MEMS (Micro Electro Mechanical Systems)

BY,S.MICHAEL JOSHUA

III Year Mechatronics,

PSG Polytechnic College, Coimbatore

Introduction

MEMS (Micro Electro Mechanical

Systems) is a technology that in its

most general form can be defined

as miniaturized mechanical and

electro mechanical elements (i.e.,

devices and structures) that are

made using the techniques of

microfabrication.

Why MEMS

MEMS can miniaturize electronics

MEMS makes it cost-effective

MEMS makes it reliable

MEMS opens up new opportunities

History and Development of MEMS

The first MEMS device is invented by

an American Electrical Engineer

Harvey C. Nathanson in 1965 and he

invented a Tuner for Micro Electronic

Radios

In later the MEMS was developed in

step by step process in First

generation, Second generation and

Third generation

Flow Chart of MEMS Process

Design Fabrication Testing Packaging

Bulk Micromachining Surface Micromachining LIGA Process

Micro Machining Technology in MEMS

Materials for MEMS

Silicon

Germanium

Gallium Arsenide

Quartz

Plastics and Polymers

Ceramics

Metals

Applications

Applications

Applications

Future MEMS

In future, the each and every product based on electronics is

manufactured under the MEMS technology

The industry challenges is to: Access to Foundries

Design, Simulation and Modelling

Packaging and Testing

Standardization

Education and Training

References

MEMS Journal (www.memsjournal.com)

www.memsnet.org

wikipedia

Thank You!!!