have both particle and wave properties.
An electron has energy E and wave vector k.
indirect-gap semiconductordirect-gap semiconductor
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4.12.2 Light Absorption
)(24.1
(eV)EnergyPhoton
m
hc
m
x-e(x)intensityLight
(1/cm): absorptioncoefficient
1/: light penetration
depth
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-37
A thinner layer of direct-gap semiconductor can absorb most
of solar radiation than indirect-gap semiconductor.But Si
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4.12.3 Short-Cir cui t Cur rent and Open-Circui t Voltage
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-38
Dx
p
Jp(x+ Dx)
x
area
A
Jp(x)
Volume =ADx
If light shines on theN-type
semiconductor and generates
holes (and electrons) at the
rate of G s-1cm-3 ,
pp D
G
L
p
dx
pd
22
2
If the sample is uniform (no PN junction),
d2p/dx2 = 0 p= GLp2/Dp= Gp
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Solar Cell Short-Cir cui t Current, Isc
pLx
p
p
p
pp GeL
Dq
dx
xpdqDJ
/)(
GDGLp pp
p 2)(
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-39
)1()( / pLx
p eGxp
0)0( p
Assume very thin P+ layer and carrier generation in N region only.
GAqLAJI ppsc )0(x
NP+
Isc
0x
P'
L p
Gp
0
G is really not uniform.Lpneeds be larger than the light
penetration depth to collect most of the generated carriers.
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Open-Circui t Voltage
GAqLeLD
NnAqI p
kTqV
p
p
d
i )1( /2
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-40
1)e(assuming /qVoc kT
Total current isISCplus the PV diode (dark) current:
Solve for the open-circuit voltage (Voc) bysettingI=0
GLeL
D
N
np
kTqV
p
p
d
i oc /2
0
)/ln(
2
idpoc nGNq
kT
V
How to raise Voc ?
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-41
4.12.4 Output Power
FFVI ocsc erOutput Pow
Theoretically, the highest efficiency (~24%) can be obtained with
1.9eV >Eg>1.2eV. Larger Eg lead to too low Isc (low light
absorption); smaller Eg leads to too low Voc.
Tandem solar cel lsgets 35% efficiency using large andsmall Eg
materials tailored to the short and long wavelength solar light.
A particular operating point on the
solar cell I-V curve maximizes theoutput power (I V).
Si solar cell with 15-20% efficiency
dominates the market now
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-42
Light emitting diodes (LEDs)
LEDs are made of compound semiconductors such as InP
and GaN.
Light is emitted when electron and hole undergo radiative
recombination.
Ec
Ev
Radiative
recombination
Non-radiative
recombinationthrough traps
4.13 Light Emitting Diodes and Solid-State Lighting
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Direct and Indirect Band Gap
Direct band gap
Example: GaAs
Direct recombination is efficientas k conservation is satisfied.
Indirect band gap
Example: Si
Direct recombination is rare as k
conservation is not satisfied
Trap
Modern Semiconductor Devices for Integrated Circuits (C. Hu)
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-44
4.13.1 LED Materials and Structure
)(24.1energyphoton24.1m)(hwavelengtLED eVEgm
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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-45
4.13.1 LED Materials and Structure
)(eVEg
redyellowblue
Wavelength
(m)
ColorLattice
constant
()
InAs 0.36 3.44 6.05
InN 0.65 1.91 infrared 3.45InP 1.36 0.92
violet
5.87
GaAs 1.42 0.87 5.66
GaP 2.26 0.55 5.46
AlP 3.39 0.51 5.45
GaN 2.45 0.37 3.19AlN 6.20 0.20 UV 3.11
Light-emitting diode materials
compound semiconductors
binarysemiconductors:- Ex: GaAs, efficient emitter
ternarysemiconductor :- Ex: GaAs1-xPx , tunableEg (to
vary the color)
quaternarysemiconductors:- Ex: AlInGaP , tunable Egandlattice constant(for growing highquality epitaxial films on
inexpensive substrates)
Eg(eV)
RedYellowGreenBlue
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Common LEDs
Spectralrange
MaterialSystem
Substrate Example Applications
Infrared InGaAsP InP Optical communication
Infrared-Red
GaAsP GaAsIndicator lamps. Remotecontrol
Red-Yellow AlInGaP GaA orGaP
Optical communication.
