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Sensors
P.508
P.522
P.536
P.550
507
●
● ●
●
●
● ●
●
q (ISO)
w
e
r
t
y
…
ZSE30A(F)/ISE30A
ISE70
ISE75(H)
PSE53□
PFM7
PFMV5PFM5 PF2A5PF2D5
PF3W7
PF3W5
PF2A7
PSE200 PSE300 PSE200 PSE300PSE54□ PSE55□
ISA2PS1□00
ZSE40A(F)/ISE40A ZSE80(F)/ISE80(H)
PSE56□
ZSE10(F)/ISE10
508
…0.32MPa
0.325MPa 0.3MPa
509
0
0
-100kPa
-100kPa
100kPa
0
SUS
SUS , .
, .
.
2 , , .( .)
.
510
0-100kPa 15MPa1MPa
(2.0MPa)
100kPa
0 5kPa2kPa
PSE54+PSE200
.
.
PS1100
.
.
ZSE80F
.
PSE54�
ZSE80F
.
ISA2
511
ISE35
. , ,
.
ISE70/75(H)
PSE560+PSE300
· ,
.
ZSE80F
Lock
.
ISE80
.
PSE550 PSE550
,
.
PSE550
, .
PSE532+PSE300
(PSE532-) . .
512
M8, M12 .
M8 M12
0.6m/2m/3m
513
PT(R /Rc ), NPT , NPTF
, PF (G ), TSJ , URJ , M
1/8inch 1/4inch .
3mm 5mm
, mm inch
ø , ø . ,
( )
( )N2 , O2
(NBR ) .・ ( )
・Si ,
SUS
. FKM .
HNBR FKM ,
20-10-
・( :ISO Class 5)
・ 2・
514
3 57%※ !10 86% !
※ :7Step. 7Step×10
:3Step. 3Step×10New
1 2 10
● ● ● ● ●
33 1010
.
(4ch )
NG1
!
NG1 NG2OK
NG NG
515
(MEMS )
::
: 50%+ 50%
: ( )
( )
( )
f = k × v f: v: , k: ( , )
( )・
(Rh)(Ru) (Rd)
(Ra)Ru Rd
Ra
JIS B8392.1-1. 1.2~1.6.2 , ISO8573.1-1. 1.2~1.6.2
L/min 0℃, 101.3kPa
20℃, 101.3kPa
RaRu Rh Rd
FlowFlow
(b)
RaRu Rh Rd
(a)
L/min0℃, 101.3kPa 20℃,
101.3kPa
516
MULTI COUNTER:CEU5 A COM COM COMB DC12V GND F.G. R.S. HOLD BANK1 BANK2
COM S.STOPOUT1OUT2OUT3OUT4OUT5AC100~240V
COUNT PRESET FUNC.
SD SGRD RS-232C
UP
LEFT RIGHT
DOWN
SEL. SETMODE
M/C
M/C
M/C
■
2 (Ar), (CO2)
・・・
・
・ ・
・
N2
(N2 )
517
¡
PF3W
PF2D
518
.
.
.
.
.
.
.
