nano sensors

7/30/2019 Nano Sensors

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Nano SensorsNano Sensors

EE 530EE 530 Dr. KhanDr. Khan

Patrice Allen, Spoorthi Appireddy,Patrice Allen, Spoorthi Appireddy, NarmadhaNarmadha Mylsamy,Mylsamy,Ramakanth Tatipaka, Izhar Saeed, Vani YatharlaRamakanth Tatipaka, Izhar Saeed, Vani Yatharla


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Significance of Nano SensorsSignificance of Nano Sensors Endless PossibilitiesEndless Possibilities

Designing sensors at the atomicDesigning sensors at the atomic

level produce new materials withlevel produce new materials withnew properties, like surface &new properties, like surface &quantum effects, that are beneficialquantum effects, that are beneficial

to the operation of the sensorto the operation of the sensor

www.sensornetworks.net.au/nano.html


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Significance of Nano SensorsSignificance of Nano Sensors

zz Nano Sensors will revolutionize theNano Sensors will revolutionize the

measurements of extremely smallmeasurements of extremely smalldisplacements and extremely weak forcesdisplacements and extremely weak forcesat the molecular scale.at the molecular scale.

http://physicsweb.org/articles/world/14/2/8


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Significance of Nano SensorsSignificance of Nano Sensors

zz Nano Sensors can now be built withNano Sensors can now be built with

masses of a fewmasses of a few attogramsattograms (10^(10^ --18 g) and18 g) andwith cross sections of about 10 nm.with cross sections of about 10 nm.



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Challenges of Nano SensorsChallenges of Nano Sensors

zz These very small sensors are veryThese very small sensors are very

sensitive and prone to degradationsensitive and prone to degradationfrom effects of foreign substances,from effects of foreign substances,

and extreme temperaturesand extreme temperatures

zz Integration software is not fullyIntegration software is not fullydevelopeddeveloped

www.sensornetworks.net.au/nano.html

http://nanoscale.ornl.gov/projects/sensors.html


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ApplicationsApplications

-- Department ofDepartment ofDefenseDefense

-- Data StorageData Storage-- SafetySafety

-- Space TechnologySpace Technology

-- CommunicationCommunication-- TransportationTransportation

-- SecuritySecurity-- Medical ResearchMedical Research


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zz Motion Sensors to Deploy AirbagsMotion Sensors to Deploy Airbags



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Nano SensorsNano Sensors

Nanotechnology sensor marketNanotechnology sensor market

predicted global revenues :predicted global revenues :

zz$2.8 billion in 2008$2.8 billion in 2008

zz

$17.2 billion in 2012$17.2 billion in 2012

http://www.techweb.com/wire/networking/55300270


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8/9/20058/9/2005 1313

RF MEMSRF MEMS

IzharIzhar


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Topics of DiscussionTopics of Discussion

zz IntroductionIntroduction

zz FabricationFabricationzz Core Components of RF MEMSCore Components of RF MEMS

TechnologyTechnologyzzApplicationsApplications


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RF MEMS MarketRF MEMS Market


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Bulk MicromachiningBulk Micromachining

zz Bulk micromachining definesBulk micromachining defines

structures by selectively etchingstructures by selectively etchinginside a substrate.inside a substrate.

zz This type of etching is inexpensiveThis type of etching is inexpensive

and is generally used in early andand is generally used in early andlowlow--budget research.budget research.


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Bulk MicromachiningBulk Micromachining


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SurfaceSurface

MicromachiningMicromachiningzz Surface micromachining is based on theSurface micromachining is based on the

deposition and etching of differentdeposition and etching of differentstructural layers.structural layers.

zz The success is based on the ability toThe success is based on the ability torelease/dissolve the sacrificial layers whilerelease/dissolve the sacrificial layers whilepreserving the integrity of the structuralpreserving the integrity of the structuralLayers.Layers.


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Surface MicromachiningSurface Micromachining

zz Surface micromachining starts with aSurface micromachining starts with a

silicon wafer or other substrate and growssilicon wafer or other substrate and growslayers on toplayers on top

zz Layers are selectively etched byLayers are selectively etched byphotolithography and either a wet etchphotolithography and either a wet etchinvolving an acid or a dry etch involving ainvolving an acid or a dry etch involving aionized gas, or plasmaionized gas, or plasma


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LIGALIGAzz LIGA is German AcronymLIGA is German Acronym

zz Three words LI , G , AThree words LI , G , Azz LI means lithography (xLI means lithography (x--ray)ray)

zz G means electrodepositionG means electrodepositionzzA means moldingA means molding


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LIGALIGA


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8/9/20058/9/2005 2727

Main componentsMain components

zz RF/IF band filtersRF/IF band filters

zz RF voltage controlled oscillatorsRF voltage controlled oscillatorszz Quartz crystal oscillatorsQuartz crystal oscillators

zz Solid state switchesSolid state switches


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Radio ArchitectureRadio Architecture

zz


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Core Components Affecting RF MEMSCore Components Affecting RF MEMS

