半導体圧力トランスデューサーシリコンダイヤフラ …...pressure sensing...

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TM

TM

WATER/AIR COOLED 5VDC OUTPUT TRANSDUCER

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KULITE SEMICONDUCTOR PRODUCTS, INC. • One Willow Tree Road • Leonia, New Jersey 07605 • Tel: 201 461-0900 • Fax: 201 461-0990 • http://www.kulite.com

Kulite introduces a new compact Water Cooled Pressure Transducer for both dynamic and static pressure measurements in extreme temperature environments such as automotive and turbine exhaust systems. The EWCTV-312 combines Kulite's patented Leadless Silicon Technology and a Miniature Water Cooled Jacket to provide pressure measurement capabilities previously unavailable.

EWCTV-312 (M) • High Bandwidth With Integrated Amplifier• Patented Leadless Technology VIS® • Superior Thermal Protection• Both Dynamic and Static Output Capabilities• Extreme Temperature Capabilities Such As Required In Exhaust Systems

0 400 600 800 1000 1200 1400

INT

ER

NA

L T

EM

PE

RA

TU

RE

(ϒF

)

450

400

350

300

250

200

150

100

50

0

200 1600 1800 2000

500AIR (35 PSIG)AIR (100 PSIG)WATER (35 PSIG .1 GAL/MIN)

INTERNAL TEMPERATURE Vs MEDIA TEMPERATURE For EWCTV

MEDIA TEMPERATURE (°F)

Pressure Range 1.725

3.550

7100

14200

21300

35500

701000

140 BAR2000 PSI

Operational Mode Absolute, Sealed Gage

Over Pressure 2 Times Rated Pressure

Burst Pressure 3 Times Rated Pressure

Pressure MediaCompatible With Exhaust Gases and Fluids and Most Liquids and Gases Compatible With SiO2 And 15-5 PH Stainless Steel

(Please Consult Factory)

Maximum Electrical Current 25mA

Rated Electrical Excitation 12 ± 4 VDC 28 ± 4 VDC 28 ± 4 VDC

Full Scale Reading 5 V ± 150mV 5 V ± 150mV 10 V ± 300mV

Output Impedance 200 Ohms (Nom.)

Frequency Response Flat to 5000 Hz (±2dB) Typical

Residual Unbalance 0.5V ±100mV

Combined Non-Linearity, Hysteresis and Repeatability ± 0.1% FSO BFSL (Typ.) ± 0.5% FSO (Max.)

Resolution Infinitesimal

Insulation Resistance 100 Megohm Min. @ 50 VDC

Operating Temperature Range 75°F to +2000°F (24°C to +1093°C) (Front End)-4°F to +185°F (-20°C to +85°C) (Connector and Amplifier)

Water Flow Rate .15 Gal/Min (Typ.)

Linear Vibration 10-2,000 Hz Sine, 100g. (Max.)

Mechanical Shock 20g half Sine Wave 11 msec. Duration

Electrical Connection Burklin 70F 8251 Connector (Mating Connector Supplied)

Weight 50 Grams (Approx.) Excluding Cable and Connector

Pressure Sensing Principle Fully Active Four Arm Wheatstone Bridge Dielectrically Isolated Silicon on Silicon Patented Leadless Technology

Mounting Torque 50 Inch-Pounds (Max.) 6Nm

.625 HEX(15.9)

"B" SCREEN

.267 DIA.(6.8)

.150 (3.8)

.840 (21.3)

.500 (12.7)

1.00 (25.4)

15°(TYP.)

39.4 (1 METER)

.125 DIA.(3.2)

4 COND. #26 AWG SHIELDED CABLE

CONNECTOR BURKLIN 70F 8251TO MATE WITH BURKLIN 70F 8551(SUPPLIED BY KULITE) SCALE 2:1

"T"

1

24

5

76

3

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INTERNALLY TIED

INTERNALLY TIED

PIN FUNCTIONSPIN FUNCTION

1 + OUTPUT2 CABLE SHIELD3 COMMON4 COMMON5 + INPUT6 COMMON7 + INPUT

P/N "T"

312 5/16-24 UNF-2A

312M M 8 x 1

Note: Custom pressure ranges, accuracies and mechanical configurations available. Dimensions are in inches. Dimensions in parenthesis are in millimeters. All dimensions nominal. (H)Continuous development and refinement of our products may result in specification changes without notice. Copyright © 2014 Kulite Semiconductor Products, Inc. All Rights Reserved.Kulite miniature pressure transducers are intended for use in test and research and development programs and are not necessarily designed to be used in production applications. For products designed to be used in production programs, please consult the factory.

.101 DIA. (NOM.)(2.54)

4 COND. # 32 AWGSHIELDED CABLE36" (914) LONG

PRESSURE REFERENCETUBE .016 O.D. X 1” LONG(.41 X 25.4) FOR GAGE & DIFFERENTIAL UNITS

.250 HEX(6.4)

B SCREEN STANDARDM SCREEN OPTIONAL

“T”

SILICONE O – RING .145 I.D. X .026 C.S.(3.7 I.D. X .63 C.S.)