( 999999ℓ)
ON
OFF
ON
OFF
,
.( )
.( )
519
M8/M12 PF2□7□ , PF2A5□/PF2W5□
M12 PF3W7□ M8
PFM , PFMV , PF2□2□ , PF2D
PF2□3□
(PF2□5□) , PLC
PF2□3□ PF2D5□ ,
(AMP, , , , 3M )
PFM7S
PFMV3
PF2200
DIN
PFM7
PFM7 PFMV3PFMV5 PFM7 PF2A7H
520
( )
( )
PF2A7□H PF2A5 PF2D5 PF3W7 PF3W5PFM7 PFM5PFMV5 PF2A7
::
・( :ISO Class 5)
・ 2・
( )N2 , O2
・ ( )
・
・ FKM・
( )
・Si・ MEMS
PFM
12
S
IN
PFM7 PFM5
PT (R /Rc ), NPT , PF (G ), MPF2D5 LQ24-2)
mminch
PF2A5
PF3W
1 2S
IN
PFM7PF2D5
PF3W
521
●ON-OFFON-OFF 1 NPN
OFF
. PLCPLC high
2 NPN ON
PLClow high low PLC
ON-OFF
ON-OFF NPN PNP
를
●
A/D
ON-OFF
1 NPN OFF
2 NPN ON
5
1
20
4
0
PLC high DC12~24 [V]
MAX80[mA]MAX30[V]
PLC low DC12~24 [V]
MAX80[mA]MAX30[V]
─[V][mA]
1~5[V]A/D
4~20[mA]
A/D
)×
10 [m]
I
(= I× r)
GND GNDGND
r
I
GND
r
GND
4~20[mA]
1~5[V]
GND
522
NPN PNP
1 NPN NPN NPN
NPN
3 ON ON
2
1NPN ON
PLC VaCOM
4 PNP PNP PNP
PNP
6 ONON
PNP ONPLC GNDCOM
NPN
4 PNP
5 PNP OFF
6 PNP ON
PLC low DC12 24 [V]
MAX80[mA]
DC12 24 [V]
MAX80[mA] PNP
PLC high
DC12 24 [V]
MAX80[mA]
PNP
1 NPN
2 NPN OFF
3 NPN ON
DC12 24 [V]
MAX80[mA]MAX30[V]
PLC high
DC12 24 [V]
MAX80[mA]MAX30[V]
PLC low DC12 24 [V]
MAX80[mA]MAX30[V]
NPN
523
(=ON OFF
ON(ON - ON
2 OUT1 P1 P2OUT2 P3 P4
n1・n2・n3・n4
3digitL
P1 P2 7digit 6digit
)2 OUT2 P3 P4
.
)
P1(n1)
P2(n2)
0 0
=
ON
OFF
ON
OFF
HH
L
P2(n2)
P1(n1)
0 0
ON
OFF
ON
OFF
L=H= 3digit
524
25[℃] 0~50[℃], 0~60[℃]
25[℃] ON-OFF
)100[kPa] 50[kPa] ON
±1.0[%F.S.]F.S.=100-0=100[kPa] ±1.0 %F.S.=100×0.01=±1[kPa]
49~51[kPa]ON ): 1[%F.S.]
51[kPa] ON50~52[kPa] ON
49~51[kPa] 50[kPa]
50[kPa]
.
50[kPa]±1.0[%F.S.]
ONON
.
±3.0[%F.S.], 25[℃]
1~5[V]F.S.=5-1=4[V]±3.0%F.S.=4×0.03=±0.12[V]
0~50[℃]±120[mV]
±3.0[%F.S.], 25[℃]
?100[kPa]
F.S.=100-0=100[kPa]±3.0%F.S.=100×0.03=±3[kPa]
0~50[℃]±3[kPa]
ON
515049
ON
OFF
[kP
a]
[kP
a] 51
49
5.125
4.88
1.121
0.88
10310097
30
-3 [kPa] 100
[V]
[kP
a]
0
525
3
2 43 2
2( )
( )
( ) 5[mA] 40[mA]
40[mA] OFF 1[mA]
1[mA] PLC
DC
12~
24 [V
]
5~40[mA] OUT(+)
OUT(−)
OUT(+)
OUT(−)
NPN
PNP
DC
12~
24 [V
]
5~40[mA]
PLC
"PS1000,PS1100 "
NPN
PNP
(),
( ) SUS304 SUS316L, ( ) SUS630 SUS316L
SUS304 SUS630
526
( )
ON-OFFON (P1 ) (P3)
OFF(EC)
ON ON (P1 ) (P3)
) (EC) 3
A=B=P1=A−(A-B)/4P2=B (A-B)/4
P3
ON
OFF
ON
OFF
A
P2
OU
T1
ON
(EC)EC=0
EC=1 EC=2 EC=3
P1
P2
B
P1
.
527
−0.3[kPa] −0.3[kPa]
ON500[kPa]
1[kPa] ON499[kPa]
510[kPa] 490[kPa]
,
( ) ( )
OFFONn1n2
ON
OFF
n1n2
ON
OFF
P1
P2
ON
OFF
P1
P2
ON
OFF
P1
P2
P1
P2
n1n2
n1n2
Hi
Lo
Hi
Lo
) PSE200 :10[ms] : 5 [ms]
) PSE200 :10[ms] : 5 [ms]
528
5[ms] (PSE200 10[ms] ) GND
) P1=40kPa,P2=20kPa
,
Key Lock
Key
.30
. ( OFF)
.( ( ON )
0( 4m)
[kP
a]
100
Hi
Lo
50
0
ON
OFF
50kPa
90kPa,70kPa
10[ms]
.