FunctionalityFunctionality

zz MEMS variable CapacitorsMEMS variable Capacitors

zz Micromachined InductorsMicromachined Inductors

zz MEMS SwitchesMEMS Switches

zz MEMS ResonatorsMEMS Resonators


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MEMS VariableMEMS Variable

CapacitorsCapacitorszz

Critical for Low noise VCOs, AntennaCritical for Low noise VCOs, Antennatunning, tunnable matching networkstunning, tunnable matching networks

zz On chip silicon PN junction and MOSOn chip silicon PN junction and MOSbased variable capacitors had lowbased variable capacitors had low

quality factor, limited tunning rangequality factor, limited tunning range

zz MEMS technology demonstratedMEMS technology demonstrated

monolithic variable capacitors,monolithic variable capacitors,achieving Stringent performanceachieving Stringent performance


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8/9/20058/9/2005 3131

Variable CapacitorVariable Capacitor


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Micromachined InductorsMicromachined Inductors

zz Key components for making low noiseKey components for making low noise

oscillators and low loss matching networksoscillators and low loss matching networks

zz Micromachining technology enabled lessMicromachining technology enabled lessloss of currentloss of current

zz High Q factor and high selfHigh Q factor and high self--resonantresonantfrequencyfrequency


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Inductor figureInductor figure

zz Copper is selectedCopper is selected

as the interconnectas the interconnectmetalmetal

zz

Consists of 4 turn 5Consists of 4 turn 5um Cu tracesum Cu traces650um/500um area650um/500um area

zz 14nH inductance14nH inductancewith Q of 16 at 1with Q of 16 at 1GHzGHz


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MEMS SwitchesMEMS Switches

zz Key components for switching betweenKey components for switching between

receiver and transmitter signal pathsreceiver and transmitter signal paths

zz Critical for building phase shifters, tunableCritical for building phase shifters, tunableantennas, and filtersantennas, and filters

zz MEMS switches have two categoriesMEMS switches have two categories


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Categories of SwitchesCategories of Switcheszz CapacitiveCapacitive

zz MetalMetal--toto--metalmetal


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Capacitive switchCapacitive switch

zz Consists ofConsists of

conductiveconductivemembrane mademembrane made

of aluminumof aluminumzz Suspended aboveSuspended above

a coplanara coplanar

electrode by airelectrode by airgap of few umgap of few um


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Capacitive switchCapacitive switch


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MetalMetal--toto--Metal SwitchMetal Switch

zz For large bandwidthFor large bandwidth

signals including DCsignals including DCzz Consists of cantileverConsists of cantilever

beambeam

zz Actuation voltage ofActuation voltage of30V30V

zz Response time 20usResponse time 20uszz Mechanical strength toMechanical strength to

withstand 10^9withstand 10^9

actuationsactuations

Summary of RF MEMSSummary of RF MEMS


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Summary of RF MEMSSummary of RF MEMS


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zz Cell phonesCell phones

zz Cordless phonesCordless phoneszz Wireless data networksWireless data networks

zz Sensor networksSensor networkszz Two way pagingTwo way paging

zz Global positioning systemsGlobal positioning systemszz SatellitesSatellites


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Optical NanosensorsOptical Nanosensors

zOptical nanosensors have been designedto utilize the sensitivity of fluorescencefor making quantitative measurements in

the intracellular environment.zDevices used are small enough to be

inserted into living cells with a minimumof physical perturbation.


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Optical fiber based sensorsOptical fiber based sensors


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Advantages Over Fluorescent dyesAdvantages Over Fluorescent dyes

z protection of the sensing component frominterfering species within the intracellular

environment andz protection of the intracellular environment

from any toxic effects of the sensing

component.


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FabricationFabricationFabrication of Nanotips (600m 50 nm)

Silver Coating(100-200 nm)

Silanization of Fiber nanotips (GOPS)

Activation of Fiber nanotips (CDI)

Protein Binding (e.g., mouse IgG for BaP)


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Optical NanosensorsOptical Nanosensors -- PEBBLEsPEBBLEs

zz PEBBLE stands for Probe Encapsulated By

Biologically Localized Embedding.z It is composed of a polymer matrix

incorporated with fluorescent indicator dyes.

z These have been developed for several

analytes, including calcium, pH, potassium and

oxygen.

z These show good reversibility and are

biocompatible.


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Features of PEBBLEFeatures of PEBBLE

zz Small nanometer sized sensors.Small nanometer sized sensors.

zz

Polymeric matrix containing combination ofPolymeric matrix containing combination ofindicator dyes, reference dyes and catalysts.indicator dyes, reference dyes and catalysts.

zz Enable intraEnable intra--cellular biological measurements tocellular biological measurements to

be made.be made.zz Can be inserted into cells without causingCan be inserted into cells without causing

mortality.mortality.

zz Allow use of dyes normally toxic to cells.Allow use of dyes normally toxic to cells.

zz Fast response time.Fast response time.


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Further WorkFurther Work

Nanosensor developmentNanosensor development

Extend range of analytes that can be detected Extend range of analytes that can be detected Develop generic methods for applying Develop generic methods for applyingnanosensorsnanosensors to cell systemsto cell systems

Improve delivery techniques Improve delivery techniques Targeted delivery of sensors using surface Targeted delivery of sensors using surface

functionalityfunctionality

Bi Bi--functional nanofunctional nano--devicesdevices Real Real--time, multitime, multi--analyte quantification andanalyte quantification and

imaging in a single living cellimaging in a single living cell


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Optical Nanosensor Applications

z Diagnosis and monitoring of diseases.

z Environmental detection of pollutants and biological agents.

z Useful for quantitative measurements in intracellular

environment.

z Optical sensors provide useful tools for remote in situ

monitoring.

z Optical nanosensors increase the ability of investigators toprobe .

z Image and quantify NO levels present in Parkinsons disease.

z

Measure Zinc production and localization in brain tissue.z Use nano-devices to induce and measure the chemical signals of

apoptosis.

z Study early-embryo development.


