中華系統性創新學會 the society of systematic innovation copyright © d. daniel sheu &...

中華系統性創新學會 The Society of Systematic Innovation

copyright © D. Daniel Sheu & Hou Chun Ting

Self-closing Embedded Slit-valve( 內坎自閉式機台閘閥 )

Dongliang Daniel Sheu Chun Ting Hou National Tsing Hua University, Depart. of

I.E.(清華大學工工系許棟樑、侯俊亭 )

03-574-2652; [email protected]@gmail.com

Patent filed 2011/2

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中華系統性創新學會 Society of Systematic Innovation


Structure of Slit-valve

Case background(Slit-valve position)

IOC1 IOC2

TransferModule

Process Chamber

Process Chamber

Process Chamber

Slit-valve(Gate Valve)

IOC: Input Output Cassette

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Case background(option of Slit-valve)

SlitValvedown

Cover plate move leftTo cover O-Ring

Slit-valve Closing operation:1.Slit-valve push down T-Bar to bottom2.Cover plat move left press on Chamber wall slit O-ring, and it finish closing operation. (Vice versa) T-Bar

Coverplate

O-ring

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copyright © D. Daniel Sheu & Chun Ting Hou

Slit-valve Exploded diagram Slit-valve had many parts ， many potential

risks.

12

18

item Parts Name

1Air pressure cylinder assembly

（ left）

2Air pressure cylinder assembly

（ right）

3 Piston assembly

4Slit-valve （ S.V. ） Bellow/

G.V. Bellow

5 Sliding guide assembly

6 Cover assembly

7 Connecting bar assembly

8 Cover the bottom of S.V,

9 Piston fixed block

10 T Bar

11 Slider （ Angle plate）

12Upper and lower cover

assembly

13~17 Hexagon screws

18 Cover

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Problem Point

Break due toStress concentration

The pins of the guiding block assembly (# 5 Sliding guide assembly) cracks due to stress concentration causing uneven movements.

Cause un-even movement of valve rubbing on O-ring and producing particles on wafer => defects.

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Current Slit-valve solution Issue parts #5 (using separation principle)Note: The original solution can assume an average distribution

of the stress points in the interface surface, and enhance the life of parts used.

Current Improvement by company:Current Improvement by company:

Because of more contact surface, it is hoped that the stress concentration can be eased.However, after prolonged operations, the same problem will occur again.

Because of more contact surface, it is hoped that the stress concentration can be eased.However, after prolonged operations, the same problem will occur again.

Using inserted longer pin to obtain bigger contact surface => Reduce stress concentration.

Using inserted longer pin to obtain bigger contact surface => Reduce stress concentration.

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Trimming Process We Used

Function Analysis

CECCA Key Disadv.

TrimmingTrimming Model(Model of Solution)

SpecificSolution

K/E DB ResourceMatrix Invented Principle

88



Cause-Effect & Contradiction Chain Analysis

Particles on wafer

OGHF Para. 31

Sore pt:

TargetDisadv. Key Diadv

O-ring generate particle

OGHF Para. 31

friction on O-ring

Loss of substance

Para. 25

Uneven covering plate closing

Area of stationary object

6

Steam holder of module ping broken

Reliability 35

Aging O-ring

Reliability 35

abrasion resistance of O-ring is insufficient

Durability of action of stationary object

13stress concentration

Strength 20

InsufficientStrength of materials is

Stress/

pressure

19

Structure of Sliding guide assembly

Shape 9

- Stress concentration and the structure design of sliding guide assembly is the key disadvantages. This is the core sore point.- The breakage of sliding guide assembly was due to the force exerted by the Piston Assembly – Problem maker => Trim

Easy manufacturing

Manufacturability 41

C

A O C -+

99



FA

(10) T Bar(10) T Bar

(5) Sliding guide assembly

(5) Sliding guide assembly

(4) Slit-valve (S.V.) Bellow

(4) Slit-valve (S.V.) Bellow

(18) Cover assembly(18) Cover assembly O-ringO-ring

ObjectMain Tool(MF)Cover

Move

Move

Push

(8) Cover the bottom of S.V.

(8) Cover the bottom of S.V.