)PSE200 A 10[ms] B 15[ms]
B10[ms]
B10[ms]
A5[ms]
529
2
IP
1 ● 1
0123456
50 [mm]
12 [mm]
2.5 [mm]
1.0 [mm]
● 2
0
1
2
3
4
5
6
7
8
.
15 .
60 .
.
.
─
)IP651 6, 2 5
UL/CSAUL/CSA ( ・ )
UL ・CSA
DC24V
UL/CSA ( UL
CECE EC
( ), EMC ( )
DC24V (AC50~1000V DC75V~1500V )
3 EMC CE( )
・ EC
1×10-3
1
1×103
1×102
1×10-6
1×10-3
1 1×10-1
1×10-5
1×10-2
1×10
1
1.0197×10-5
1.0197×10-2
1.0197×10
1.0197 1
1.0332
1×10-4
1.3595×10-3
9.8692 ×10-6
9.8692 ×10-3
9.8692
9.8692 ×10-1
9.6784 ×10-1
1
9.6784 ×10-5
1.3158×10-3
1.0197×10-1
1.0197 ×102
1.0197 ×105
1.0197 ×104
1 ×104
1.0332 ×104
1
1.3595 ×10
7.5006×10-3
7.5006
7.5006 ×103
7.5006 ×102
7.3556 ×102
7.6000 ×102
7.3556×10-2
1
kPa MPa bar kgf/cm2 atm mmH2O mmAq mmHg Torr
1.4503×10-4
1.4503×10-1
1.4503×102
1.4503 ×10
1.4217×10
1.4706×10
1.4220×10-3
1.9330×10-2
psi
)350[mmHg] [kPa] ?1 [mmHg] = 1.3332×10-1[kPa]
1.3332×10-1×350 = 46.662[kPa]
1
1×103
1×106
1×105
Pa(N/m2)
9.8067×10-1
1.0133
9.8067×10-5
1.3332×10-3
9.8067×10-2
1.0133×10-1
9.8067×10-6
1.3332×10-4
9.8067×10
1.0133×102
9.8067×10-3
1.3332×10-1
9.8067×104
1.0133×105
9.8067
1.3332×102
)80[kPa] [kgf/cm2] ?1 [kPa] = 1.0197×10-2[kgf/cm2]
1.0197×10-2×80 = 0.81576[kgf/cm2]530
………………………………………………………………………………………………………
…………………………………………… …………………………………………………
…………………………………………………………… ………………………………………………
……………………………………………………………………………………………………
………………………………………………………………………………………………………
……………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………
……………………………………………………
………………………………………………………………………………………………………
……………………………………………
P.532
…………………………………………………(digit)…………………………………………
…………………………………………………………………………………………………………
…………………………………………………………………………………………
…………………………………………………………………………………………………………
………………………………………………………………………………………………
…………………………………………………………………………………………………………
……………………………………………………………………………………………………………………
…………………………………………………
P.533
P.534
……………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………
………………………………………………………………………………………………………………
…………………………………………………
P.534
…………………………………………………………………………………………………………
…………………………………………………………………………………………………………
P.534
……………………………………………………(Full Scale)……………………………………………
(Full Span)…………………………………………………P.535
………………………………………………………………………………………………
…………………………………………………………………………………………………
…………………………………………………
P.535
A~Z
2 …………………………………………………digit( )…………………………………………………DIN ………………………………………………………F.S.( , )…………………………………………Key Lock …………………………………………………LED ……………………………………………………NPN …………………………………………………ON-OFF …………………………………………………PNP …………………………………………………SUS ………………………………………………………TSJ ………………………………………………………URJ ………………………………………………………
P.535
P.532
………………………………………………………………………………………………………
………………………………………………………………………………………………………………
…………………………………………………………………………………………………………………………………………………………………
P.533
………………………………………………………………………………………………………………………………………………………
…………………………………………………… …………………………………………………… …………………………………………………… ……………………………………………………
…………………………………………………… ……………………………………………………
…………………………………………… (PLC)……………………………………………
P.533
P.532
……………………………………………………Lock …………………………………………………
…………………………………………………………P.532
……………………………………………………P.532
531
.
.
(0) .
.
P.527 .
.