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BIOMEDICAL SENSORSBIOMEDICAL SENSORS

By:By:

RAMAKANTH TATIPAKARAMAKANTH TATIPAKA


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CONTENTSCONTENTS

zz INTRODUCTIONINTRODUCTION

zz SENSOR TECHNOLOGIESSENSOR TECHNOLOGIESzz FABRICATION TECHNIQUESFABRICATION TECHNIQUES

zzAPPLICATIONSAPPLICATIONSzz FUTURE TRENDSFUTURE TRENDS

zz CHALLENGESCHALLENGES


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INTRODUCTIONINTRODUCTION

zz A biosensor is a device that detects, records, andA biosensor is a device that detects, records, andtransmits information regarding a physiological changetransmits information regarding a physiological change

or the presence of various chemical or biologicalor the presence of various chemical or biologicalmaterials in the environment.materials in the environment.zz More technically, a biosensor is a probe that integratesMore technically, a biosensor is a probe that integrates

a biological component, such as a whole bacterium or aa biological component, such as a whole bacterium or a

biological product (e.g., an enzyme or antibody) with anbiological product (e.g., an enzyme or antibody) with anelectronic component to yield a measurable signal.electronic component to yield a measurable signal.zz Biosensors, which come in a large variety of sizes andBiosensors, which come in a large variety of sizes and

shapes, are used to monitor changes in environmentalshapes, are used to monitor changes in environmental

conditions. They can detect and measure concentrationsconditions. They can detect and measure concentrationsof specific bacteria or hazardous chemicals; they canof specific bacteria or hazardous chemicals; they canmeasure acidity levels (pH). In short, biosensors can usemeasure acidity levels (pH). In short, biosensors can usebacteria and detect them, too.bacteria and detect them, too.


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What is a biomedical sensor?What is a biomedical sensor?

zz A biomedical sensor often engages a bioA biomedical sensor often engages a bio--recognition process, which involves the analyterecognition process, which involves the analyteor the substrate. The results of this bioor the substrate. The results of this bio--recognition will have to be transmitted to therecognition will have to be transmitted to theexternal world for the quantification of theexternal world for the quantification of the

analyte or the substrate. The transductionanalyte or the substrate. The transductionmechanism often involves a chemical sensingmechanism often involves a chemical sensingelement, and the signal output can be a colorelement, and the signal output can be a color

change, an optical or electrical signal, potential,change, an optical or electrical signal, potential,current or others.current or others.

zz example: Enzymatic based sensorexample: Enzymatic based sensor


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SENSOR TECHNOLOGIESSENSOR TECHNOLOGIES

zz Electrochemical sensorsElectrochemical sensors

zz MOS material based sensorsMOS material based sensorszz Schottky diode based sensorsSchottky diode based sensors

zz Calorimetric sensorsCalorimetric sensorszz Quartz crystal microQuartz crystal micro--balance (QCM)balance (QCM)

based sensorsbased sensorszz Optical fiber technologyOptical fiber technology


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FABRICATION TECHNIQUESFABRICATION TECHNIQUES

zz SiliconSilicon--based microfabrication andbased microfabrication andmicromachining processing have been usedmicromachining processing have been used

extensively in the production of microelectronicextensively in the production of microelectronicand MEMS (microand MEMS (micro--electroelectro--mechanical system)mechanical system)devices.devices.

zz

These fabrication techniques can be used toThese fabrication techniques can be used toproduce geometrically wellproduce geometrically well--defined, highlydefined, highlyreproducible structures at modest cost.reproducible structures at modest cost.

zz

Furthermore, these processes can be applied toFurthermore, these processes can be applied tometals, semiconductive and insulation materialsmetals, semiconductive and insulation materialsproviding an excellent means to produce desiredproviding an excellent means to produce desiredsensing elements.sensing elements.

PROCESSES IN THEPROCESSES IN THE


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MICROFABRICATION ANDMICROFABRICATION ANDMICROMACHININGMICROMACHINING

TECHNIQUESTECHNIQUES

zz Lithographic reduction and maskLithographic reduction and mask

fabricationfabricationzz Formation of oxide layerFormation of oxide layer

zz

Thick and thin film metallizationThick and thin film metallizationzz PhotoPhoto--resist patterningresist patterning

zz Wet chemical and dry reactive ion etchingWet chemical and dry reactive ion etching


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1 This Medical telesensor can1 This Medical telesensor can


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1.This Medical telesensor can1.This Medical telesensor can

measure & transmit bodymeasure & transmit bodytemperature wirelesslytemperature wirelessly

2 Mi til2 Microcantile er sensor can


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2. Microcantilever sensor can2. Microcantilever sensor can

detect physical, chemical, ordetect physical, chemical, orbiological activitybiological activity

3. Optical biopsy sensor: New laser3. Optical biopsy sensor: New laser


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3. Optical biopsy sensor: New laser3. Optical biopsy sensor: New laser

technique for nonsurgicallytechnique for nonsurgicallydetermining whether tumors in thedetermining whether tumors in the

esophagus are cancerous oresophagus are cancerous orbenignbenign

4 Bioreporters: "critters on a chip"4 Bioreporters: "critters on a chip"


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4. Bioreporters: "critters on a chip"4. Bioreporters: critters on a chip

in which bioluminescent bacteriain which bioluminescent bacteriasignal the presence of pollutants.signal the presence of pollutants.