.523 (13.3).17 (4.3)

SUBMINIATURE PRESSURE TRANSDUCER

XT-140 (M) SERIES• Easy Installation• Smallest Threaded Device Available• Patented Silicon on Silicon Integrated Sensor VIS®

• High Natural Frequency

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The XT-140 Series uses a standard miniature silicon diaphragm to obtain extremely high natural frequencies in the smallest thread mount available.

Pressure Range.355

0.710

1.015

1.7 BAR25 PSI

Operational Mode Absolute, Gage, Differential Absolute, Gage, Sealed Gage, Differential

Over Pressure 2 Times Rated Pressure

Burst Pressure 3 Times Rated Pressure

Pressure Media All Nonconductive, Noncorrosive Liquids or Gases (All Media May Not Be Suitable With O-Ring Supplied)

Rated Electrical Excitation 10 VDC/AC

Maximum Electrical Excitation 12 VDC/AC

Input Impedance 1000 Ohms (Min.)


Full Scale Output (FSO) 100 mV (Nom.)

Residual Unbalance ± 5 mV (Typ.)

Combined Non-Linearity, Hysteresis and Repeatability ± 0.1% FSO BFSL (Typ.), ± 0.5% FSO (Max.)


Natural Frequency of Sensor Without Screen (KHz) (Typ.) 150 175 200 240

Acceleration Sensitivity % FS/gPerpendicular 1.5x10-3 1.0x10-3 6.5x10-4 5.0x10-4


Operating Temperature Range -65°F to +350°F (-55°C to +175°C)

Compensated Temperature Range +80°F to +180°F (+25°C to +80°C) Any 100°F Range Within The Operating Range on Request

Thermal Zero Shift ± 1% FS/100°F (Typ.)

Thermal Sensitivity Shift ± 1% /100°F (Typ.)

Steady Acceleration 10,000 g. (Max.)


Electrical Connection 4 Conductor 32 AWG Cable 36" Long

Weight 3 Grams (Nom.) Excluding Cable

Pressure Sensing Principle Fully Active Four Arm Wheatstone Bridge Dielectrically Isolated Silicon on Silicon

Mounting Torque 15 Inch-Pounds (Max.) 1.7 Nm

P/N "T"140 6-32 UNC-2A

140M 3.5 x .6 - 6g

GNIRIWROLOC NOITANGISED

DER TUPNI+KCALB TUPNI–NEERG + TUO TUPETIHW TUPTUO–

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Note: Custom pressure ranges, accuracies and mechanical configurations available. Dimensions are in inches. Dimensions in parenthesis are in millimeters. All dimensions nominal. (I)Continuous development and refinement of our products may result in specification changes without notice. Copyright © 2014 Kulite Semiconductor Products, Inc. All Rights Reserved.Kulite miniature pressure transducers are intended for use in test and research and development programs and are not necessarily designed to be used in production applications. For products designed to be used in production programs, please consult the factory.

MINIATURE RUGGEDIZED PRESSURE TRANSDUCERXT-190 (M) SERIES• Easy Installation• Silicon on Silicon Integrated Sensor VIS®

• High Natural Frequency

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The ruggedness of this sensor has not compromised its performance. It was designed for ease of installation.

Pressure Range0.35

50.710

1.725

3.550

7100

17250

35500

701000

140 BAR2000 PSI

Operational Mode Absolute, Gage, Differential

Absolute, Gage, Sealed Gage, Differential

Absolute, Sealed Gage

Over Pressure 2 Times Rated Pressure to a Maximum of 3000 PSI (210 BAR)

Burst Pressure 3 Times Rated Pressure to a Maximum of 5000 PSI (350 BAR)

Pressure Media All Nonconductive, Noncorrosive Liquids or Gases (All Media May Not Be Suitable With O-Ring Supplied)

Rated Electrical Excitation 10 VDC/AC

Maximum Electrical Excitation 12 VDC/AC

Input Impedance 1000 Ohms (Min.)


Full Scale Output (FSO) 100 mV (Nom.)

Residual Unbalance ± 5 mV (Typ.)

Combined Non-Linearity, Hysteresis and Repeatability ± 0.1% FSO BFSL (Typ.), ± 0.5% FSO (Max.)


Natural Frequency of SensorWithout Screen (KHz) (Typ.) 150 175 240 300 380 550 700 1000 1400

Acceleration Sensitivity % FS/gPerpendicular 1.5x10-3 1.0x10-3 5.0x10-4 3.0x10-4 1.5x10-4 1.0x10-4 6.0x10-5 4.5x10-5 2.0x10-5


Operating Temperature Range -65°F to +350°F (-55°C to +175°C)

Compensated Temperature Range +80°F to +180°F (+25°C to +80°C) Any 100°F Range Within The Operating Range on Request

Thermal Zero Shift ± 1% FS/100°F (Typ.)

Thermal Sensitivity Shift ± 1% /100°F (Typ.)

Steady Acceleration 10,000g. (Max.)


