He/O-ICR in HT-7’2007

J.S Hu, J.G Li

2007.5.31

实验目的• GAP中再沉积层清除• 氧化后等离子体恢复

–优化和加强清洗–硼化对氧化后等离子体恢复的影响

实验进程• 4:1He/O2-ICR, 70’• Pumping with 3 cryo-pump, 15’• D2-ICR, 40’• Pumping with 3 cryo-pump, 15’• He-ICR,50’• Pumping with 3 cryo-pump, 15’• B-ICR+He-ICR, 70’+90’• Pumping with 3 cryo-pump, 15’• Plasma discharge

– Temp.Limiter ~110OC– Temp.Liner ~200OC– 0.3s on/ 1.5s off

Vacuum

1 6 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 91 96-8-7.1x10

-71.9x10

-74.5x10

-77.1x10

-79.7x10

-61.2x10

-61.5x10

-61.7x10

-62.0x10

-62.3x10

Atomic Mass Units

Pa before oxidation, Tlimiter:36 May 31, 2007 08:46:37 AM --- Total Pressure

1 6 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 91 96-6-1.2x10

-65.2x10

-51.2x10

-51.8x10

-52.4x10

-53.1x10

-53.7x10

-54.4x10

-55.0x10

-55.6x10

-56.3x10

Atomic Mass Units

Pa after oxidation 4e-4Pa Tlimiter: 74 May 31, 2007 11:52:15 AM --- Total Pressure

1 6 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 91 96-7-8.2x10

-63.4x10

-67.6x10

-51.2x10

-51.6x10

-52.0x10

-52.4x10

-52.9x10

-53.3x10

-53.7x10

Atomic Mass Units

Pa After D2-ICR , Tlimiter: 84 May 31, 2007 12:59:33 PM --- Total Pressure

1 6 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 91 96-7-6.4x10

-62.7x10

-66.0x10

-69.3x10

-51.3x10

-51.6x10

-51.9x10

-52.2x10

-52.6x10

-52.9x10

Atomic Mass Units

Pa After He-ICR, Tlimiter 95 May 31, 2007 01:50:35 PM --- Total Pressure

After experiment

1 6 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 91 96-7-5.4x10

-62.2x10

-64.9x10

-67.6x10

-51.0x10

-51.3x10

-51.6x10

-51.8x10

-52.1x10

-52.4x10

Atomic Mass Units

Pa after B-ICR, Tlimiter 100 May 31, 2007 04:37:29 PM --- Total Pressure

He/O-ICR-1

00:00 00:07 00:14 00:21 00:28 00:35 00:42 00:49 00:56 01:03 01:10

Time (hh:mm)

-61.0x10

-51.0x10

-41.0x10

-31.0x10

-21.0x10

Pa diff during oxidation May 31, 2007 10:02:13 AM

H2HDHe/D2CH3H2OHDOD2OCOO2CO2

He/O-ICR 2

00:28 00:35 00:42 00:49 00:56 01:03 01:10 01:17 01:24 01:31 01:38

Time (hh:mm)

-61.0x10

-51.0x10

-41.0x10

-31.0x10

-21.0x10

Pa diff during oxidation May 31, 2007 10:02:13 AM

H2HDHe/D2CH3H2OHDOD2OCOO2CO2

He-ICR-1

00:00 00:05 00:10 00:15 00:20 00:25 00:30 00:35 00:40 00:45 00:50 00:55

Time (hh:mm)

-81.0x10

-71.0x10

-61.0x10

-51.0x10

-41.0x10

-31.0x10

-21.0x10

Pa diff during He-ICR May 31, 2007 01:01:09 PM

H2HDHe/D2CH3H2OHDOD2OCOO2CO2

He-ICR 2

00:00 00:01 00:02 00:03 00:04 00:05 00:06 00:07 00:08 00:09

Time (hh:mm)

-81.0x10

-71.0x10

-61.0x10

-51.0x10

-41.0x10

-31.0x10

-21.0x10

Pa diff during He-ICR May 31, 2007 01:51:37 PM

H2HDHe/D2CH3H2OHDOD2OCOO2CO2

B-ICR

00:00 00:07 00:14 00:21 00:28 00:35 00:42 00:49 00:56 01:03 01:10

Time (hh:mm)

-81.0x10

-71.0x10

-61.0x10

-51.0x10

-41.0x10

-31.0x10

-21.0x10

Pa diff during He/B-ICR May 31, 2007 02:01:28 PM

H2

HD

He/D2

11

H2O

28

32

44

71

143

He-ICR 3

01:10 01:17 01:24 01:31 01:38 01:45 01:52 01:59 02:06 02:13 02:20

Time (hh:mm)

-81.0x10

-71.0x10

-61.0x10

-51.0x10

-41.0x10

-31.0x10

-21.0x10

Pa diff during He/B-ICR May 31, 2007 02:01:28 PM

H2

HD

He/D2

11

H2O

28

32

44

71

143

Plasma discharge B&A

00:12 00:19 00:26 00:33 00:40 00:47 00:54 01:01 01:08 01:15 01:22

Time (hh:mm)

-81.0x10

-71.0x10

-61.0x10

-51.0x10

-41.0x10

-31.0x10

-21.0x10

Pa inner after oxidation 1.7E-5 May 31, 2007 04:39:46 PM

H2HDHe/D2CH3H2OD2OCOO2CO2143

00:00 00:07 00:14 00:21 00:28 00:35 00:42 00:49 00:56 01:03 01:10

Time (hh:mm)

-81.0x10

-71.0x10

-61.0x10

-51.0x10

-41.0x10

-31.0x10

-21.0x10

Pa inner before oxidation 8E-6 May 31, 2007 08:14:39 AM

H2HDHe/D2CH3H2OHDOD2OCOO2CO2

Plasma recovery95816-95830-95861-95866

Comparison with OH disruptive PD before oxidation

Comparison with OH after 3nd Boronization92131-9230298515-98566

Summary

• Successful experiment!

Thank you for attentionThank ICR, Vacuum Group and Dr.Gong for t

heir help.