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5. The infrared microspectrometer5. The infrared microspectrometer

can be used for blood chemistrycan be used for blood chemistryanalysis, gasoline octane analysis,analysis, gasoline octane analysis,

environmental monitoring, industrialenvironmental monitoring, industrialprocess control, aircraft corrosionprocess control, aircraft corrosion

monitoring, and detection ofmonitoring, and detection ofchemical warfare agentschemical warfare agents

6. surface6. surface--enhanced Raman geneenhanced Raman gene


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gg(SERG) probes used in medicine,(SERG) probes used in medicine,

forensics, agriculture, andforensics, agriculture, and

environmental bioremediation.environmental bioremediation.

7. Anthropometry: technique using7. Anthropometry: technique using


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opo e y ec que us gp y q g

laser beams and mirrors canlaser beams and mirrors candetermine the shapes of humandetermine the shapes of human

body parts.body parts.


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FUTURE TRENDSFUTURE TRENDS

zz The whole health care chain, from doctorsThe whole health care chain, from doctors

office, hospital to recreation servicesoffice, hospital to recreation servicese.g.home based care / monitoring ofe.g.home based care / monitoring ofpatients with chronic diseases. Emergencypatients with chronic diseases. Emergency

medicine / monitoring of injured and acutemedicine / monitoring of injured and acuteill patient is also part of the chain.ill patient is also part of the chain.

zz Biodefence / monitoring humans for theBiodefence / monitoring humans for thepresence of toxic agentspresence of toxic agents


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Thermal SensorsThermal Sensors

byby

Manjula Vani YatharlaManjula Vani Yatharla

J00296753J00296753


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INTRODUCTIONINTRODUCTION

zz In many physical phenomena heat isIn many physical phenomena heat is

exchanged. This goes together with heatexchanged. This goes together with heatfluxes and changes of temperature.fluxes and changes of temperature.

zz Thermal sensors serve to measure those twoThermal sensors serve to measure those two

quantities. When applied in the appropriate way,quantities. When applied in the appropriate way,not only heat flux and temperature but also anot only heat flux and temperature but also anumber of other quantities can be measured, fornumber of other quantities can be measured, for

example radiation and the flow of liquids andexample radiation and the flow of liquids andgasses.gasses.


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CharacteristicsCharacteristics

zz

Extreme stabilityExtreme stability

zz No moving partsNo moving parts

zz Large dynamic rangeLarge dynamic range

zz Little or no energy consumptionLittle or no energy consumption


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Thermal Sensor TechnologyThermal Sensor Technology

zz In thermal sensors an input physical or chemicalIn thermal sensors an input physical or chemicalsignal creates or changes a temperaturesignal creates or changes a temperature

gradient in a functional structure.gradient in a functional structure.

zz This gradient or its change can be detected byThis gradient or its change can be detected byapplying an appropriate physical effect, e.g., theapplying an appropriate physical effect, e.g., the

Seebeck effect, the thermoresistive effect or theSeebeck effect, the thermoresistive effect or the

pyroelectric effect, converting the temperaturepyroelectric effect, converting the temperaturechange into an output electrical signal.change into an output electrical signal.

E l f i hi d h lE l f i hi d th l


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zz Examples for micromachined thermal sensorsExamples for micromachined thermal sensors

are radiation sensors (thermopiles, bolometers,are radiation sensors (thermopiles, bolometers,and pyroelectric sensors), microcalorimeters,and pyroelectric sensors), microcalorimeters,humidity sensors, vacuum and flow sensors ashumidity sensors, vacuum and flow sensors aswell as thermal converters.well as thermal converters.

zz As microsensors these devices are of small sizeAs microsensors these devices are of small sizeand their manufacture is based principally on theand their manufacture is based principally on theconcepts of microsystem technologies, e.g.,concepts of microsystem technologies, e.g.,

silicon microstructuring technology, thin filmsilicon microstructuring technology, thin filmdeposition methods, packaging anddeposition methods, packaging andinterconnection technologies as well asinterconnection technologies as well asmonolithic or hybrid integration of electronicmonolithic or hybrid integration of electronic

signal processing. Moreover the small size of asignal processing. Moreover the small size of amicromachined sensor encourages the creationmicromachined sensor encourages the creationof sensor arrays, i.e., oneof sensor arrays, i.e., one--dimensional (linear) ordimensional (linear) or

twotwo--dimensional (matrix) arrangements of adimensional (matrix) arrangements of anumber of individual sensors.number of individual sensors.


