high temperature gradient micro-sensors for flow ... · integration of 12 mems sensors in a flap...

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High temperature gradient micro-sensors for flow separation control Cecile GHOUILA-HOURI a,b Romain VIARD c , Quentin GALLAS b , Eric GARNIER b , Alain MERLEN a,b , Abdelkrim TALBI a , Philippe PERNOD a a Univ. Lille, CNRS, Centrale Lille, Univ. Valenciennes, ISEN, UMR 8520 - IEMN, LIA LICS/LEMAC, F-59000 Lille, France b ONERA, Chemin de la Hunière 91123 Palaiseau, France c Fluiditech, Thurmelec, 68840 Pulversheim, France

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Page 1: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

High temperature gradient micro-sensors for flow separation control

Cecile GHOUILA-HOURIa,b

Romain VIARD c, Quentin GALLAS b, Eric GARNIER b, Alain MERLENa,b, Abdelkrim TALBIa, Philippe PERNOD a

aUniv. Lille, CNRS, Centrale Lille, Univ. Valenciennes, ISEN, UMR 8520 - IEMN, LIA LICS/LEMAC, F-59000 Lille, FrancebONERA, Chemin de la Hunière 91123 Palaiseau, France

cFluiditech, Thurmelec, 68840 Pulversheim, France

Page 2: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Flow separation control

2

• Adverse pressure gradient

• Sharp edges geometry

Flow separation

• Re-attaching a separated flow

• Avoiding / Delayingseparation

Flow separation control

• Real-time adaptation

• Energy saving

Closed loop

Gad-el-Hak

Journal of Aircraft 38 [2001]

Page 3: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Wall shear stress sensors

3

Need for:

• Time-average values: global state of the flow

• Time-resolved values: unsteady structures in the flow

• Direction of the wall shear-stress vector

Several technologies have been developed

• Floating-element sensors

• Optical sensors, micro-fences

• Thermal sensors (hot-film sensors)

J.J. Miau et al.

Sensors and

Actuators A: Physical

[2015]

T. Von Papen et al.

Sensors and

Actuators A: Physical

[2004]

Chandrasekharan et

al.

Journal of MEMS

[2011]

Page 4: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Thermal sensors

4

Hot-films are commonly used in aerodynamics

Calorimetric sensors:

• Another type of thermal sensor

• Use for mass-flow measurement

• Applications for medical domain, home-

appliance,…

Löfdahl and Gad-el-Hak

Meas. Sci. Technol.10 [1999]

Advantages

• Commercially available (Dantec Glue-on-Probe)

• Easy to implement at the wall

• Commercially available electronics

Well known disadvantages

• Insensitive to flow direction

• Substrate effects impact the dynamic response

Kuo et al

Micromachines [2012]

Page 5: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Outline

I. Design of the wall shear stress micro-sensors

II. Calibration in flat plate

III. Flow separation detection on a step-like obstacle

IV. Preliminary results on active flow control on a flap model

V. Preliminary results on a pressure thermal micro-sensor

VI. Conclusion & Perspectives

5

Page 6: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Design of the wall shear stress micro-sensors

I. Design of the wall shear stress micro-sensors

II. Calibration in flat plate

III. Flow separation detection on a step-like obstacle

IV. Preliminary results on active flow control on a flap model

V. Preliminary results on a pressure thermal micro-sensor

VI. Conclusion & Perspectives

6

Page 7: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Design of the wall shear stress micro-sensors

7

• Calorimetric wall shear stress sensor

• Metallic wires: 1 mm x 3 µm x 730 nm (central)/330 nm (lateral)

• Periodic SiO2 micro-bridges for mechanical support

• Uncoupled heater and measurement wires

• Patent by IEMN LICS/LEMAC

R. Viard, A. Talbi, P. Pernod, A. Merlen, and V. Preobrazhensky, “MiniaturisedSensor Comprising A Heating Element, AndAssociated Production Method,” 2013. FR2977886 (A1) 2013-01-18 WO2013008203 (A2) 2013-01-17 WO2013008203 (A3)2013-03-07 CN103717526 (A) 2014-04-09 EP2731908 (A2)2014-05-21 US2014157887 (A1) 2014-06-12 EP2731908 (B1)2015-09-09 DK2731908 (T3) 2015-12-21.

Page 8: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Micro-fabrication of the sensors

8

4mm30µm

• TCR: 2380 ppm/°C

• Elevation of temperature: 9°C/mW

Electrical and thermal characteristics

Flexible packagingApplied Physics Letters,

DOI 10.1063/1.4972402

[2016]

Page 9: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Calibration in flat plate

I. Design of the wall shear stress micro-sensors

II. Calibration in flat plate

III. Flow separation detection on a step-like obstacle

IV. Preliminary results on active flow control on a flap model

V. Preliminary results on a pressure thermal micro-sensor

VI. Conclusion & Perspectives

9

Page 10: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Wind tunnel

Wind tunnel characteristics• 30 cm x 30 cm test section

• Flow velocity up to 40 m/s

Page 11: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Wall shear stress evaluation

• Relation of Coles-Fernholz:

– 𝐶𝑓 = 2 ∙1

𝑘∙ ln 𝑅𝑒𝜃 + 𝐶

−2

– 𝑘 = 0.384

– 𝐶 = 4.127

– 𝑅𝑒𝜃 = Τ(𝜃 ∙ 𝑈∞) 𝜈

• Wall shear stress and skin friction coefficient

– 𝜏 =1

2∙ 𝜌 ∙ 𝑈∞

2 ∙ 𝐶𝑓

• Hot-wire probe measurements from 0.3 mm to 35 mm to provide the velocityprofile in the boundary layer and the experimental momentum thickness ϴ

11

Page 12: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Calibration on a flat plate

2 modes of operation: constant current and constant temperature modes

Calibration curves fitting 4th order polynomial

Sensibility to the flow direction

12

C. Ghouila-Houri et al. Applied Physics Letters, DOI 10.1063/1.4972402 [2016] & Sensors and Actuators A DOI10.1016/j.sna.2017.09.030 [2017]

Page 13: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Flow separation detection on a step-like obstacle

I. Design of the wall shear stress micro-sensors

II. Calibration in flat plate

III. Flow separation detection on a step-like obstacle

IV. Preliminary results on active flow control on a flap model

V. Preliminary results on a pressure thermal micro-sensor

VI. Conclusion & Perspectives

13

Page 14: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Flow separation due to sharp edges geometry

Experiment setup

• Obstacles of different heights• 38 mm

• 19 mm

14

Sensor location in the

recirculation region

Page 15: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Flow separation detection

15

MEMS response

Deduced wall

shear stress

variations

C. Ghouila-Houri et al.

Sensors and Actuators A

DOI10.1016/j.sna.2017.09.030

[2017]

Page 16: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Flow separation detection

16

• Obstacle 38 mm x 38 mm

• Varying distance between the sensor and the obstacle

• Upstream flow velocity: 25 m/s

• ReH = 61.103

H 𝑥

Small eddy near

the obstacle

Separation length

Reattachment

Reattached flow

Work in progress…

Page 17: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Preliminary results on active flow control on a flap model

I. Design of the wall shear stress micro-sensors

II. Calibration in flat plate

III. Flow separation detection on a step-like obstacle

IV. Preliminary results on active flow control on a flap model

V. Preliminary results on a pressure thermal micro-sensor

VI. Conclusion & Perspectives

17

Page 18: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Integration of the sensors in a flap model

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12 micro-sensors integrated in the flapmodel

L1 wind tunnel in ONERA Lille (2.40 m of test section diameter)

Miniaturized electronics

Flow control with pulsed jets (Festo MHE2)

Work in progress…

Page 19: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

First results of active flow control

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Sensor near the leading edge

Control by Festo actuators MHE2 (20 g/s;

60 Hz for pulsed mode)

Efficiency to re-attach a separated flow

Separated flow

Attached flow

Thèse T. Charbert, ONERA

Thèse T. Charbert, ONERA

Page 20: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Preliminary results on a pressure thermal micro-sensor

I. Design of the wall shear stress micro-sensors

II. Calibration in flat plate

III. Flow separation detection on a step-like obstacle

IV. Preliminary results on active flow control on a flap model

V. Preliminary results on a pressure thermal micro-sensor

VI. Conclusion & Perspectives

20

Page 21: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Preliminary results on a pressure thermal micro-sensor

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Pressure sensing based on Pirani effect, exploiting the pressure-dependent thermal conductivity of a gas at the molecular range

Dimensions Wires: 1 mm x 3 µm x 730 nm Bridges: 20 µm x 2 µm x 500 nm

Cavity reduced to 170 nm for maximum sensitivity at atmospheric pressure

C. Ghouila-Houri et al

Applied Physics Letters, vol. 111, issue 12 [2017]

Page 22: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Conclusion & Perspectives

I. Design of the wall shear stress micro-sensors

II. Calibration in flat plate

III. Flow separation detection on a step-like obstacle

IV. Preliminary results on active flow control on a flap model

V. Preliminary results on a pressure thermal micro-sensor

VI. Conclusion & Perspectives

22

Page 23: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Conclusion & Perspectives

Wall shear stress MEMS sensor designed for flow control

Fabrication using micro-machining techniques

High temperature gradient for low power

Low-cost mass production

Wind tunnel experiments

Wall shear stress static calibrations in CC and CT modes

Detection of flow separation due to a step-like obstacle

Integration of 12 MEMS sensors in a flap model and 1st results of active flow control

Introduction of a thermal based pressure sensor

Pirani principle

Maximum of sensitivity at atmospheric pressure

Perspectives

Improvement of the CT electronics

Dynamical calibration of the micro-sensors (wall shear stress and pressure)

Integration of a micro-sensor inside a synthetic jet slot

Closed-loop active flow separation control using the micro-sensors

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Page 24: High temperature gradient micro-sensors for flow ... · Integration of 12 MEMS sensors in a flap model and 1st results of active flow control Introduction of a thermal based pressure

Acknowledgments

Thank you for your attention !

Questions ?

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Partners:

French National Research Agency (ANR) in the frame of the ANR ASTRID “CAMELOTT” project for financial support

ELSAT 2020 – CONTRAERO

RENATECH the French national nanofabrication network