High-brightness trafficsignal lights
Green-Blue
InGaNGaN or
sapphire
High brightness signallights.Video billboards
Blue-UV AlInGaNGaN or
sapphire Solid-state lighting
Red-Blue
Organicsemicon-ductors
glass Displays
AlInGaPQuantun Well
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4.13.2 Solid-State Lighting
Incandescent
lamp
Compact
fluorescent
lamp
Tube
fluorescent
lamp
WhiteLED
Theoretical limit at
peak of eye sensitivity
( =555nm)
Theoretical limit
(white light)
17 60 50-100 90-? 683 ~340
luminosity(lumen, lm): a measure of visible light energynormalized to the sensitivity of the human eye at
different wavelengths
Luminous efficacyof lamps in lumen/watt
Terms: luminositymeasured in lumens. luminous efficacy,
Organic Light Emitting Diodes (OLED):
has lower efficacy than nitride or aluminide based compound semiconductor LEDs.
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4.14 Diode Lasers
(d)Net LightAbsorption
(e)Net Light
Amplification
Stimulated emission: emitted photon has identical frequency anddirectionality as the stimulating photon; light wave is amplified.
(b) Spontaneous
Emission
(c) Stimulated
Emission
(a) Absorption
4.14.1 Light Amplification
Light amplificationrequirespopulation inversion: electronoccupation probability islarger for higher E states than
lower E states.
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4.14.1 Light Amplification in PN Diode
gfpfn EEEqV
Population inversionis achieved when
Population inversion, qV > Eg
Equilibrium, V=0
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121 GRR
R1, R2: reflectivities of the two endsG : light amplification factor (gain)for a round-trip travel of the light
through the diode
Light intensity grows until , when the light intensity
is just large enough to stimulate carrier recombinations at the same
rate the carriers are injected by the diode current.
121 GRR
4.14.2 Optical Feedback and Laser
lightout
Cleavedcrystalplane
P+
N+
Laser threshold is reached (l ight
intensity grows by feedback)when
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4.14.2 Optical Feedback and Laser DiodeDistr ibuted Bragg
ref lector (DBR) reflects
light with multi-layers ofsemiconductors.Vertical-cavity sur face-
emitting laser (VCSEL ) is
shown on the left.Quantum-well laserhassmaller threshold currentbecause fewer carriersare needed to achievepopulation inversion inthe small volume of thethin small-Egwell.
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4.14.3 Laser Applications
Red diode lasers: CD, DVD reader/writer
Bluediode lasers: Blu-ray DVD (higher storage density)
1.55 m inf rareddiode lasers:Fiber-optic communication
Photodiodes: Reverse biased PN diode. Detects photo-
generated current (similar to Isc of solar cell) for optical
communication, DVD reader, etc.
Avalanche photodiodes:Photodiodes operating near
avalanche breakdown amplifies photocurrent by impact
ionization.
4.15 Photodiodes
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Two kinds of metal-semiconductor contacts:
Rectifying Schottky diodes:metal on lightly
doped silicon
Low-resistance ohmic contacts: metal on
heavily doped silicon
Part I I I : Metal-Semiconductor Junction
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Bn I ncreases with I ncreasing Metal Work Function
Theoretically,
fBn=yMcSi
yM
cSi
: Work Function
of metal
: Electron Affinity of SiqfBn Ec
Ev
Ef
E0
qyM
cSi
= 4.05 eV
Vacuum level,
4 16 S h ttk B i
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4.16 Schottky Barr iersEnergy Band Diagram of Schottky Contact
Schottky barrier height, fB,is a function of the metal
material.
fBis the most important
parameter. The sum of qfBnand qfBpis equal toEg .
MetalDepletion
layer Neutral region
qBn
Ec
Ec
Ef
Ef
Ev
EvqBp
N-Si
P-Si
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Schottky barr ier heights for electrons and holes
fBn increases with increasing metal work function
Metal Mg Ti Cr W Mo Pd Au Pt
fBn (V) 0.4 0.5 0.61 0.67 0.68 0.77 0.8 0.9
fBp (V) 0.61 0.5 0.42 0.3
Work
Function 3.7 4.3 4.5 4.6 4.6 5.1 5.1 5.7
ym (V)
fBn + fBpEg
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A high density of
energy states in the
bandgap at the metal-
semiconductor interface
pinsEf to a narrowrange and Bn is
typically 0.4 to 0.9 V
Question: What is the
typical range of fBp?
