MS482MaterialsCharacterization(재료분석)

ByunghaShin(신병하)Dept.ofMSE,KAIST

1

2016FallSemester

CourseInformation

TeachingStaffProf.Byungha Shin(Teacher)byungha@kaist.ac.kr,X3315,W1-1#3404officehours:16:00– 17:30onTue andThursorbyappointment

Mr.Seong Ryul Pae (TeachingAssistant)sungruls@kaist.ac.kr,X3355,W1-1#2432

MeetingtimeandplaceTime:1:00– 2:15onTuesandThursLocation:E11CreativeLearningBldg (창의학습관) #102

TextbookThereisnodedicatedtextbookinthiscourse.Lecturenotesandrelevantreadingmaterials(mostlyselectedchaptersfromreferenceslistedinthenextslide)willbeusedinstead.

CourseInformation

CourseInformationReferences(noneedtobuyanyofthese)Brundle, Evans,andWilson,“Encyclopediaofmaterialscharacterization” General

referenceCzanderna (Ed.), “Methodsofsurfaceanalysis”in“MethodsandPhenomenaVol.1”

XPS,AES,SIMS

Carlson,“PhotoelectronandAugerSpectroscopy” XPS,AESMueller,“SpectrochemicalAnalysisbyX-rayFluorescence” XRFHeide,“Secondary IonMassSpectrometry” SIMSFeldmanandMayer,“Fundamentals ofSurface andThinFilmAnalysis” XPS,RBS,SIMSChu,Mayer,andNicolet,“Backscattering Spectrometry” RBSCullity,“ElementsofX-rayDiffraction” XRDGuinier, “X-rayDiffractioninCrystals,ImperfectCrystals,andAmorphousBodies”

XRD

Bowen,“HighResolutionX-rayDiffractometry andTopography” XRD,XRRGoldstein,Newbury,Echlin,Joy,Lyman,Lifshin,Sawyer,andMichael,“Scanning ElectronMicroscopyandX-rayMicroanalysis”

SEM,EDS

WilliamsandCarter,“TransmissionElectronMicroscopy” TEM,EDSMeyer,Hug,andBennewitz,“Scanning ProbeMicroscopy” AFM,STM

GradingMid-termexam 40%(400pts)Finalexam 60%(600pts)Bonuspointsforclassparticipation +α

ExamDatesandTimeMid-termexam:10/25(Tues),1:00pm– 4:00pm*Finalexam:12/20(Tues),1:00pm– 4:00pm**Extratimewillbegiventothosewhowantit.

CoverageofExamExamsareopen-bookandopen-note,butnointernet.Mid-termexam:materialscoveredinallthelecturesbeforetheexamFinalexam:alllecturematerialsJ

Grading

CourseInformationSyllabus1. Overviewofvariouscharacterizationtechniques (1lecture)2. Chemicalanalysistechniques (8lectures)

2.1. X-rayPhotoelectronSpectroscopy(XPS)2.2. UltravioletPhotoelectronSpectroscopy(UPS)2.3. AugerElectronSpectroscopy(AES)2.4. X-rayFluorescence(XRF)

3. Ionbeambasedtechniques (4lecture)3.1. RutherfordBackscatteringSpectrometry(RBS)3.2. SecondaryIonMassSpectrometry(SIMS)

4. Diffractionandimagingtechniques (7lectures)4.1. Basicdiffractiontheory4.2. X-rayDiffraction(XRD)&X-rayReflectometry(XRR)4.3. ScanningElectronMicroscopy(SEM)&

EnergyDispersiveX-raySpectroscopy(EDS)4.4. TransmissionElectronMicroscopy(TEM)

5. Scanningprobetechniques (1lecture)5.1. ScanningTunnelingMicroscopy(STM)5.2. AtomicForceMicroscopy(AFM)

6. Summary:Examplesofrealmaterialscharacterization (1lecture)*CharacterizationtechniquesinblueareavailableatKARA(KAISTanalysiscenterlocatedinW8-1)