(3) Piston assembly(left)

(3) Piston assembly(left)

(1) Air pressure cylinder assembly （ left）

(1) Air pressure cylinder assembly （ left）

(11) Slider（ Angle plate）

(11) Slider（ Angle plate）

support

Move

Move

connectconnect

(7) Connecting bar assembly

(7) Connecting bar assembly

connect(9) fixed

block(9) fixed

block

hold

Move

support

AirAir

SupportBlock

(3) Piston assembly(right)

(3) Piston assembly(right)

(2) Air pressure cylinder assembly （ right）

(2) Air pressure cylinder assembly （ right）

Move - - - means Slit-valve mechanism

Move

AirAirBlockDamage

Uneven force

damage

Hold

Damage

Chamber wallChamber wall

Function Analysis of Slit-valve under abnormal situation

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Final Trimming Model

Cover assemblyCover assembly O-ringO-ring

ObjectMain Tool

Main Functioncover

Rule C,(1) Something can move Cover assembly

AirAir

supportblock Hold

Rule B,(2) Cover assembly can service itself?

• Fundamental Function needed: Move Solid

Chamber wallChamber wall

Trimming Problem: ■ How can I make Cover assembly close and Tighten the door by itself? Are there any resources? After subsequent series of systematic trimming

process

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Function Oriented Search/ Knowledge Effect Database- Existing Ways to Moves Solid

Bird's Beak Effect Electrets Gravity Reuleaux triangle

Boundary Layer Entrapment

electromagnetic induction

Hyperboloid Shape Memory Effect

Brushes Electrophoresis Inertia Spiral

Coanda Effect Electrostatic Field Ion Conductivity Thermophoresis

Corona Discharge Explosion Magnetic Explosion Torque Oscillator

Coulomb's Law Ferro-magnetism Mobius Strip Triboelectricity

Desorption Fluidization Pascal's Law Vibration

Diamagnetism Friction,Diffusion

Photophoresis (Differential) Pressure

Dopant Segregation Funnel Effect Resonance …

Best to use existing resources. => Gravity & Vacuum

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When most time Valve is closed(Normal case)

When Most time valve is open

(Opposite case)

Rule B 1 +Rule B 2

B1 ： Close Valve by GravityB2 ： Tighten Valve by existing Vacuum

Rule C 1 +Rule C 2

C1 ： Close Valve by ElectromagnetC2 ： Tighten Valve by Electromagnet

Rule C 1 +Rule C 2

C1 ： Open Valve by ElectromagnetC2 ： Loosen Valve by Electromagnet

Rule B 1 +Rule B 2

B1 ： Open Valve by GravityB2 ： Loosen Valve by existing Vacuum

Integrating Solutions

CloseValve

TightenValve

Integrating 4 possible solutions for Open/Loosen & Close/Tighten valve, Choose the best compatible set:•Consider: The great majority of time (80~90%), Slit valve is closed for chamber processing. Best solution indicated in the table below.•If it is the other way around, simply switch solution for best energy saving. (Right column)

OpenValve

LoosenValve

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Original case vs. case Solution(1)

• Original case:- 18 Components / external valve- Use mechanism to implementation the two-dimensional movements of the slit valve.- Need large space, and the original problem will happen after a period of time.Our Solution (1):- 3 components / embedded valve- Electromagnetism to implementation the two-dimensional movement of the slit valve.- Substantial reduction of space, the original problem will not appear again. (Designed out)

(Ferro-material)

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Benefits of this solution Savings: 95% of the component cost, 80+ percent of the part

count. 99% Energy savings. (needs only 1% of original energy level.)　 Item Before After Improvement (%)

Original Solution

Component 18 20 (18-20)/18=-11.1% Counts

System cost 229,000 80,000 NA Energy savings 120 120 Energy to maintain 6 kg*20

(min)

Our solution

Component 18 3 (18-3)/18=83.3% Counts

System cost 229,000 <10,000 (229000-10000)/ 229000 =95.6% Energy savings 12 1.2 from 6 (kg)* 20 (min) Full Cycle

to 0.6 (kg)* 2 (min) Only opening pulse

1. The service cost of the original solution is 80K on overhaul, and price for new system is 229K .2. Slit-valve : ‘Open’ for about 2 minutes, and the whole cycle is about 20 minutes. 3. Slit- valve use electrical pulse only during “open” status. (1/10 of the time) 4. (1/10 energy level during application) => need only 1% of original energy level.

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Advantages of the solution (1) Advantage of the solution (1)

Eliminate the defects caused by O-Ring particles permanently by system re-design.

Use existing gravity & pressure differential to close and tighten the valve save additional components. (Take advantage of existing Resources)

Significantly reducing the number of parts more than 80 %. Save more than 95+% component costs, and Energy Savings 99.9%

Slit-valve embedded in the Chamber wall, can saving space thus materials and costs.

Allowing voids inside the cover plate to further reducing the weight thus energy and materials usage. (Trend: Space Segmentation)

Patent pending. See the attached video animation for further insights.

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