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Page 1: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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251

Bull. Earthq. Res. Inst.

Univ. Tokyo

Vol. pp.

* email : f [email protected]

JGI Inc.

Earthquake Research Institute, the University of Tokyo

Technology for imaging the lithospheric structure using earthquakes, such as receiver func-

tions and seismic interferometry, have advanced greatly in the last decade. Three component, low

cost accelerometer sensors have been constructed using Micro Electro Mechanical System (MEMS)

technology, and are providing new opportunities for earthquake observations. To evaluate the fea-

sibility of MEMS sensors for earthquake observations, dense seismic array observations were

carried out using MEMS sensors in Mizusawa district, northern Honshu, Japan, for three months in

. In comparison with observed seismograms of velocity sensors, MEMS sensors show high

performance for local and regional earthquakes. However, due to high-noise levels from the sensor

itself at lower frequencies, MEMS sensors are not adequate for recording teleseismic waves.

: MEMS sensor, earthquake observations, imaging of lithosphere

MEMS

Wilson

and Aster, ; Ruigrok

;

Wu :

MEMS

Abe MEMS

MEMS Micro Electro Mechanical System

*

Fumitoshi Murakami *, Hiroshi Sato , Toru Kuroda , Susumu Abe and Naoko Kato

et al.,

et al.,

et al.,

Abstract

Key words

MEMS

Evaluation of MEMS Accelerometer Sensor for Earth-

quake Observations

+

,

+

,

+ , + + ,

+ , + + ,

2. ,**3 ,/+ ,00

++, **+, + / ,+

,**1

,**/ ,**2 -

,**. ,**3

,**1 ,**1 3 ,2 +, ,2 3*

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Page 2: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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observation and corresponding accelerometer sensors modified after Ohtake ( ).

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Page 4: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Outlook of earthquake observation system employed

with analog-output type MEMS accelerometer sensor.

MEMS

Fig. .

Table . Main specifications of MEMS accelerometer sensors.

mm, . kg Table

A D : . G : . G

MEMS

Digital-

nG Nominal kHz . Hz

nGpeak Hz Digital-

MEMS

SF- SF-

. G dB MEMS

MEMS

MEMS

Colibrys

SF-

MS

Fig.

MS

Fig. MEMS

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MEMS

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Page 6: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Table . Basic specification of the recording system employed with digital-output type MEMS accelerometer sensor.

Fig. . Configuration of earthquake observation system employed with analog-output type

MEMS accelerometer sensor.

Fig. . Outlook of earthquake observation system employed with digital-output type MEMS accelerometer sensor.

MS

Fig. MEMS

MEMS

MEMS

,

1

2

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3

, .

Page 7: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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257

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Fig. . Configuration of earthquake observation system employed with digital-output type

MEMS accelerometer sensor.

Fig. . Comparison of observed waveforms of impulsive seismic source by analog-output type and digital-output

type MEMS accelerometer sensors. Right-hand side shows figures of spectrum comparison (top), amplitude ratio

(middle), phase di erence (bottom).

Fig. MEMS

X Y

Z

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Page 8: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Fig. . Observed waveform of vibrator sweep seismic source by analog-output type MEMS accelerometer

sensor. Sweep frequency : Hz, Sweep length : sec., Taper length : . sec.

Fig. . Observed waveform of vibrator sweep seismic source by digital-output type MEMS accelerometer

sensor. Sweep frequency : Hz, Sweep length : sec., Taper length : . sec.

MEMS

MS

Hz Hz

Fig.

MEMS

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Page 9: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Fig. . Waveform of ground noise observed late at night by analog-output type MEMS accelerometer sensor.

Fig. . Amplitude spectrum of ground noise observed

late at night by analog-output type MEMS accelero-

meter sensor.

X

Y Z

Hz

Fig.

MEMS

Grms Fig.

X

Y Z

RMS

MEMS Grms

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Page 10: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Fig. . Amplitude spectrum of ground noise observed

late at night by digital-output type MEMS accelero-

meter sensor.

MEMS

Fig. MZ-

km

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Page 11: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Fig. . Location map of the dense seismic array observation in Mizusawa district,

northern Honshu, Japan. Small square dots show the observation stations.

A B B

MEMS . km . . km

:

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………

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JGI AMS- C……… Type-A Local Earthquake

: Colibrys MEMS Si-Flex L km

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Page 12: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Type-C Teleseismic Wave Fig. Type-A

. MEMS . Hz

MEMS

Fig. km

Type-A

Fig. Type-B

. . Hz

MEMS

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Page 13: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Fig. . Example of observed earthquake (Type-A). After applying band-pass filter : . . Hz.

Fig. . Comparison of amplitude spectrum for horizontal component of Digital-MEMS and . Hz geophone

sensor (Lennarz LE- D). Time integration was applied to the observed record of Digital MEMS.

Hz

Table Type-A, Type-B, Type-

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Page 14: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Fig. . Example of observed earthquake (Type-B). After applying band-pass filter : . . Hz.

Fig. . Example of observed earthquake (Type-B). After applying band-pass filter : . . Hz.

,+ * *+ / *

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Page 15: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Fig. . Example of observed earthquake (Type-C). After applying band-pass filter : . . Hz

Table . Combination of various profiling method. Table shows profiling methods, which

employ controlled seismic source and natural earthquake data, and corresponding resultant

subsurface profile and related seismic sensors.

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Hz

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Page 16: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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(Received January , )

(Accepted March , )Gibson, J., Burnett, R., Ronen, S. and Watt, H., , MEMS

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