CourseInformation

• Noclasson:9/15 (Thurs):Chu-seok9/20(Tue)&9/22(Thurs):E-MRS9/27(Tue)&9/29(Thurs):JointWorkshopKAIST-MSE&Masdar

InstituteatUAE10/20(Thurs)&10/25(Tues):Mid-termexamperiod11/3(Tues):AsiaCommunicationsandPhotonicsConference12/15(Thurs)&12/20(Tues):Finalexamperiod

• Withnomake-upclass,therearetotal22lectureswhenwecanmeet.• Twomake-upclassesbyrunningsixregularlectureslonger(25moremins).

• 9/6,9/8,9/13,10/4,10/6,10/11:12:35pm– 2:15pm insteadof1:00pm– 2:15pm.

CourseSchedule

CourseInformationClassParticipation

TakenfrompresentationslidesofProf.EricMazuratHarvardUniversity

CourseInformationOverviewofCharacterizationTechniques

©CopyrightEvansAnalyticalGroup®

AWordAboutVacuum

Mostofthetechniquesthatwillbediscusseduseachargedparticle(ionorelectron)aseitherthesignalgeneratororthedetectedsignal.Virtuallyallofthesemeasurementsmustbeperformedinhigh(10-5 – 10-8 Torr)orultrahigh(<10-9 Torr)vacuumenvironments.

– requirealongmeanfreepathforthechargedparticletoeitherreachthesampleorforthesignalfromthesampletoreachadetector

– sensitivefilamentsanddetectorscannotbeexposedtooxygen

– desiretokeepsurfaceclean

CourseInformationOverviewofCharacterizationTechniques

©CopyrightEvansAnalyticalGroup®

DepthofAnalysis

CourseInformationEAGBubbleChart

©CopyrightEvansAnalyticalGroup®

Symbol Name Meters Examplem Meter 1 ~1 Human stridecm Centimeter 10-2 Diameter of a dimemm Millimeter 10-3 Credit card thicknessµm Micrometer

(microns)10-6 Diameter of human hair

is ~50-100µmnm Nanometer 10-9 ~ 3 atoms Å Ångstrom 10-10 = C-H bond length

mil 1/1000th inch 2.5x10-5 = 25.4µmµ” Micro-inch 2.5x10-8 = 25.4nm or 254Å

Note:1nm=10Å,1µm=10,000Å

Units:Length

Symbol Name Definitionat% Atom % Percentage of sample atoms consisting of

element “X”at/cm3 Atoms/cm3 Number of element “X” atoms per unit of

volume (atomic density)at/cm2 Atoms/cm2

(Areal Density)Total integrated number of element “X” atoms in a specific volume

ppm(a) Parts per million (atomic)

Number of element “X” atoms per million atoms of sample

wt% Weight % Percentage of sample material weight consisting of element “X”

ppm(w) Parts per million (weight)

Weight of element “X” atoms per millionth of sample weight

g/cm3 Grams/cm3

(Density)Weight of element “X” material per unit of volume

Units:RelativeContent

Concentration vs. Areal Density vs. Density

Areal Density Atoms/area 6 at/cm2

Concentration Atoms/volume 6 at/cm3

1 cmformat examples

Density Mass/volume Si: 2.33 g/cm3

Dopant: 90 ng/cm3

Units:RelativeContent

Dose = Concentration × Depth[at/cm2] [at/cm3] [cm]

Total Concentration: 44 at/cm3

Total Dose at 0-1.0 cm depth44 at/cm2

Dose at 0 - 0.33 cm depth24 at/cm2

Dose at 0.33 - 0.66 cm depth 12 at/cm2

Dose at 0.66 - 1.0 cm depth8 at/cm2

Definition:Dose

• Lecture notes will be given to you via email and handouts will be given in class.

• Make sure email address that you put on KAIST portal is the one you are actually using.

• Those who would like to audit, email me.• Remember first six lectures will start at

12:35 pm, not 1:00pm.

Announcement