Fermi Level Pinning
qfBn Ec
Ev
Ef
E0
qyM
cSi
= 4.05 eV
Vacuum level,
+
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Schottky Contacts of Metal Sil icide on Si
Silicide-Si interfaces are more stable than metal-silicon
interfaces. After metal is deposited on Si, an annealing step is
applied to form a silicide-Si contact. The term metal-silicon
contactincludes and almost always means silicide-Si contacts.
Silicide: A silicon and metal compound. It is conductive
similar to a metal.
Silicide ErSi1.7 HfSi MoSi2 ZrSi2 TiSi2 CoSi2 WSi2 NiSi2 Pd2Si PtSi
f Bn (V) 0.28 0.45 0.55 0.55 0.61 0.65 0.67 0.67 0.75 0.87
f Bp (V) 0.55 0.49 0.45 0.45 0.43 0.43 0.35 0.23
fBn
fBp
U i C V D t t D t i
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Using C-V Data to Determine B
AW
C
qN
VW
N
NkTq
EEqq
dep
s
d
bisdep
d
cBn
fcBnbi
f
f
ff
+
)(2
ln
)(
Question:How should we plot the CV
data to extract fbi?
Ev
EfEc
qfbiqfBn
Ev
Ec
Ef
qfBn q(fbi+ V)
qV
U i CV D t t D t i
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Oncefbiis known, fB can
be determined using
22 )(21 AqNV
C sd
bi
f +
d
cBnfcBnbi
N
NkTqEEqq ln)( fff
Using CV Data to Determine B
V
1/C2
fbi
E
v
Ef
Ec
qfbi
qfBn
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4.17 Thermionic Emission Theory
2//0
//23
2
/)(2/3
2
/)(
A/cm100where,
421
/2/3
22
kTq
o
kTqV
kTqVkTqnthxMS
nthxnth
kTVqnkTVq
c
B
B
BB
eJeJ
eeTh
kqmqnvJ
mkTvmkTv
eh
kTmeNn
f
f
ff
Efn
-q(fB V)
qfBqV
MetalN-typeSiliconV
Efm
Ev
Ec
x
vthx
4 18 Schottk Diodes
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4.18 Schottky Diodes
V
I
Reverse bias Forward bias
V = 0
Forwardbiased
Reversebiased
4 18 Schottky Diodes
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)1(
)KA/(cm1004
/
00
/
0
22
3
2
/2
0
+
kTqVkTqV
SMMS
n
kTq
eIIeIIII
hkqmK
eAKTI B
f
4.18 Schottky Diodes
4 19 Applications of Schottly Diodes
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4.19 Applications of Schottly Diodes
I0of a Schottky diode is 103to 108times larger than a PN
junction diode, depending on fB . A largerI0means a smallerforward drop V.
A Schottky diode is the preferred rectifier in low voltage,
high current applications.
I
V
PN junction
Schottky
fB
I
V
PN junction
Schottky diode
B
diode
kTq
kTqV
BeAKTI
eII
/20
/
0 )1(
f
S it hi P S l
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Switching Power Supply
ACDC AC AC DC
utilitypower
110V/220V
PN Junctionrectifier
Hi-voltage
MOSFET
inverter
100kHzHi-voltage
TransformerSchottkyrectifier
Lo-voltage 50A1V
feedback to modulate the pulse width to keepVout= 1V
4 19 A li i f S h k di d
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There is no minority carrier injection at the Schottky
junction. Therefore, Schottky diodes can operate at higher
frequencies than PN junction diodes.
4.19 Applications of Schottky diodes
Question: What sets the lower limit in a Schottky diodesforward drop?
Synchronous Rectif ier: For an even lower forward drop,
replace the diode with a wide-W MOSFET which is not
bound by the tradeoff between diode Vand leakage current.
