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    Piezomotors Ultrasonic Motors

    Prepared by: Jaime Fernandez

    Department of Electrical and Computer Engineering

    Utah State University

    ECE 5320 MECHATRONICSActuator Tutorial

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    Outline

    Reference List

    Piezoelectric Notions

    Piezoelectric Motor Notions

    Major Applications Basics Principles

    Major Applications

    Major specifications

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    Reference List

    Wikipedia, http://en.wikipedia.org/wiki/Piezoelectricity

    Alexander D. Khazan, Transducers and Their Elements, Prentice Hall

    PTR

    Robert H. Bishop, Mechatronics Handbook, section 19.2 Manfred Weber, http://www.mmf.de/

    Shyh-Shiuh Lih, Yoseph Bar-Cohen, Rotary Ultrasonic Motors Actuated

    By Traveling Flexural Waves, http://ndeaa.jpl.nasa.gov/nasa-

    nde/lommas/spie-usm97.htm

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    Piezoelectric Notions

    Piezoelectricity is the ability of certain crystals to generate a voltage in response to

    applied mechanical stress. The word is derived from the Greek piezein, which

    means to squeeze or press. The piezoelectric effect is reversible in that piezoelectric

    crystals, when subjected to an externally applied voltage, can change shape by a

    small amount. The deformation, about 0.1% of the original dimension in PZT, is of

    the order of nanometers, but nevertheless finds useful applications such as the

    production and detection of sound, generation of high voltages, electronic

    frequency generation, and ultra fine focusing of optical assemblies.

    In a piezoelectric transducer, the acceleration acts on the seismic mass that

    develops a force on piezoelectric quartz, or ceramic crystal, or on several crystals.The force causes charges on the crystals proportional to the acceleration.

    Wikipedia, http://en.wikipedia.org/wiki/Piezoelectricity

    Alexander D. Khazan, Transducers and Their Elements, Prentice Hall PTR

    Robert H. Bishop, Mechatronics Handbook, section 19.2

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    Piezoelectric Motor Notions

    A piezoelectric motor or piezo motor is a type of electric

    motor based upon the change in shape of a piezoelectric

    material when an electric field is applied.

    The ultrasonic motor ( USM ) is a new type of solid state

    motor, which is driven by the ultrasonic vibration of a

    piezoelectric transducer. The ultrasonic vibration is

    transformed into output torque (in rotary USM) or thrust (inlinear USM) by the friction between the stator and the rotor (in

    rotary USM) or the moving part (in linear USM).

    Manfred Weber, http://www.mmf.de/

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    This new breed of motors has many excellent

    performances and features such as high torque, lowspeed, simple and compact structure with greatvariability in design, not interfering or being affected

    by magnetic field when in operation, power off self-

    brake, etc.

    The chief drawback of USM lies in the fatiguewearing of the stator due to the frictional driving

    mechanism.

    Manfred Weber, http://www.mmf.de/

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    Major Applications

    Camera auto focus lenses,

    Watch motors and compact paper handling.

    Medical application within micro-surgery and sensor

    scanning

    Driving fluids

    Optoelectronics area

    Motion control

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    Piezo motors consists mainly of an electro-mechanical resonator and a rotor. The resonatortransfer electric energy into small ellipticalmechanical vibrations that forces the rotor to rotatedue to friction between resonator tip and rotor.Piezoelectric motors have some very nice

    characteristics compared to traditional inductionmotors and in general they are characterized by a hightorque at low angular velocity, silent operation, high

    positioning precision, simple mechanical construction

    and it induces no magnetic fields.Modeling and Control of a Standing Wave PiezoElectric Motor, Brian Andersen.

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    Basics Principles

    The general principle of the

    operation of ultrasonic motors is

    to generate gross mechanical

    motion through the amplification

    and repetition of micro-

    deformations of active material.

    The active material induces an

    orbital motion of the stator at the

    rotor contact points and frictional

    interface between the rotor and

    stator rectifies the micro-motionto produce macro-motion of the

    stator.

    Development of an Ultrasonic Motor as aFine-Orienting Stage Eko Purwanto, Member, IEEE, and Shigeki Toyama

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    The active material, which is apiezoelectric material excites atraveling flexural wave within thestator that leads to ellipticalmotion of the surface particles.Teeth are used to enhance thespeed that is associated with the

    propelling effect of theseparticles. The rectification of the

    micro-motion an interface isprovided by pressing the rotor ontop of the stator and the frictionalforce between the two causes therotor to spin. This motion transferoperates as a gear leads to a muchlower rotation speed than thewave frequency.

    Rotary Ultrasonic Motors Actuated By Traveling Flexural Waves, Shyh-Shiuh Lih, Yoseph Bar-Cohen, http://ndeaa.jpl.nasa.gov/nasa-nde/lommas/spie-usm97.htm

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    A stator substrate is assumed to have a thickness, tS, with a set

    of piezoelectric crystals that are bonded to the back surface ofthe stator in a given pattern of poling sequence and location.The thickness of the piezoelectric crystals is tp. The totalheight, h, is the sum of the thickness of the crystals and thestators (bonding layer is neglected). The overall height of thestator is also allowed to vary with radial position. The outer

    radius of the disk is b and the inner hole radius is a. Togenerate traveling wave, the piezoelectric crystals polingdirection is structured such that quarter wavelength out-of-

    phase is formed. This poling pattern is also intended toeliminate extension in the stator and maximize bending. The

    teeth on the stator are arranged in a ring at the radial position.

