- 1 -

)4th (2003.3.25

SEM

SEM 10()

()

Field Emission-Scanning Electron Microscope FE-SEM JSM-6330F

FE-SEM(JSM-6330F)

1050

(WD39mm) WD=341mm

WD=4mm

15kV 1.5nm 1kV 5.0nm

12.5 or32100

(Retractable Backscattering Electron Image Detector)

(Backscattered Electron ImageBEI

X JED-2140XSEnergy Dispersion SpectroscopyEDS

B(5)U(92)

OIM200PCElectron Backscatter Diffraction PatternsEBSD

. Electron Microscope

Transmission Electron MicroscopeTEM

0.08mm 10

0.2 1010

2.0 10 10G-P

1.0 10

(resolution)

110 m10 mm1nm10 m10 mm10.1nm10 m10 mm-6 -3 -9 -6 -10 -7

- 2 -

Scanning Electron Microscope SEM

CRT SEM

. SEM

. SEM

CRT

SEM( ) ( )l LCRT

.

1 Torr = 7.5 10 Pa -3

A/cm str.2

100kV K Pa Torr A hour 5 10 2,800 30 10 10 100 50 ( )5 -3 -5

1 10 2,800 5 10 10 10 10 ( )6 -3 -5 W

LaB6 5 10 1,800 10 10 10 50 100 ( )6 -4 -6

1,000 10 200 10 10 50 100 50 ( ) 8 -6 -81,800

50 8 -8 -10 8 ( ) 10 300 10 10 1 20 10 100 100nm ex.

( )10 V/cm7

4 10 Pa-8

0 0i i0.4

( )Steradian 2 2( ) d /20 02 2 d 0 0

- 3 -

.

( )+10kV

CRTCRT

( )+10kV

SEM

.

( )Stigmator

X Y

45 8

.

(Secondary Electron)

(< )50eV SEM(Backscattered Electron)

- 4 -

X(X-ray)

X

( )X Continuous X-ray

( )X Characteristic X-ray X

(Auger Electron)

K L M

Cathode Luminescence

(Transmitted Electron)

( )Scanning Transmission Electron Microscope STEM(Absorbed Electron)

. SEM

SEM

SEM

.

10

CRT

x x cos A

- 5 -

.

11

.

12 V 5kV 30kV

.

13

CRT

( )max

.

14 A B B

- 6 -

(< )5kV

15( )Ion Sputter Coating

.

16

17

Retractable Backscattering( )Electron Image Detector RBEI

18( )Dolomite

CaCO MgCO3 3

X

X EDS ( ) ( )Ca Z=20 Mg Z=12

- 7 -

. (Energy Dispersive SpectroscopyEDS

X

X Si Li

( )Multichanel Pulse Heigt Analyzer X

EDS 19( )

EDS X

. Al

Al Al TiO B 700 800 900 1000 Al O TiB2 2 3 2

20 700 10min X Al SEM

( ) ( ) ( ) ( )Al 13 Ti 22 B 5 O 8

20 Al 700 10min

( )1976 (( )1979 ( )1983 JSM-6330F JED-2140

- 8 -

FOCUS

( )Stigma

FOCUS

STIG X Y

X( ) Ti 22 1.5 3

Na 11 Sc 21 10kV 15kV( ) ( ) ( )Working Distance WD

- 9 -

( )WD

Si(Li)X

( ) Si Li Si

- P N lkVP N

MCA

CRT

Al

2Al + 2B AlB2 3 2 2 2 3Ti O + 2AlB 2TiB + Al O

2 2 3 2 36TiO + 2Al 3Ti O + Al O