나노 기술
기능성 산화물 박막 기술Scanning Probe Microscope
2002 년 5 월 23 일 송태권
참고 자료
나노연구소 http://designwith.net/nano/?t=home
Handbook of Nanostructured Materials and Nanotechnology
Nano?
Macro vs. Micro
Nano vs. Micro
Two ways in Nanotech.
New function in nano-scaleNot just size
Bottom-up Nanotube, Semiconductor Quantum
Dots Top-down
Nanoparticles, Nano-sized powders
Gate Oxide/Memory Capacitor
MEMS or NEMS (Nano-Electro-Machining System)
Metal Oxide Thin Films
Perovskites
FerroelectricOpticalMagneticConductiveHigh TC Superconductive
Transition Metal Oxides; Multi-valence
Ferroelectric
Ti, Zr, Nb, Ta Oxides BaTiO3, Pb(Zr,Ti)O3, Bi4Ti3O12,
La-Bi4Ti3O12, SrBi2Ta2O9
DRAM FRAM(Ferroelectric RAM) IR detector
DRAM Application
High Density → Small Area → Complex Structure → High
d
AV
qC
r 0
Optical
Nb, Ta Oxides LiNbO3, LiTaO3
SAW (Surface Acoustic Wave) Non-linear Optics Optoelectronics
Magnetic
Mn, Co, Fe Oxides (La,Sr)MnO3
Magnetic Head (CMR) Magnetic Memory (MRAM) Spintronics
Conductive
Cu, Co, Ti Oxides (La,Sr)CoO3
Interconnect
HTSC(High TC Superconductive)
Cu Oxides YBa2Cu3O7-
Joshephson Junction SQUID Bolometer
Detailed Topics
MultilayerFilms
OxideSuperlattices
Oxygen VacancyReduction Oxygen Vacancy
Reduction
Strain ControlNano-Technology
High DensityDevices
MultifunctionalDevices
Schematic of a FIOHPhoton; h Transparent Electrode (ITO)
Pyroelectric (BSN, PLZT)Ferroelectric (BT, PZT)CMR Material (LSMO, LCMO)Oxide Substrate
Monolithic Oxide Integrated Circuit
Lighth
PyroelectricPT
FerroelectricPT
CMR MaterialR
Signal Sensing& Transformation
DataStorage
RetrievingData
GMR vs. CMR
Giant Magneto-Resistance in Magnetic Metal
Multilayers(Superlattices) Colossal Magneto-Resistance
in Magnetic Oxides
Applications of Ferroelectric Thin Films
Thin Film Deposition
PVD (Physical Vapor Deposition) PLD (Pulsed Laser
Deposition) Sputtering
CVD (Chemical Vapor Deposition) MOCVD Sol-gel
Pulsed Laser Deposition
Ion Substitution Effects
Strain Effects
Scanning Probe Microscope
STM (Scanning Tunneling Microscope)
Piezo-Micro-Manipulator
AFM (Atomic Force Microscope)
Non-conductive Materials like Dielectrics
In Air → Easy to Use
SCM (~ Capacitance ~)
ResonanceFrequency
Applications of SCM - I
Semiconductor MOSFET
Applications of SCM - II
Memory Application
EFM(Electric Force Microscope)
EFM – Ferroelectric Domain
MFM(Magnetic Force Microscope)
MFM-Hard Disk Surface