    Rotary Ultrasonic Motors Actuated By Traveling Flexural Waves, Shyh-Shiuh Lih, Yoseph Bar-Cohen, http://ndeaa.jpl.nasa.gov/nasa-nde/lommas/spie-usm97.htm

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    To generate a traveling wave within the stator two orthogonal modes areactivated simultaneously. These modes are induced by constructing thedrive piezoelectric actuators in a pattern of two poling sections that are

    bonded to the stator. Geometrical examination of this pattern shows that

    driving the two sections using cos(w t) and sin(w t) signals, respectively,will produce a traveling wave with a frequency of w /2p . Also, bychanging the sign on one of the drive signals, the traveling wave wouldreveres its direction.

    The equation of motion of the ultrasonic motor can be derived from

    Hamiltons principle. The analytical model has been derived by manyauthors (e.g. Hagood and A. McFarland [5], Kagawa et al [6]). Thegeneralized equation of motion of the stator can be summarized as

    Rotary Ultrasonic Motors Actuated By Traveling Flexural Waves, Shyh-Shiuh Lih, Yoseph Bar-Cohen, http://ndeaa.jpl.nasa.gov/nasa-nde/lommas/spie-usm97.htm

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    http://www.me.ust.hk/~rickylee/motor-spec.PDF

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    USM Prototypes

    DOF planar pin-type actuator

    The objective of this project is to design and develop a piezoelectric actuator basedon the fundamental operating mechanism of ultrasonic motors. Two pin-typeprototypes with piezoelectric bimorph plate and a contact pin for generating drivingforce in the X-Y direction were designed and fabricated. A test rig was also

    constructed for the evaluation of the two prototypes and basic characteristics of theactuators were investigated. The working principle of the actuator was verified andproven during the experiment. Basically, the optimal driving speed of an actuator isdependent on the driving frequency, the input voltage, the contact surface and thefriction coefficient between the stator and motor. An analytical study of theprototypes has been carried out by means of finite element analysis utilizingANSYS5.4. With comparison to the experimental results, it was proven that theoptimal driving condition occurred at the specific resonant mode depending on thepin vibration. Maximum unloaded driving speed was obtained to be approximately0.68 cm/s at a frequency of 14.8 kHz and the optimum input voltage was found tobe approximately 70 Vp-p.

    Copyright 2002 Modular robotic & Robot locomotion Group, School of MPE, NTU, http://155.69.254.10/users/risc/www/usm-intro.html

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    Copyright 2002 Modular robotic & Robot locomotion Group, School of MPE, NTU, http://155.69.254.10/users/risc/www/usm-intro.html

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    Bi-directional linear standing wave USM

    A standing wave bi-directional linear ultrasonic motor hasbeen fabricated. This linear USM has very simple structureand can be easily mounted onto any commercially availablelinear guide. A high precision positioning x-y table was built

    by mounting these individual movable linear guides together.

    The basic parameters of our linear USM are: moving range220mm(variable depending on the linear guide), no-load speed80mms/s, ratings 23mm/s at 300gf, stall force 700gf, startingthrust 500gf, resolution

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    Copyright 2002 Modular robotic & Robot locomotion Group, School of MPE, NTU, http://155.69.254.10/users/risc/www/usm-intro.html

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    Rotary Ultrasonic Motor

    The characteristics of the rotary disc type motor will be

    investigated and theoretical model will be formed to relate the

    important components on the power of the motor. The scope

    includes designing different motor with various dimensions,

    form calculation of the analytical model, experimental testing

    and ultimately, setting a standard for practical application of

    this particular type of USM. This project will lay the

    foundation of the characteristics and performance of the rotary

    disc type USMs for future application.

    Copyright 2002 Modular robotic & Robot locomotion Group, School of MPE, NTU, http://155.69.254.10/users/risc/www/usm-intro.html

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    Spherical ultrasonic motor

    Presently a new type of spherical USM is under investigation.

    This particular USM consists of a thin square plate, 30x30mm

    in area. It can rotate in more than 4 individual directions. Now

    we are trying to compile rotation in any direction by using a

    computer to control the 4 individual directions properly.

    Copyright 2002 Modular robotic & Robot locomotion Group, School of MPE, NTU, http://155.69.254.10/users/risc/www/usm-intro.html

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    Suppliers Information

    http://alphapiezo.com/

    http://www.americanpiezo.com/

    http://www.cedrat.com/

    http://www.ceramicacelec.com.ar/ http://www.ferroperm-piezo.com/

    http://www.matsysinc.com/

    http://www.piezosolutions.net/

    http://www.physikinstrumente.de/products/section1/index.htm/

    http://www.sensortech.ca/

    http://eis.jpl.nasa.gov/ndeaa/nasa-nde/nde-aa-l/www.ferroperm-piezo.comhttp://eis.jpl.nasa.gov/ndeaa/nasa-nde/nde-aa-l/www.ferroperm-piezo.comhttp://eis.jpl.nasa.gov/ndeaa/nasa-nde/nde-aa-l/www.ferroperm-piezo.comhttp://eis.jpl.nasa.gov/ndeaa/nasa-nde/nde-aa-l/www.ferroperm-piezo.com