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FabricationFabrication


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FabricationFabrication

zz The principle of a thermal infrared sensor isThe principle of a thermal infrared sensor isshown below. A tiny thin plate (i.e., platelet) isshown below. A tiny thin plate (i.e., platelet) is

made on a silicon wafer in a silicon foundry by amade on a silicon wafer in a silicon foundry by amicromicro--machining process. The platelet ismachining process. The platelet is

typically 50 m (microns) square by 0.5 m thick.typically 50 m (microns) square by 0.5 m thick.

Even smaller sizes are under development.Even smaller sizes are under development.Long thin support legs and a vacuumLong thin support legs and a vacuumenvironment thermally isolates it from theenvironment thermally isolates it from the

substrate. Small thermal radiation from thesubstrate. Small thermal radiation from thetarget focused onto the platelet heats it. Thetarget focused onto the platelet heats it. Thehigher the target temperature, the greater thehigher the target temperature, the greater the

focused radiation is and therefore the higher thefocused radiation is and therefore the higher theplatelet temperature.platelet temperature.


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zz Heat fluxHeat flux

** Heat flux through walls, roofs and floors ofHeat flux through walls, roofs and floors ofbuildings for efficient use of energy.buildings for efficient use of energy.

** Heat flux through soil for applications inHeat flux through soil for applications inagriculture and analysis of crop growthagriculture and analysis of crop growth

conditions.conditions.

** Heat flux from living beings to their surroundingsHeat flux from living beings to their surroundingsfor medical studies.for medical studies.


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zz RadiationRadiation

** Solar radiation for optimal control of solarSolar radiation for optimal control of solarcollectors.collectors.

** Heat radiation of ovens for optimization ofHeat radiation of ovens for optimization of

process conditions.process conditions.** Laser power measurement.Laser power measurement.


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Applications of Thermal Sensors in different fieldsApplications of Thermal Sensors in different fields


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Applications of Thermal Sensors in different fieldsApplications of Thermal Sensors in different fields

Steel and Metals ApplicationsSteel and Metals Applications

zz The Steel Industry was one of the first to useThe Steel Industry was one of the first to usetemperature sensors for automatic processtemperature sensors for automatic processcontrol and QA measurements.control and QA measurements.

zz The extent of temperature sensor use in steelThe extent of temperature sensor use in steelmills and process plants is quite large.mills and process plants is quite large.

zz Virtually all kinds are used, ranging from liquidVirtually all kinds are used, ranging from liquid--inin--glass thermometers in the testing and QA labsglass thermometers in the testing and QA labsto networked infrared lineto networked infrared line--measuring sensorsmeasuring sensors

called "line scanners" and computercalled "line scanners" and computer--linkedlinkedthermal imaging versions of areathermal imaging versions of area--measuringmeasuringinfrared thermometers for detecting slag on theinfrared thermometers for detecting slag on thestream of liquid steel poured from a meltingstream of liquid steel poured from a melting

vessel into a transfer ladle.vessel into a transfer ladle.


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Environmental Temperatures around theEnvironmental Temperatures around thePlanetPlanet

zz

The world and the various environmental factorsThe world and the various environmental factorsthat exist are regularly probed, prodded,that exist are regularly probed, prodded,surveyed and reported on in terms of weathersurveyed and reported on in terms of weather

reports, global warming (or cooling) phenomenareports, global warming (or cooling) phenomenaand more.and more.

zz The sea surface temperature (SST) is monitoredThe sea surface temperature (SST) is monitored

from satellites and ships at sea. Land andfrom satellites and ships at sea. Land andatmosphere temperatures are similarly reportedatmosphere temperatures are similarly reportedand recorded. It seems to be an extensive use ofand recorded. It seems to be an extensive use oftemperature sensors of all types (satellites, usetemperature sensors of all types (satellites, usenonnon--contact sensor to read the earth surface).contact sensor to read the earth surface).


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Medical Temperature Sensors and TheirMedical Temperature Sensors and TheirUsesUses

zz The fever thermometer is still in abundant supplyThe fever thermometer is still in abundant supply

and still the second most frequent test usedand still the second most frequent test used(after a hand on the forehead) to indicate the(after a hand on the forehead) to indicate thepresence of an infection in the human body bypresence of an infection in the human body by

noting an elevation in body temperature.noting an elevation in body temperature.zz Human and animal body temperatures are soHuman and animal body temperatures are so

important to the well being of warm bloodedimportant to the well being of warm blooded

animals, that the nominal body temperatureanimals, that the nominal body temperatureindicated by a fever thermometer or similarindicated by a fever thermometer or similardevice, is used as one of the vital signs routinelydevice, is used as one of the vital signs routinely

monitored as an indicator of a state of a person'smonitored as an indicator of a state of a person'sor animal's health.or animal's health.


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Infrared Radiation Thermometer ApplicationsInfrared Radiation Thermometer ApplicationsRepositoryRepository

zz

Infrared radiation thermometers measureInfrared radiation thermometers measure

temperature without contact. The object beingtemperature without contact. The object being

measured essentially broadcasts informationmeasured essentially broadcasts information

about its temperature all the time. The physicsabout its temperature all the time. The physicsbehind that broadcasting is called Planck's Lawbehind that broadcasting is called Planck's Lawof Thermal Radiation. Some thermal imagersof Thermal Radiation. Some thermal imagers

also measure temperature and, despite the factalso measure temperature and, despite the factthat they measure temperature in the same waythat they measure temperature in the same way

as spot radiation thermometers.as spot radiation thermometers.