4 20 Quantum Mechanical Tunneling
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4.20 Quantum Mechanical Tunneling
)( )(82exp2
2
EVh
mTP H
Tunneling probabil i ty:
4 21 Oh i C t t
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4.21 Ohmic Contacts
4 21 Oh i C t t
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dBn NVH
ndthxdMS
ns
dBnsdep
emkTqNPvqNJ
qmh
H
qNWT
/)(2/
2
1
/4
2/2/
f
f
4.21 Ohmic Contacts
d
Bns
dep qNW
f2
dBn NHeP f
Tunneling
probability:
- -
x
Silicide N+Si
Ev
Ec, Ef
fBn - -
x
VEfm
Ev
Ec, Ef
fBnV
4 21 Oh i C t t
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2//1 cm2
dBndBn
NH
dthx
NHMS
c eNHqv
e
dV
dJR
ff
4.21 Ohmic Contacts
4 22 Chapter Summary
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4.22 Chapter Summary
The potential barrier
increases by 1 V if a 1 V
reverse bias is applied
junction capacitance
depletion width
2ln
i
adbi
n
NN
q
kTf
qN
barrierpotentialW sdep
2
dep
sdep
WAC
Part I : PN Junction
4 22 Chapter Summary
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4.22 Chapter Summary
Under forward bias, minority carriers are injectedacross the jucntion.
The quasi-equilibrium boundary condition of
minority carrier densities is:
Most of the minority carriers are injected into the
more lightly doped side.
kTVq
Pp enxn 0)( kTVq
NN epxp 0)(
4 22 Chapter Summary
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4.22 Chapter Summary
Steady-statecontinuity equation:
Minority carriersdiffuse outwarde|x|/Lpand e|x|/LnLpandLnare the
diffusion lengths22
2
ppp L
p
D
p
dx
pd
ppp DL )1(0
kTVqeII
+
an
n
dp
p
i NL
D
NL
DAqnI
2
0
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4.22 Chapter Summary
q
kT/IG DC
Charge storage:
Diffusion capacitance:
Diode conductance:
GC s
sIQ
4 22 Ch t S
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4.22 Chapter Summary
Part I I : Optoelectronic Applications
~100um Si or Eg>1.2eV. Larger Eglead to too low Isc(low light absorption); smaller Eg
leads to too low Open Circuit VoltageVoc.
FFVI ocsc powercellSolar
Si cells with ~15% efficiency dominate the market. >2x cost reduction
(including package and installation) is required to achieve cost parity with
base-load non-renewable electricity.
4 22 Ch t S
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4.22 Chapter Summary
Electron-hole recombination in direct-gap semiconductors such as GaAs
produce light.
Beyond displays, communication, and traffic lights, a new application is
space lighting with luminous efficacy >5x higher than incandescent lamps.
White light can be obtained with UV LED and phosphors. Cost still an issue.
LED and Solid-State L ighting
Tenary semiconductors such as GaAsP provide tunable Egand LED color.
Quatenary semiconductors such as AlInGaP provide tunable Egand lattice
constants for high quality epitaxial growth on inexpensive substrates.
Organic semiconductor is an important low-cost LED material class.
4 22 Ch t S
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4.22 Chapter Summary
Light is amplified under the condition of population inversionstates at
higher E have higher probability of occupation than states at lower E.
When the round-trip gain (including loss at reflector) exceeds unity, laser
threshold is reached.
Laser Diodes
Population inversion occurs when diode forward bias qV > Eg.
Optical feedback is provided with cleaved surfaces or distributed Bragg
reflectors.
Quantum-well structures significantly reduce the threshold currents.
Purity of laser light frequency enables long-distance fiber-optic
communication. Purity of light direction allows focusing to tiny spots and
enables DVD writer/reader and other application.
4 22 Ch t S
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4.22 Chapter Summary
Part I I I : Metal-Semiconductor Junction
Schottky diodes have large reverse saturation current, determined by the
Schottky barrier height fB, and therefore lower forward voltage at a given
current density.
kTq BeAKTI /20f
2)/4(
cm dnsB qNm
hc eR
f
Ohmic contacts relies on tunneling.Low resistance contact requires
low fBand higher doping concentration.
I ncreases with I ncreasing Metal Work Function
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Bn I ncreases with I ncreasing Metal Work Function
qfBn Ec
Ev
Ef
E0
qyM
cSi
= 4.05 eV
Vacuum level,
Ideally,
fBn=yMcSi