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    CMOS Digital Integrated Circuits1

    CMOS Digital Integrated Circuits

    Lec 5

    SPICE Modeling of MOSFET

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    CMOS Digital Integrated Circuits2

    SPICE Modeling of MOSFETS

    Goals

    Understand the element description for MOSFETs

    Understand the meaning and significance of the various parametersin SPICE model levels 1 through 3 for MOSFETs

    Understand the basic capacitance models

    Have a general notion of BSIM model parameters

    Become award of some newer models

    Understand the use and shortcomings of the models covered Note: In the following, HSPICE = Star-HSPICE

    Rederences

    Massobrio, G., and P. Antognetti, Semiconductor Device Modeling withSPICE, 2nd Edition, McGraw-Hill, 1993.

    Foty, D.,MOSFET Modeling with SPICE

    Principles and Practice,Prentice Hall PTR, 1997.

    StarHspice Manual, Avant!http://cmbsd.cm.nctu.edu.tw/~yumin/tutorial/hspice_qrg.pdf

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    CMOS Digital Integrated Circuits3

    The MOSFET Description Lines

    Model and Element

    What does SPICE stand for? Simulation Program with Integrated Circuit Emphasis

    The MOSFET Model and Element Description Lines

    Process and circuit parameters which apply to a particular class of

    MOSFETS with varying dimensions are described for that class of

    MOSFETS in a single .model line in which + is used to denote linecontinuation.

    The dimensions are given on the element description line. In both, it is

    critical to watch the units; they are basically illogical!

    The SPICE element description line for a MOSFET has the following

    form: Mxxxxxxx nd ng ns mname

    All parameter value pairs between < and > are optional.

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    CMOS Digital Integrated Circuits4

    The MOSFET Description Lines

    Element Line (Continued)

    Additional optional HSPICE parameters:

    TEMP=val is not used on element line in HSPICE and not used for level

    4 or 5 (BSIM) models.

    Parameter Definitions

    See http:\\cmbsd.cm.nctu.edu.tw\~yumin\tutorial\hspice_qrg.pdf

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    CMOS Digital Integrated Circuits5

    DC SPICE Models

    Level 1 (Shichman-Hodges) DC Model

    EquationsVTEquation as derived previously

    IDEquations as derived previously with linear mode equation times(1+VDS) for continuity across linear-saturation boundary. Both useLeff in place ofL where:

    Leff= L 2 LD

    Key Parameters: What do they represent? See Kang and LeblebiciTable 4.1

    NMOS, PMOS (obvious) MOSFET channel type

    KP process transconductancek

    VTO (note O, not 0!) zero substrate-bias threshold voltage VT0

    GAMMAsubstrate-bias or body-effect coefficient PHItwice the Fermi potential 2FLAMBDA channel length modulation

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    CMOS Digital Integrated Circuits6

    DC SPICE Models

    Level 1 (Continued) Additional Parameters: What do they represent?

    LD Lateral diffusion (If not present, may need to find Leffmanually!)

    TPGType of gate material: 0 A1, +1 opposite to substrate, -1 same as substrate. Default +1. For the typical CMOS process, TPG = 1for NMOS and 1 for PMOS

    NSUBsubstrate impurity concentration NA (NMOS) ND (PMOS)

    NSS Surface state density Used to define surface component ofVT0.

    TOXOxide thickness toxU0 (note 0, not O) Surface mobility 0

    RD, RS Drain resistance, Source resistance

    RSHDrain and Source sheet resistance (/) Derived Parameters. Note that if some parameters missing, others, if

    present, can be used to derive them. E. g. NSUB to derive PHI, and TOXand U0 to derive KP. Question: What parameters to derive GAMMA? Ifthe derivable parameters are present in the model, they will be used; ifnot, derived if possible from other parameters (and defaults), else,defined.

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    CMOS Digital Integrated Circuits7

    DC SPICE Models

    Level 2 What about defaults and units? See Table 4.1. of Kang and Leblebici

    Other parameters in Level 1 are related to capacitance (later) or irrelevantto digital applications.

    Level 2

    Analytical model that takes into account small geometry effects.

    Equations that use most of the parameters are given in the text.

    Parameters in addition to those for Level 1:

    NFS - Fast surface state density Used in modeling subthresholdcondition.

    NEFFTotal channel charge coefficient Empirical fitting factormultiplied times NSUB in the calculation of the short channel effect .Used only in Level 2.

    XJJunction depth of source and drain.

    VMAXMaximum drift velocity for carriers use for modeling velocitysaturation.

    DELTAChannel width effect on VT.

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    CMOS Digital Integrated Circuits8

    DC SPICE Models

    Level 2 (Continued)

    XQCCoefficient of channel charge share. Used to specify the portionof the channel charge attributed to the drain. Also, more importantly

    causes the Ward capacitive model to replace the Myer capacitance

    model. Both have their disadvantages.

    Next three parameters produce a multiplicative surface mobility

    degradation factor to multiply times KP and appear in Level 2 only.

    UCRITCritical electric field for mobility degradation.

    UEXPExponent coefficient for mobility degradation.

    UTRATransverse field coefficient for mobility degradation.

    Coefficient ofVDS in denominator of the factor.

    See Table 4.1. of Kang and Leblebici.

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    CMOS Digital Integrated Circuits9

    DC SPICE Models

    Level 3

    More empirical and less analytical than Level 2; this permits improvedconvergence and simpler computation while sacrificing little accuracy.

