나노 기술

기능성 산화물 박막 기술Scanning Probe Microscope

2002 년 5 월 23 일 송태권

참고 자료

나노연구소 http://designwith.net/nano/?t=home

Handbook of Nanostructured Materials and Nanotechnology

Nano?

Macro vs. Micro

Nano vs. Micro

Two ways in Nanotech.

New function in nano-scaleNot just size

Bottom-up Nanotube, Semiconductor Quantum

Dots Top-down

Nanoparticles, Nano-sized powders

Gate Oxide/Memory Capacitor

MEMS or NEMS (Nano-Electro-Machining System)

Metal Oxide Thin Films

Perovskites

FerroelectricOpticalMagneticConductiveHigh TC Superconductive

Transition Metal Oxides; Multi-valence

Ferroelectric

Ti, Zr, Nb, Ta Oxides BaTiO3, Pb(Zr,Ti)O3, Bi4Ti3O12,

La-Bi4Ti3O12, SrBi2Ta2O9

DRAM FRAM(Ferroelectric RAM) IR detector

DRAM Application

High Density → Small Area → Complex Structure → High

d

AV

qC

r 0

Optical

Nb, Ta Oxides LiNbO3, LiTaO3

SAW (Surface Acoustic Wave) Non-linear Optics Optoelectronics

Magnetic

Mn, Co, Fe Oxides (La,Sr)MnO3

Magnetic Head (CMR) Magnetic Memory (MRAM) Spintronics

Conductive

Cu, Co, Ti Oxides (La,Sr)CoO3

Interconnect

HTSC(High TC Superconductive)

Cu Oxides YBa2Cu3O7-

Joshephson Junction SQUID Bolometer

Detailed Topics

MultilayerFilms

OxideSuperlattices

Oxygen VacancyReduction Oxygen Vacancy

Reduction

Strain ControlNano-Technology

High DensityDevices

MultifunctionalDevices

Schematic of a FIOHPhoton; h Transparent Electrode (ITO)

Pyroelectric (BSN, PLZT)Ferroelectric (BT, PZT)CMR Material (LSMO, LCMO)Oxide Substrate

Monolithic Oxide Integrated Circuit

Lighth

PyroelectricPT

FerroelectricPT

CMR MaterialR

Signal Sensing& Transformation

DataStorage

RetrievingData

GMR vs. CMR

Giant Magneto-Resistance in Magnetic Metal

Multilayers(Superlattices) Colossal Magneto-Resistance

in Magnetic Oxides

Applications of Ferroelectric Thin Films

Thin Film Deposition

PVD (Physical Vapor Deposition) PLD (Pulsed Laser

Deposition) Sputtering

CVD (Chemical Vapor Deposition) MOCVD Sol-gel

Pulsed Laser Deposition

Ion Substitution Effects

Strain Effects

Scanning Probe Microscope

STM (Scanning Tunneling Microscope)

Piezo-Micro-Manipulator

AFM (Atomic Force Microscope)

Non-conductive Materials like Dielectrics

In Air → Easy to Use

SCM (~ Capacitance ~)

ResonanceFrequency

Applications of SCM - I

Semiconductor MOSFET

Applications of SCM - II

Memory Application

EFM(Electric Force Microscope)

EFM – Ferroelectric Domain

MFM(Magnetic Force Microscope)

MFM-Hard Disk Surface