, .
.
2 ON 2 ( ( ) - ( ) ) .
.
. .
.( .)
.
.
ON-OFF OFF 0
P.530 .
ON-OFF ON (LED : ) .
CPU , ON-OFF
.
Lock
10 4V′ V″V′/V×100=10
0
( ) ON-OFF
V
V'
V"
4
532
. ,
P.522 . ON-OFF .
.
(PLC) .
.
. 1~5[V] 1
(digit) ,
. 1kPa 0, 1, 2, 3,…99, 100 1kPa .
.
.
P.528 .
P.527 .
5V
1V
01
P.525 .
P.524 .
P.530
. , ,
( ) .
ON-OFF ON
.
.
.
.
. , ,
.
P.524 .
.
, . .
, . 1kPa 1, 2, 3,… 1.5 2.5 .
533
ON-OFF ,
.( 2, 3 )
P.525 .
P.524 .
() ON-OFF
ON-OFF .
.
. .
ON OFF . . .
.
( ) .
.
ON COM . . 0
.
C
E
B
2 NPN
E
C
B
3 PNP
.
(0) .
. .
.
. .
, 0 .
.
ON-OFF ON, OFF .
.
. .
P.882 b n .
534
( ) .
.
(Full Scale)F.S.
(Full Span)F.S.
P.524 .
( ) .
.
.
P.524 .
A~Z
2 P.526 .
digit( ) . 1 digit=1kPa
, 1,2,3,…,99,100 1kPa .
DIN DIN . DIN 35
[mm] .
F.S.( , ) .
, 1~5[V] F.S.=5-1=4[V] . ( : 1%F.S.=4×0.01=0.04[V]
Key Lock . Key lock
.
LED .
NPN P.523 .
ON-OFF P.522 .
.
PNP P.523 .
SUS .
TSJ Tube Swage Joint . Swagelok
Swagelok® .※Swagelok® Swegelok Company .
URJ Union Ring Joint swagelok
VCR® ※VCR® Swagelok Company
535
0-100kPa 15MPa1MPa
(2.0MPa)
100kPa
0-100kPa 15MPa1MPa100kPa
0 5kPa2kPa
Key Lock
"
( )
SUS
( )
( )
536
・Z/ISE30A ・Z/ISE40A ・Z/ISE10 ・ISE70 ・Z/ISE3
・Z/ISE80 ・ISE75 ( )
・Z/ISE1 ・Z/ISE2 ・PS1000/1100/1200
・PSE530 ・PSE540 ・PSE550 ( )
・PSE560
[1ch ]・PSE300
[4ch ]・PSE200
・
・
・ /
・
・
・LED ON/OFF
537
ISE75ISE75H
ZSE80(F)ISE80(H)
ISE70
±2 F.S. (0 50℃)
±3 F.S.(0 50℃)
±0.5 F.S.
1 NPN PNP2 NPN PNP
PNP
ZSE40A(F)ISE40A
−110 110kPa10 −111kPa
−0.105 1.1MPa−0.105 2.2MPa
ZSE30A(F)ISE30A
−105 105kPa10 −105kPa
−0.105 1.05MPa
IP65 IP40 IP67
NPN PNP
NPN PNP
2(0.1 )
1(0.1 )
2(1 )
2(0.1 )
±0.2%F.S.±1digit
NPN PNP
IP65
±0.2 F.S.±1digit
0.4 10MPa0.5 15MPa−0.1 1MPa
R URJ, TSJ
DIN
IP40
DC12 24V±10 ( ±10
ZSE10(F)ISE10
(25℃ )
( )
538
ZSP1 PS1000PS1100PS1200
ZSE2ISE2
0 100kPa0 1MPa0 −101kPa
±1 F.S. ±1 F.S.
1 10%3 F.S.