    The parameters have beyond those in Level 2 (Note that the following

    Level 2 parameters are deleted: NEFF, UCRIT, UEXP, and UTRA.)

    KAPPA Saturation field factor. An empirical factor in the equation

    for the channel length in saturation.

    ETAstatic feedback on VT. Models effect ofVDS on VT, i.e., DIBL

    (Drain-Induce Barrier Lowering)

    THETAMobility modulation. Models the effect of VGS on surface

    mobility.

    See Table 4.1 of Kang and Leblebici.

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    CMOS Digital Integrated Circuits10

    Capacitance Models

    Level 1 through 3 use the Myer capacitance model(see Kang and

    LeblebiciFig.3.32) as the default for the channel capacitance with the

    option of the Ward model (see Kang and Leblebici Fig.4.8) in Levels 2and 3.

    For the source and drain capacitances, note the junction equation with

    reverse bias Vwith VT, the thermal voltage,

    I =Is(eV/VT-1)=-Isfor V-4VT

    and recall thatCj=Cj0/(1-V/0)m

    where m = 1/2for an abrupt junction and m = 1/3for a graded junction.

    The parameters:

    ISBulk junction saturation current.

    JSBulk junction saturation current density (used with junction areas)

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    CMOS Digital Integrated Circuits11

    Capacitance Models (Cont.)

    PB - 0Bulk junction Potential (Built-in voltage)CJZero-bias bulk junction capacitance per m2

    MJmBulk junction grading coefficient

    CJSWZero-bias perimeter capacitance per m

    MJSWmPerimeter capacitance grading coefficient

    FCBulk junction forward bias coefficient used in evaluating capacitanceunder strong forward bias.

    CGBOGate-bulk overlap capacitance per meter ofL; should be set to 0 if

    modeled as interconnect instead.

    CGDOGate-drain overlap capacitance per meter ofW

    GDSOGate-source overlap capacitance per meter ofW See Table 4.1. of Kang and Leblebici

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    CMOS Digital Integrated Circuits12

    More SPICE Models

    BSIM (Level 4)

    An empirical model that includes:all of the typical small geometry effects

    the nonuniform doping profile for ion-implanted devices

    an automatic parameter extraction program which produces a consistent

    set of parameters

    L and W for the channel For BSIM parameters, see Foty Table 8.1

    We will not look at these parameters in detail, but it is quite important to

    look at the form of the electrical parameters. Each electrical parameters Pis

    represented by three process parameters P0, PL, and Pw associated with P

    W

    WLWP

    L

    DLLPPP

    effeff

    WL

    0

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    CMOS Digital Integrated Circuits13

    SPICE Models

    BSIM (Cont.)

    L and W are drawn dimensions and DL and DW are the net size changes inthe drawn dimensions due to the entire sequence of fabrication steps. The

    difference shown give Leffand Weff. The equation forPallows for an

    adjustment of the electrical parameter as a function of the effective length

    and width of the channel

    Parameterextraction uses devices sizes. P0 is for long, wide MOSFET.

    BSIM also uses a new approach to capacitance modeling that avoids the

    difficulties of errors and lack of charge conservation in the Meyer model and

    the errors and convergence problems in the Ward model.

    See Massobrio and Antognettip. 219 for trios of parameters.

    Note that model file has only numerical values identified by position; this is

    an alternate form of the model that cryptic.

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    CMOS Digital Integrated Circuits14

    More SPICE Models

    HSPICE Level 28, BSIM2, BSIM3

    HSPICE Level 13 is BSIM

    HSPICE Level 28 - a very popular modification of BSIM, but can only be

    used in HSPICE

    BSIM2 (HSPICE Level 39) typical model today for those not using

    HSPICE

    BSIM3 Version 3.2 (HSPICE Level 49) a complex new public domain

    model that is frequently used today. This is our model unless otherwise

    specified. See http:/cmbsd.cm.nctu.edu.tw/~yumin/tutorial/n96g.L49

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    CMOS Digital Integrated Circuits15

    Which Model Should I Use?

    Level 1: At best, for quick estimates not requiring accuracy. Very poor forsmall geometry devices. Viewed as obsolete by some.

    Level 2: Due to convergence problems and slow computation rate,abandoned in favor of Level 3 or higher.

    Level 3: Good for MOSFET down to about 2 microns.

    BSIMLevel 4 (HSPICE Level 13): good for small geometry MOSFETS

    with L down to 1 micron and tox down to 150 Angstroms. Problems nearVsat; negative output conductance; discontinuity in current at VT. Forsubmicron dimensions, replaced by BSIM2 and HSPICE Level 28.

    BSIM2 (HSPICE Level 39): Good for small geometry MOSFETs with Ldown to 0.2 micron and tox down to 36 Angstroms.

    HSPICE Level 28: BSIM with its problems solved; good choice for

    HSPICE users. BSIM3 Version 3 (HSPICE Level 49): Most accurate, but complex.

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    CMOS Digital Integrated Circuits16

    Summary

    Learned the element description line for MOSFET

    Reviewed the first generation SPICE model parameters, levels 1, 2, and 3

    Reviewed the device capacitances and associated parameters for the BSIM

    model

    Obtained a sense of the form of the parameters for the BSIM model

    Obtained an awareness of some of the newer models Obtained a comparative viewpoint of the models and their use.