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Special Sensors for Cryogenic TemperaturesSpecial Sensors for Cryogenic Temperatures

zz Many of the more commonly used temperatureMany of the more commonly used temperaturesensors are also used for work at cryogenicsensors are also used for work at cryogenictemperatures, e.g. most thermocouples,temperatures, e.g. most thermocouples,

platinumplatinum RTDsRTDs, silicon diodes and special, silicon diodes and specialthermistorsthermistors. However, in the very low reaches of. However, in the very low reaches ofthe temperature scales, there are some uniquethe temperature scales, there are some unique

measurements made.measurements made.zz Not only are they all very cold, but there areNot only are they all very cold, but there are

situations when the temperature sensor issituations when the temperature sensor isimmersed in a strong magnetic field and/or aimmersed in a strong magnetic field and/or aradioradio--frequency field. This gives rise to a needfrequency field. This gives rise to a neednot only for sensors that can measure at very,not only for sensors that can measure at very,very low temperatures, but also sensors that arevery low temperatures, but also sensors that are

not affected by the presence of a magnetic fieldnot affected by the presence of a magnetic fieldor a radioor a radio--frequency electromagnetic fieldfrequency electromagnetic field


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Food Temperature Sensors and Their UsesFood Temperature Sensors and Their Uses

zz

The temperature of food plays a big role inThe temperature of food plays a big role inassuring that certain products are well enoughassuring that certain products are well enough

cooked to kill harmful organisms like bacteria.cooked to kill harmful organisms like bacteria.

Similarly, many foods, including cooked food,Similarly, many foods, including cooked food,become breeding grounds for other harmfulbecome breeding grounds for other harmfulorganisms iforganisms ifunrefrigeratedunrefrigerated too long or even iftoo long or even if

left in a refrigerated environment for too long aleft in a refrigerated environment for too long atime.time.

DevelopmentsDevelopments


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DevelopmentsDevelopments

zz Silicon micromachined infrared (IR) thermopileSilicon micromachined infrared (IR) thermopilesensors have expanding opportunities in a wide range ofsensors have expanding opportunities in a wide range of

applications, such as consumer (e.g., ear thermometers,applications, such as consumer (e.g., ear thermometers,hair dryers, microwave ovens, air conditioners),hair dryers, microwave ovens, air conditioners),automotive (e.g., climate control, windshield deautomotive (e.g., climate control, windshield de--icing andicing andantianti--condensation systems, presence and positioncondensation systems, presence and position

detection, air quality control/CO2 monitoring), anddetection, air quality control/CO2 monitoring), andinfraredinfrared--based gas detection.based gas detection.

zz Silicon micromachined thermopiles are comprised ofSilicon micromachined thermopiles are comprised of

numerous thermocouples, and generate a voltagenumerous thermocouples, and generate a voltageproportional to the object's incident infrared radiationproportional to the object's incident infrared radiationpower. Since every object emits IR radiation, which is apower. Since every object emits IR radiation, which is astrict function of its temperature, one can deduce thestrict function of its temperature, one can deduce the

object's temperature from the thermopile's signal.object's temperature from the thermopile's signal.


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zz

The penetration of silicon micromachinedThe penetration of silicon micromachinedthermopiles and other IR thermal sensors (e.g.,thermopiles and other IR thermal sensors (e.g.,pyroelectric detectors) into highpyroelectric detectors) into high--volume, lowvolume, low--

cost applications (e.g., consumer or automotive)cost applications (e.g., consumer or automotive)has been spearheaded by the availability of lesshas been spearheaded by the availability of lessexpensive optics, made of plastic molded mirrorsexpensive optics, made of plastic molded mirrorsor micromachined lenses.or micromachined lenses.

zz Moreover, silicon micromachined thermopileMoreover, silicon micromachined thermopiletechnology is welltechnology is well--suited for highsuited for high--volume, lowvolume, low--

cost applications. Siliconcost applications. Silicon--based thermopiles arebased thermopiles arefabricated via CMOS processes, which canfabricated via CMOS processes, which canachieve low cost by using microelectronics batchachieve low cost by using microelectronics batchfabrication techniques.fabrication techniques.


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zz Thermopile sensors can sense static IR radiationThermopile sensors can sense static IR radiationand, therefore, can make static temperatureand, therefore, can make static temperature

measurements without requiring a mechanicalmeasurements without requiring a mechanicalchopper.chopper.

zz Compared to photonic detectors (which useCompared to photonic detectors (which use

semiconductors, and are based on a change insemiconductors, and are based on a change inelectrical conductivity induced by incident IRelectrical conductivity induced by incident IRradiation), thermopiles purportedly offer nearlyradiation), thermopiles purportedly offer nearly

constant sensitivity and specific detectivity overconstant sensitivity and specific detectivity overIR spectrum, which makes the thermopile aIR spectrum, which makes the thermopile a

highly suitable detector for IR gas absorptionhighly suitable detector for IR gas absorptioninstruments.instruments.

