A study on power quality improvement

of semiconductor process during

instantaneous voltage drop

IT

A study on power quality improvement

of semiconductor process during

instantaneous voltage drop

.

2015 2

IT

i

.

.

.

,

. Wafer

Size Chip Size

, FAB

. RF Gen

.

.

.

,

.

. ! ,

, ,

.

ii

.

2014 12 20

iii

, PLC, AC/DC

Drive

.

, ,

.

,

.

,

,

. , , ,

EMI ,

.

. Wafer

Impact

Main Receipt

Wafer .

iv

Power Vaccine

, RF Generator

(Voltage Drop Protector)

.

Keywords : SAG, VDP, RF Generator, Power Vaccine, SEMI F47

v

1 ............................................................................................. 1

1 ..................................................................................... 1

2 ..................................................................................... 2

3 ..................................................................................... 3

2 ................................................... 4

1 .................................................................. 4

2 .......................................... 11

3 .......................................................... 15

3 ................................... 17

1 RF Generator ............................... 17

2 RF Generator ...................... 18

3 (Voltage Drop Protector) ............ 21

4 ........................................................................................... 26

.................................................................................................... 27

vi

1. ................................................................................. 7

2. ........................................... 8

3. .................................................. 10

4. ..................................................................................... 15

5. Voltage Sag ............................ 17

6. RF Generator .......................... 17

7. ......................................... 19

8. RF Generator .................. 20

9. RF Generator .............................. 21

10. RF Generator ........................................ 23

11. RF Generator ..................... 25

vii

1. IEEE Std. 1159 1250 .............. 4

2. ............................................................ 6

3. RF Generator ............................... 21

4. .................................. 22

5. Matrix ........................................................ 24

- 1 -

1

1

.

.

[1]. , ,

,

[1].

[2]-[5].

.

.

.

(Distributed Generation)

[1],[6].

.

,

, ,

100~200ms .

- 2 -

Dip sag Down Wafer

Reject/Rework . Main

Control (uninterruptible

power supply)

.

Semi F47 Common

specification . ,

Down .

Back up Loss

.

2

Main

Control

Power Vaccine .

Wafer Size

.

,

Battery

.

Power Vaccine

.

- 3 -

(Voltage Drop Protector)

.

.

. .

.

Power Vaccine

.

3

2 .

. 3

Power Vaccine

. 4 3

.

.

- 4 -

2

1

IEEE Std. 1159 IEEE Std. 1250

[p.u]

Instantaneous Sag

Instantaneous Swell

Momentary Interruption

Momentary Sag

Momentary Swell

Temporary Interruption

Temporary Sag

Temporary Swell

0.1 ~ 0.9

1.1 ~ 1.8

< 0.1

0.1 ~ 0.9

1.1 ~ 1.4

< 0.1

0.1 < 0.9

1.1 ~ 1.4

0.5~30[cycles]

0.5~30[cycles]

0.5[cycle]~3[sec]

30[cycle]~3[sec]

30[cycle]~3[sec]

3[sec]~1[min]

3[sec]~1[min]

3[sec]~1[min]

0.5~30[cycles]

0.5[cycle]~3[sec]

30[cycle]~2[sec]

3[sec]~1[min]

3[sec]~1[min]

2.

Sustained Interruption

Undervoltage

Overvoltage

Voltage Imbalance

0.0

0.8 ~ 0.9

1.1 ~ 1.2

0.5 ~ 2.0

> 1[min]

> 1[min]

> 1[min]

Steady state

> 2[min]

1. IEEE Std. 1159 1250

Table 1. Definition of the quality of the voltage magnitude of

IEEE Std. 1159 and 1250

- 5 -

0.5cycle 1 0.1pu

0.9pu IEC Dip

IEEE Sag .

(Momentary Interruption),

(Sustained Interruption), (Voltage Sag) .

IEEE Std. 1159 IEEE Std. 1250

1995 ,

[7],[8]. ,

.

2

1990 .

- 6 -

ANSI/IEEE Std.446 (

) 1987

ANSI Std.C84.1

CBEMA(Computer Business Equipment

Manufacturer Association)

1989

IEEE Std.493

1990

IEEE Std.1159

Instantaneous momentary, temporary,

sustained

1995

IEEE Std.1250

Instantaneous momentary, temporary,

sustained

1995

IEEE Std.P1366 1996

2.

Table 2. Representative of the voltage quality standard

- 7 -

.

.

.

1.

Fig. 1 Transmission and distribution system diagram

1 ,

. 0.07 ~ 0.2

.

- 8 -

. 1

150 msec( 9 ) 2

[9],[10].

3~6

.

2.

Fig. 2 Voltage drop across the width according to the distance from

the accident spot

- 9 -

20%

60% 10% .

5~6 60% , 0.2 80% .

3

[9],[10].

.

0.1 .

.

- 10 -

3.

Fig. 3 Conditions of Voltage sag and coverage

11

2

, ,

,

, , .

. ,

, ,

.

.

,

.

, ,

, .

,

.

.

12

.

.

, , ,

.

.

(1.1) .

(1.1)

.

(1.2)

: ( =, =)

I : ()

R :

X : .

13

(1.3) .

(1.3)

% (1.4) .

(1.4)

(1.5)

14

T

T = 3 [VA] T KVA KV

. (1.6)

R X %R %X

(1.7)

(1.8)

. (1.9)

, P = Tcos, Q = Tsin, TB =[KVA]

4 .

15

4.

Fig. 4 Voltage drop

,

.

