sju蒸鍍機講義 2003
TRANSCRIPT
-
(E-GUN EVAPORATION)
-
2
||||
-
3|()
|(Physical Vapor DepositionPVD)
-
4|
-
5|
|
|
1~10-3 torr 10-3 ~10-7 torr 10-7 torr
-
6
-
7-
-
8-
-
9-
-
10
-
-
11
-CV-6S
-
12
-
-
13
-|
|1350
-
14
-|2
1.
2.
-
15
-|
1.
2.
-
16
-|
|
-
17
-||10-6torrMAIN PUMPING READY
1.
2.
-
18
-|
-
19
-|
|
-
20
-|KEYON
1. 3.2.
-
21
-
|Start7.3%
-
22
-|Shutter
|
-
23
-|Shutter
|
|
|
-
24
-|PUMPINGHVCP
1.
2.
3.
-
25
!!