ConclusionConclusion


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ConclusionConclusion

zz Thermal sensors are very much useful inThermal sensors are very much useful in

many industries because of the necessitymany industries because of the necessityof the temperature measurement.of the temperature measurement.

zz This is still a developing field and we haveThis is still a developing field and we haveto explore a lot of things in thermalto explore a lot of things in thermalnanosensorsnanosensors..

Nano Motion SensorsNano Motion Sensors


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Nano Motion SensorsNano Motion Sensors

zz IntroductionIntroduction

zz

Devices used to detectDevices used to detect nanoscalenanoscale motion andmotion andposition displacementposition displacement

zz Typical DevicesTypical Devices

zzAccelerometersAccelerometers detects change in acceleration indetects change in acceleration inx, y, and z planesx, y, and z planes

zz GyrosGyros detects changes in pitch and yawdetects changes in pitch and yaw

Interferometric AccelerometerInterferometric Accelerometer


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Interferometric AccelerometerInterferometric Accelerometer

Optical interferenceOptical interferencetransducertransducer

Interdigital fingers attachedInterdigital fingers attachedto mass and supportto mass and support

substrate are illuminatedsubstrate are illuminated

MeasuresMeasures nanoscalenanoscale

displacement by measuringdisplacement by measuringintensity of diffracted lightintensity of diffracted light

Motion SensorsMotion Sensors FabricationFabrication


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Motion SensorsMotion Sensors -- FabricationFabrication

zz Thermal oxide grown andThermal oxide grown and

patterned with 1patterned with 1 m of resistm of resistand plasma etched on deviceand plasma etched on devicelayer sidelayer side

zz Device layer silicon is deepDevice layer silicon is deepreactive ion etched (DRIE) toreactive ion etched (DRIE) toBuried oxide layerBuried oxide layer

This defines the fingers, springsThis defines the fingers, springsand massand mass

http://www.media.mit.edu/nanoscale/pubs/JMEMS%20accel.pdf

Motion SensorsMotion Sensors FabricationFabrication


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zz Resist is stripped and waferResist is stripped and wafer

is spun with 20is spun with 20 m of polyimidem of polyimide

on device layer side then curedon device layer side then curedat 350at 350 C for 30 minutesC for 30 minutes

zz Backside of wafer patternedBackside of wafer patternedwith 10with 10 m of resist, then exposedm of resist, then exposed

oxide is removed in buffered oxideoxide is removed in buffered oxide

etchant (BOE), then exposedetchant (BOE), then exposedhandle layer is etched down tohandle layer is etched down to

the oxide layer to define the massthe oxide layer to define the mass


Motion SensorsMotion Sensors - FabricationFabrication


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zz Backside thermal oxideBackside thermal oxide

and exposed buried oxideand exposed buried oxideremovedremoved

zz Polyimide etched away inPolyimide etched away in

oxygen plasmaoxygen plasma


Motion SensorsMotion Sensors - ApplicationsApplications


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Motion SensorsMotion Sensors --ApplicationsApplications

zz Naval Research LaboratoryNaval Research Laboratory

zz Fiber Optic Interferometric AccelerometersFiber Optic Interferometric Accelerometers

zz Detection Limit: 5Detection Limit: 5--300300 nanonano--ggzz Low sensitivity to electromagnetic interferenceLow sensitivity to electromagnetic interference

zz Used for navigation, exploration, and monitoringUsed for navigation, exploration, and monitoring

http://www.nrl.navy.mil/techtransfer/fs.php?fs_id=S1

Motion SensorsMotion Sensors -- ApplicationsApplications


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Motion SensorsMotion Sensors --ApplicationsApplications

zz ColibrysColibrys

zz SiSi -- FlexFlexAccelerometerAccelerometerzz UsesUses

zz Detecting seismic reflectionsDetecting seismic reflections

in oil and gas explorationsin oil and gas explorations

zz Military surveillanceMilitary surveillance

zz

Mapping and recordingMapping and recordingearthquakesearthquakes

http://www.appliedmems.cc/htmlmems/p_si_flex.html

The Future of Motion Nano SensorsThe Future of Motion Nano Sensors


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zz Future efforts are being focused onFuture efforts are being focused onpackaging thepackaging the interferometricinterferometricaccelerometer within a volume of less thanaccelerometer within a volume of less than10 cm10 cm..

http://www.media.mit.edu/nanoscale/research/accelerometer.html



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The Future of Motion Nano SensorsThe Future of Motion Nano Sensorszz CRADA with Lockheed MartinCRADA with Lockheed Martin

zz Micro accelerometer with 3 translation, 3Micro accelerometer with 3 translation, 3

rotational measurement axesrotational measurement axeszz Uses high aspect ratio electroplated copperUses high aspect ratio electroplated copper

coils to levitate permanent magnets attachedcoils to levitate permanent magnets attached

to a cubical proof massto a cubical proof mass

http://www.inst.bnl.gov/MicroFabricationLab/Overview.html


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ConclusionsConclusions


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ConclusionsConclusions

zz Due to technological constraints,Due to technological constraints,

microscale sensors can no longer bemicroscale sensors can no longer beminiaturized in their same form.miniaturized in their same form.

zz New technologies are being developed toNew technologies are being developed toexploit the quantum effects present inexploit the quantum effects present innanotechnology.nanotechnology.

zz Nanosensors will continued to be exploredNanosensors will continued to be exploredfor these reasons.for these reasons.