ZSE1ISE1
±3 F.S.0 60℃
NPN PNP2
NPN PNP
3 F.S.
−0.1 0.45MPa−0.1 0.4MPa−100 0kPa
−20 −101kPa
±3 F.S.0 60℃
4 F.S. 10 F.S.
0.5kPa
NPNNPN PNP
IP40 IP40
ZSE3ISE3
1(1 )
0 98kPa0 0.98MPa0 −101kPa
NPN
ISA2
ZX
ZX
ZM ZX/ZR
−0.1 1MPa
IP40
2(1 )
ISE35
ARM10/11
3digits※) ※digit
±0.01mm (0 60℃)
( )
±0.01mm ( )
LED
IP66
0.01mm
30 200kPa(
0.01~0.25mm)50 200kPa
( 0.03~0.50mm)
539
0 50 0 50
±1 ±0.2 ±0.3
DC12 24V
5 2
1 2
IP40
1 5V1 5V
4 20mA1 5V
4 20mA
Key Lock
CE CE CE,UL/CSACE,UL/CSA
M
—10 60
IP65 IP40
±0.2 ±0.1
MR,NPT R,NPT,Rc
URJ,TSJ※
IP65 IP40
PSE530 PSE540 PSE550 PSE560 PSE200 PSE300
※URJ, TSJ .540
PSE53 PSE54 PSE55 PSE56
PSE531
PSE533
PSE532
—
PSE530
—
PSE541
PSE543
—
—
PSE540
—
—
—
—
—
—
PSE550
PSE561
PSE563
—
PSE564
PSE560
—
−100kPa
−101 kPa 0
0
0
0
500kPa
1MPa
0 2kPa
−100 kPa 100kPa
100kPa
0 100kPa 500kPa 1MPa
PSE200 PSE300
0.1kPa
0.1kPa
0.1kPa
—
0.001MPa
—
0.1kPa
0.2kPa
0.1kPa
1kPa
0.001MPa
0.01kPa
PSE531
PSE533
PSE532
—
PSE530
—
PSE541
PSE543
—
—
PSE540
—
—
—
—
—
—
PSE550
PSE561
PSE563
—
PSE564
PSE560
—
PSE5 Series
•
NPN 5
PNP 5
NPN 2 1-5V NPN 2 4-20mA NPN 2
PNP 2 1-5V PNP 2 4-20mA PNP 2
PSE200/300 Series
541
0 3-0.5-1 0.5 1-3
0~0.50~10~3
-0.5~0.5
-3~3-1~1
L/min
0 164 100 2504030
0.5~42~165~40
10~10030~250
L/min
0 10025 50101
0.2~100.5~25
1~502~100
L/min
120003000 600060030 150
150~3000
300~6000
600~12000
L/min
L/min 0 40204
0.4~41.8~20
4~40
L/min 0 40 100 200205
0.5~202.5~100
5~200
L/min 0 1000200 500102 5
2~2005~500
10~1000
( )
(MEMS )
50% + 50%
, CO2
JIS B8392.1-1. 1.2 1.6.2, ISO8573.1-1. 1.2 1.6.2
( 3mPa s(3cP) )
0 999500100 2005010
1~105~50
10~10020~200
L/min
50~500
542
P.546 P.547
・PFM5 ・PFMV5 ・PF2A5
・PF3W5 ・LFEJ(K)
P.547
・PF2D5 ・PF3W5
P.546 P.547
[1ch ]・PFM3 ・PFMV3 ・PF2A3
[4ch ]・PF2A2
[1ch ]・PF3W3 ・LFE0
[1ch ]・PF2D3
[4ch ]・PF2D2
P.547
P.544 P.545
・
・
・ /
・
・PFM7 ・PF2A7 ・PF2A7H ・PFMB
・PF3W7 ・LFEA(B/C/D)
・PF3W7
( )・
・
・
)PF2A7 PF2A7□□H
543
・
PFM7 PF2A7
, N2, Ar, CO2
DIN
IP40
2 LED
NPN PNP
±1 F.S.±3 F.S.
25℃±2 F.S. 15 35℃±5 F.S. 0 50℃
DC24V±10
0.2 10L/min0.5 25L/min1 50L/min2 100L/min
DC12 24V ±10
PFMB
, N2
DIN
IP40IP65
2 LED 2 LCD
NPN PNP
±1 F.S.
±2 F.S. 15 35℃±5 F.S. 0 50℃
2 200L/min5 500L/min
10 1000L/min
, N2
1 LED
NPN PNP
3digits※
※digit
±1 F.S. PF2A70, PF2A7H±2 F.S. PF2A71
±3 F.S. 15 35℃±5 F.S. 0 50℃
±2 F.S. PF2A7H 0 50℃
1 10L/min5 50L/min
10 100L/min20 200L/min50 500L/min
150 3000L/min300 6000L/min600 12000L/min
PFMB
544
±0.5 F.S.
