2015/5/16 the micro-systems & control lab. 1 a novel fabrication of ionic polymer- metal...

112/04/18 The Micro-Systems & Control Lab. 1

A NOVEL FABRICATION OF IONIC POLYMER-METAL COMPOSITES (IPMC)

ACTUATOR WITH SILVER NANO-POWDERS

Reporter ： Song-En Gong(龔頌恩 )

Adviser ： Cheng-Hsien Liu(劉承賢 )

C. K. Chung, Y. Z. Hong, P. K. Fung, M. S. Ju1, C. C. K. Lin, and T. C. WuDepartment of Mechanical Engineering, Center for Micro/Nano Technology Research,

National Cheng Kung University, Taiwan, ROCDepartment of Neurology, National Cheng Kung University, Taiwan, ROC

Industrial Technology Research Institute, Taiwan, ROCTRANSDUCERS’05 Seoul, Korea, June 5-9, 2005, pp.217-220


Outline

Introduction

Fabrication and Result

Discussion and Conclusion


Introduction

Nafion®


Introduction

Ref:Kwangmok Jung,2003

Introduction

112/04/18 Multimedia & Database Lab. 5

Actuated by 3 V dc; sample moves continuously towards the anode and forms nearly a circle after 3.5 min with no sign of electrolysis

Ref:Sia Nemat-Nasser,2003

Novel Fabrication



ResultThe appearance of IPMC actuator with casting Ag nano-powders method

The actuation result of IPMC sample bysupplying DC voltage of 3 V from 0-12 sec

Discussion


AdvantageLarge deformations

Low driving voltage

Actuating force about mN

Faster than other fabrication(4hr)

Biological compatibility

Good repeatability

HandicapRepeatability?

Short durability in dry conditions

Unmatched with other fabrication technique

Electrolysis at higher voltage

Not function high T

Hard top down

Conclusion


Biomimetic sensors

Actuators

Transducers

Artificial muscles

END

Thanks for your attention



First, we send out the SOI wafer for ion implantation (Fig.5(a)). After getting the wafer back, a short drive-in is performed and at the same time a thin layer of oxide is formed to serve as theinsulation layer. Then we open the contact windows to the dopedsilicon (Fig. 5(b)). Electrical connection is formed using gold on titanium deposition and lift-off (Fig. 5(c)). The paddle-likecantilevers are then defined by front side DRIE (Fig. 5(d)). Following that the bulk backside etching is also performed using DRIE to get the cantilevers ready for release (Fig. 5(e)). A singlelayer of SU-8 2075 is then spun to achieve thickness of approximately 700μm (Fig. 5(f)). For pre-exposure bake, the samples are ramped up to 105oC at 150 oC/hr ramp rate and soakedat 105oC. After a total bake time of 13 hours the samples are then ambient cooled to room temperature. The photolithography is doneusing a Karl Suss contact aligner at 365nm. A high-wavelength pass optical filter with cutoff frequency of 300nm is used duringexposure to eliminate the “T-topping” effect of the SU-8 structures (Fig. 6). The exposure dose is 3000mJ/cm2. For post-exposure bake, the samples are again ramped up to 105oC at 150 oC/hr ramp rate and soaked at 105oC for half an hour. The samples are thenramped down to room temperature at a controlled rate of 15 oC/hr.The development is done using designated SU-8 developer withIPA as the end point indicator. After the cilia assembly, thedevices are released in BHF to free the cilium-on-cantileverstructures (Fig. 5(g)).


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2015/5/16 the micro-systems & control lab. 1 a novel fabrication of ionic polymer- metal...

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