Motion SensorsMotion Sensors -- ReferencesReferences


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Motion SensorsMotion Sensors ReferencesReferences

zz [1][1] Loh, Nin C., Manalis, Scott R., Schmidt, Martin A. SubLoh, Nin C., Manalis, Scott R., Schmidt, Martin A. Sub--10 cm10 cmInterferometric Accelerometer with NanoInterferometric Accelerometer with Nano--g Resolution.g Resolution. Journal ofJournal ofMicroelectromechanical SystemsMicroelectromechanical Systems, Vol. 11, No. 3. June 2002, Vol. 11, No. 3. June 2002

zz 2]2] http://www.appliedmems.cc/htmlmems/p_si_flex.htmlhttp://www.appliedmems.cc/htmlmems/p_si_flex.html , Applied, AppliedMEMS, Inc.MEMS, Inc.zz [3][3] http://www.chenyanghttp://www.chenyang--ism.com/CapaSensorPosi.htmism.com/CapaSensorPosi.htm,,

Capacitive Sensors for Noncontact Position and DisplacementCapacitive Sensors for Noncontact Position and DisplacementMeasurements and NanoMeasurements and Nano--Positioning. ChenYangPositioning. ChenYang -- Sensors,Sensors,Magnetics, and Measurements ISM.Magnetics, and Measurements ISM.

zz [4][4] http://www.inst.bnl.gov/MicroFabricationLab/Overview.htmlhttp://www.inst.bnl.gov/MicroFabricationLab/Overview.html ,,Brookhaven National Laboratory, Instrumentation Division.Brookhaven National Laboratory, Instrumentation Division.

zz [5][5]

http://www.media.mit.edu/nanoscale/research/accelerometer.htmlhttp://www.media.mit.edu/nanoscale/research/accelerometer.html ,,MIT Media Laboratory, Nanoscale Sensing.MIT Media Laboratory, Nanoscale Sensing.zz [6][6] http://http://www.nrl.navy.mil/techtransfer/fs.php?fs_idwww.nrl.navy.mil/techtransfer/fs.php?fs_id=S13=S13 , Naval, Naval

Research Laboratory, Selected TechnologiesResearch Laboratory, Selected Technologies

RF MEMS ReferencesRF MEMS References


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RF MEMS ReferencesRF MEMS References

zz Randy J. R, Hector J. D MEMS for RF/MicrowaveRandy J. R, Hector J. D MEMS for RF/MicrowaveWireless Applications: The next Wave, MicrowaveWireless Applications: The next Wave, Microwave

Journal, 2001.Journal, 2001.zz RF MEMS Markets,RF MEMS Markets, www.threewww.three--fives.comfives.com

zz Siebe B, Mark D S, Gerold S, MecroSiebe B, Mark D S, Gerold S, MecroElectromechanical Systems Move towardsElectromechanical Systems Move towardsStandardization, Coventor Inc.Standardization, Coventor Inc.

zz Randy J.R, Hector J S, MEMS FOR RF/MICROWAVERandy J.R, Hector J S, MEMS FOR RF/MICROWAVEWIRELESS APPLICATIONS: THE NEXT WAVE,WIRELESS APPLICATIONS: THE NEXT WAVE,

Coventor Inc.Coventor Inc.zz http://www.allaboutmems.com/memsapplicationshttp://www.allaboutmems.com/memsapplications--

wireless.htmlwireless.html

Optical SensorsOptical Sensors -- ReferencesReferences


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Optical SensorsOptical Sensors ReferencesReferences

zz 1.Optical Nanosensors: Tools for Intra1.Optical Nanosensors: Tools for Intra--cellularcellularAnalysisAnalysis

zz By Dr. Jonathan AylottBy Dr. Jonathan Aylott

zz 2. Advanced Biophotonics Biophotonics Sensors2. Advanced Biophotonics Biophotonics Sensors

Sensors for Environmental and BiomedicalSensors for Environmental and BiomedicalApplications for Environmental andApplications for Environmental and

Biomedical ApplicationsBiomedical Applications

zz http://asia.stanford.edu/events/Spring04/slides/yhttp://asia.stanford.edu/events/Spring04/slides/yanSlides.pdfanSlides.pdf

Biomedical SensorsBiomedical Sensors -- ReferencesReferences


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Biomedical SensorsBiomedical Sensors ReferencesReferences

zz 1. http://www.ginerinc.com/biological_sensors.htm1. http://www.ginerinc.com/biological_sensors.htm

zz 2.http://www.ornl.gov/~webworks/cppr/y2001/pres/2.http://www.ornl.gov/~webworks/cppr/y2001/pres/11977.pdf11977.pdf

zz 3. http://www.chipsbooks.com/sensbiom.htm3. http://www.chipsbooks.com/sensbiom.htm

zz

4.4. http://newslab.cs.wayne.edu/mobicomhttp://newslab.cs.wayne.edu/mobicom--cameracamera--ready.pdfready.pdf

zz 5.http://www.ornl.gov/info/ornlreview/rev29_3/text/5.http://www.ornl.gov/info/ornlreview/rev29_3/text/

biosens.htmbiosens.htmzz 6.http://www.transducers05.org/Short_Courses/6.http://www.transducers05.org/Short_Courses/

course1 htmlcourse1 html

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