±0.5 F.S.
0.5 20L/min2.5 100L/min5 200L/min
±5 F.S. 0 50℃
PF3W LFE
, , ( ,
±2 F.S.
0.5 4L/min2 16L/min5 40L/min
10 100L/min50 250L/min
10 100L/min
NPN PNP
3
DC24V±10
3 23 2
IP65
545
PFM5 PFM3 PFMV5 PFMV3 PF2A5 PF2A3 PF2A2
, N2,Ar, CO2
1
4ch
DIN
IP65IP40
2 2 1 1
NPN PNPNPN PNP
NPN PNP
3digits※
※digit
±0.1 F.S.
±0.5 F.S.
±1 F.S.
±5 F.S.
±0.1 F.S.
±0.5 F.S.
±1 F.S.PF2A3
±2 F.S.PF2A2
±1 F.S. ±3 F.S.
±1 F.S.
±5 F.S.
(25℃ )±0.5 F.S.0 50℃
±2 F.S.15 35℃±5 F.S.0 50℃
±0.5 F.S.0 50℃
±2 F.S.15 35℃±3 F.S.0 50℃
±1 F.S.15 35℃±2 F.S.0 50℃
±2 F.S.0 50℃
±2 F.S.15 35℃±5 F.S.0 50℃
DC24V±10 DC24V±10 DC12 24V±10
0.2 10L/min0.5 25L/min1 50L/min2 100L/min
0 0.5L/min0 1L/min0 3L/min
−0.5 0.5L/min−1 1L/min−3 3L/min
1 10L/min5 50L/min
10 100L/min20 200L/min50 500L/min
1 1 4
, N2 , N2
IP40 IP40 IP65
IP40
546
,
1
0.5 4L/min2 16L/min5 40L/min
10 100L/min50 250L/min
10 100L/min30 250L/min
PF2D5 PF2D3 PF2D2PF3W5 PF3W3
,SuperPFA
,,
1
4ch
IP65
1
NPN PNP
3digits※
※digit
±0.5 F.S.±3 F.S.±1 F.S.
±1 F.S.15 35℃±2 F.S.0 50℃
4
1
±2 F.S.0 50℃
±5 F.S.0 50℃
DC12 24V±10
0.4 4L/min1.8 20L/min4 40L/min
IP40IP65
IP40
DC12 24V±10
NPN PNP
±5 F.S.0 50℃
±0.5 F.S.0 50℃
±5 F.S.0 50℃
±2 F.S. ±0.5 F.S. ±2 F.S.
3
IP65 IP65IP65
IP40
3
3 2
IP65IP65
IP40
LFE1LFE2LFE3
LFE0
,
1
3
NPN PNP
±0.5 F.S.±1.5 F.S.
±0.5 F.S.±5 F.S.
DC24V±10
0.5 20L/min2.5 100L/min5 200L/min
LFE3
3 2
547
IS3000IS10
DC ~100VAC ~100V
0.1~0.4MPa( 0.1~0.6MPa)
0.1~0.7MPa
0.05MPa
±0.05MPa ±0.05MPa
0.08MPa
1a
DC24 ~125VAC100~250V
1ab
F.R.L.
0.02~0.3MPa
±3 F.S.
0.01~0.2MPa
0.05~0.7MPa 0.1~1.0MPa
ISG11 ISG21
DC24~220VAC100~550V
0.02~0.35MPa(
0.02~0.45MPa(
0.03~0.4MPa(
0.03~0.6MPa(
1a1b
2ab IS2761
ISG13 ISG23ISG12 ISG22
ISG2 IP44
548
IFW5 IF3ZSM1
−10~−100kPa −27~−80kPa
DC4.5~28V(ZSM1-115)
AC/DC100V (ZSM1-121)
15kPa (ZSM1-115)
20kPa (ZSM1-121)
NPN (ZSM1-115)
1a(ZSM1-121)
ZM
±3 F.S. ±10 F.S.
7~53kPa
0.1~0.6MPa 1MPa
1.2MPa 1.75MPa
1~10L/min10~20L/min20~50L/min
14~60L/min20~1500L/min36~2600L/min
1L/min 1.5L/min 3L/min
1ab1a 1b
1ab
100mΩ (DC500 mega)
ISG19 ISG29
549