Electrical Connection 4 Conductor 26 AWG Shielded Cable 36" Long

Weight 4 Grams (Nom.) Excluding Cable

Pressure Sensing Principle Fully Active Four Arm Wheatstone Bridge Dielectrically Isolated Silicon on Silicon

Mounting Torque 15 Inch-Pounds (Max.) 1.7 Nm

NOT AVAILABLE ON GAGE OR DIFFERENTIAL UNIT

OPTIONAL CONNECTOR VERSION

FUNCTIONWIRINGCOLOR

CONNECTOR PIN

RED + INPUT 1WHITE - OUTPUT 2BLACK - INPUT 3GREEN + OUTPUT 4

P/N* "T" "L"190S 10-32 UNF-2A .437 11.1 mm

190S(M) M5 x .8 .437 11.1 mm

190L 10-32 UNF-2A .760 19.3 mm

190L(M) M5 x .8 .760 19.3 mm

12

43

KEYWAYDETAIL

ORDER AS: XT-100-190(M)

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.630 (16.0)

CONNECTOR, CMR-S1-E-04POR EQUIVALENT

4 COND. # 26 AWGSHIELDED CABLE36" (914) LONG

CABLE STRAIN RELIEF 3/8 HEX(9.5)

.148 DIA.(3.8)

.40 (10.2)

.15 (3.8)

.190(4.8)

.17(4.3)

“L”

THREAD “T”

SILICONE O – RING .176 I.D. X .040 C.S.(4.5 I.D. X 1.0 C.S.) B SCREEN STANDARD

M SCREEN OPTIONAL

PRESSURE REFERENCETUBE .032 X 1” LONG(.8 X 25.4) FOR GAGE & DIFFERENTIAL UNITS

Note: Custom pressure ranges, accuracies and mechanical configurations available. Dimensions are in inches. Dimensions in parenthesis are in millimeters. All dimensions nominal. (K)Continuous development and refinement of our products may result in specification changes without notice. Copyright © 2014 Kulite Semiconductor Products, Inc. All Rights Reserved.Kulite miniature pressure transducers are intended for use in test and research and development programs and are not necessarily designed to be used in production applications. For products designed to be used in production programs, please consult the factory.

*LENGTH MUST BE STATED ON P.O. AT TIME OF ORDER PLACEMENT.

5V出力・広温度型

標準型

標準型

EWCTV-312(M)

XT-140(M)

XT-190(M)

シリコンダイヤフラムシリーズ半導体圧力トランスデューサー

■ 外形寸法図　単位：インチ（※カッコ内：mm）



定格容量（ psi ）

絶対最大圧力（ psi ）

出力電圧（ nom.）

共振周波数（ kHz ）

25 50

5V ±150mV

50 100

100 200

200 400

300 600

500 1,00010V ±300mV 1,000 2,000

2,000 4,000





5 10

100mV

150

10 25 175

15 30 200

25 50 240





5 10

100mV

150 10 20 175 25 50 240 50 100 300 100 200 380 250 500 550 500 1,000 700 1,000 2,000 1,000 2,000 3,000 1,400

印可電圧 12V ± 4V DC（25、50）24V ± 4V DC（100 〜）

出力インピーダンス 200 Ω（nom.）

零バランス 0.5V ± 100mV

非直線性・ヒステリシス繰り返し精度

± 0.1％ FSO BFSL（typ.）± 0.5％ FSO（max.）

動作許容温度範囲 24℃〜 1,093℃（ヘッド部）-20℃〜 85℃（コネクター､アンプ部）

測定モード A、SG

質量約 50g（ケーブルとコネクター含まず）

ケーブル長約 100cm（4 芯シールド線）

印可電圧 10V DC/AC

ブリッジインピーダンス

入力：1,000 Ω（min.）

出力：1,000 Ω（nom.）

零バランス ± 5mV（typ.）



補償温度範囲 25℃〜 80℃（55℃の範囲で他レンジ受注可）

動作許容温度範囲 -55℃〜 175℃

感度変化温度特性 ± 1.0％ /55℃（typ.）

零点移動温度特性 ± 1.0％ FS/55℃（typ.）

測定モード A、G、D（5、10）/A、G、SG、D（15、25）


質量約 3g（ケーブル含まず）

印可電圧 10V DC/AC

ブリッジインピーダンス

入力：1,000 Ω（min.）

出力：1,000 Ω（nom.）

零バランス ± 5mV（typ.）



補償温度範囲 25℃〜 80℃（55℃の範囲で他レンジ受注可）

動作許容温度範囲 -55℃〜 175℃

感度変化温度特性 ± 1.0％ /55℃（typ.）

零点移動温度特性 ± 1.0％ FS/55℃（typ.）

測定モード A、G、D（5、10）/A、G、SG、D（25 〜 100）/A、SG（250 〜 2,000）


質量約 4g（ケーブル除く）

測定モード　　A：絶対圧　 G：ゲージ圧（大気開放型）　SG：ゲージ圧（1気圧封入型）　D：差圧

半導体圧力トランスデューサー シリコンダイヤフラ …...pressure sensing...

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半導体圧力トランスデューサーシリコンダイヤフラ …...pressure sensing...