1 .

.

3

.

Custom Power -

16

. - .

.

-

.

,

, , ,

.

,

. , 100 kVA

, .

80% ,

.

.

.

.

, 1~10 .

, 5% 35% .

, 60Hz (8 msec) .

, .

, [11].

17

3

1 RF Generator

5. Voltage Sag (1999~2013)

Fig. 5 Per year of the semiconductor factory Voltage sag (1999~2013)

6. RF Generator

Fig. 6 Status of the damage caused by the RF Generator of

equipment damage

18

15 (1999 ~2013 )

324 27,911

Wafer 56,528 , Power Vaccine

2007 5.6% 9.4% ,

RF Generator 22.7% 81.8% .

RF Generator

RF Generator

.

2 RF Generator

Pump Chiller

Heater

. RF Generator

, Interlock Issue

.

,

.

..

19

7.

Fig. 7 Emergency power supply status of the semiconductor

production equipment

CVD, METAL, ETCH RF

Generator 17,333, 103,875kVA .

RF Generator

. RF Generator

.

20

8. RF Generator

Fig. 8 Voltage sag damage variation analysis status of RF Generator

8 SEMI F47

.

RF Generator Issue 20%

1sec , 70%

500msec , 100%

200msec

.

21

80%

RF Generator

.

3 (Voltage Drop Protector)

9. RF Generator

Fig. 9 RF Generator voltage sag compensation Measures

3. RF Generator

Table 3. RF Generator voltage sag compensation Measures

22

RF Generator

. 1

. ,

RF Generator

. . 2

RF Generator OFF .

1

Logic

. 3 RF Generator

Issue

1 .

4.

Table 4. Measures voltage sag compensation effectiveness analysis

23

1 9 .

2 OFF

. 3 CPU

Dip Sag .

RF Generator 1

4 .

1

Power Vaccine

RF Generator

. , RF

Generator

.

10 RF Generator

RF Generator RF

Generator

.

10. RF Generator

Fig. 10 Separate power supply scheme of RF Generator

24

RF Generator ,

LSI

. Wafer Loss

Loss , LSI

, 8 CVD ETCH

.

Maker

W/F Loss Back-Up

Down

Step Reprocess

Wet

Clean

3 4 10 4 10 4

CVD_HDP Novellus 1 3 , , 3

CVD_HDP AMT 2 3 , , 3

Metal_M1,M2 AMT 3 4 2

Metal_M1,M2 Ulvac 4 4 1

Etch_Metal AMT 5 4 2

Etch_Metal LAM 6 4 2

CVD_PETEOS AMT 7 6 , 3

CVD_PETEOS Novellus 8 8 , 2

Etch_Oxide LAM 9 3 , 2

Etch_Poly AMT 10 3 , , 1

CVD_PE SiN Novellus 11 8 2

CVD_SiON AMT 12 6 , 3

Etch_Oxide AMT 13 3 , 1

5. Matrix

Table 5. Each process priority evaluation

25

Wafer loss

Back up 5

Matrix

.

, Wafer

Wafer loss Process , Process ,

Back up , Back up Wet cleaning ,

Down .

1999 15

Drop RF Generator

Specification ,

SAG 100% RF Generator

11 .

11. RF Generator

Fig. 11 Voltage sag protection scope of RF Generator

26

4

.

,

.

RF Generator

.

.

.

.

27

1. M. H. J. Bollen, Understanding Power Quality Problems: Voltage

Sags and Interruptions, Piscataway, NJ, 2000, IEEE Power

Engineering Series.

2. Jovica V. Milanovic, C. P. Gupta., "Probabilistic Assessment of

Financial Losses due to Interruptions and Voltage Sags-Part I: The

Methodology," IEEE Trans. Power Delivery, vol. 21, no. 2, pp.918-

924, Apr. 2006.

3. Jovica V. Milanovic, C. P. Gupta., "Probabilistic Assessment of

Financial Losses due to Interruptions and Voltage Sags-Part II :

Practical Implementation," IEEE Trans. Power Delivery, vol. 21, no.

2, pp.925-932, Apr. 2006.

4. Zhang, L., Bollen, Math H. J., "Characteristic of Voltage Dips(Sags)

in Power Systems," IEEE Trans. Power Delivery,vol.15, pp.827-832,

Apr. 2000

5. Arrillaga, J., Watson, N. R., Chen, S. "Power System Quality

Assessment", New York: John Wiley & Sons, pp. 1-32. 2000.

6. R. C. Dugan, M. F. McGranaghan, S. Santoso, and H. W. Beaty,

Electrical Power Systems Quality. New York : McGraw-Hill, 2002

28

7. IEEE std 1159, "IEEE `Recommended Practice for Monitering

Electric Power Quility ", 1995

8. IEEE std 1250, "IEEE Guide for Service to Equipment Sensitive to

Momentary Voltage Disturbance", 1995

9. J. Lamoree, D. Muller, Paul Vinett, W. Jones, M/ Samotyj, Voltage

Sag Analysis Case Studies, IEEE Trans. On Industrial Applications,

Vol. 30, No. 4, pp. 1083-1088, 1994

10. G. Yalcinkayam H.J, etc. Characterization of Voltage Sags in

Industrial Distribution Systems, IEEE Trans. on Industrial

Applications, Vol. 34, No. 4, pp. 682-688, 1998

11. , , p14~18, 2000

12. , , ,

, 43 p27~42, 2000

13. , , , ,

43 p43~58, 2000

14. , , , ,

, p760~763, 2004