E116

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□60mm

□65mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□40mm

□25mm

Ball Guide

XZ axis Stages

XZ axis Steel Extended Contact Slide Stages TSD-254 Stage size □25mm

TSD-404 Stage size □40mm

These stages are combinations of ball bearing slide guide X axis stages and lat Z axis stages.

Guide

Attention

▶Vacuum-compatible stainless steel stages (TSDS-254/404) are also

available. E206

▶The structure does not allow upside down installation since the

spring inside the stage might not be able to withstand the load and

may stretch.

▶Since the structure uses the principle of leverage, the feed rate

luctuates against the scale depending on the travel (about ±0.02mm for micrometer head 0.5mm/rotation).

Speciications

Part NumberMETRIC TSD-254C TSD-254S TSD-404C TSD-404S

INCH − − TSD-404CUU TSD-404SUU

(Opposite Model)METRIC − TSD-254SR − TSD-404SR

INCH − − − TSD-404SRUU

Table Size [mm] 25×25 25×25 40×40 40×40

Axes of Travel XZ axis

Micrometer Position Center Side Center Side

Travel [mm] X axis ±3 Z axis ±3 X axis ±3 Z axis ±3 X axis ±6.5 Z axis ±3 X axis ±6.5 Z axis ±3

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Extended contact ball guide

Primary Material Steel

Finish Super black chrome + Black matte

Load Capacity [N] 29.4 (3.0kgf) 29.4 (3.0kgf) 88.3 (9.0kgf) 88.3 (9.0kgf)

Travel Accuracy Straightness [μm] 5 5 2.5 2.5

Max. Moment Capacity

Pitch [N・m] 1.0 1.0 3.9 3.9

Roll [N・m] 1.0 1.0 3.9 3.9

Moment StiffnessPitch [″/N・cm] 8.95 8.95 2.14 2.14

Roll [″/N・cm] 8.75 8.75 2.04 2.04

Parallelism [μm] 110 110 110 110

Options FP FP FP FP

Weight [kg] 0.17 0.17 0.45 0.45

Option for □40mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw AdjustersX axis: FPSA-62540

0.25 − E008Z axis: FPSA-42525

Option for □25mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-42525 0.25 − E008

* Please add an option code as the part number sufix to specify various optional speciications.* The load capacity of the FP type is 39.2N (4.0kgf). (□40mm)* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

E117WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□60mm

□65mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□40mm

□25mm

Ball Guide

XZ axis Stages

W7058

W7059

CatalogCode

CatalogCode

Outline Drawing

Hexagonal socket head cap screw M2×4…4 screwsTSD-254C

Hexagonal socket head cap screw M2×4…4 screwsTSD-254S Hexagonal socket head cap screw M2×4…4 screwsTSD-254SR

Hexagonal socket head cap screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)TSD-404C/404CUU

Hexagonal socket head cap screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)

TSD-404S/404SUUHexagonal socket head cap screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)

TSD-404SR/404SRUU

10

121.

5

36±

3 2425

1010

MA

X38

(7)

3.5

20

9.5

19

20

MAX41

10

25

φ4 counterbore4-φ2.4 mounting hole

7-M2 depth 4

Z axis clamp

X axis clamp

1.5

(7)

36±

3 2412

MA

X38

25

1010

3.5

20

7

19

20

25

10 10

MAX49

φ4 counterbore4-φ2.4 mounting hole

7-M2 depth 4

X axis clamp

Z axis clamp

20

2510 10

20

MAX497-M2 depth 4

19

(7)

1010

25M

AX

38

7

36±

32412

1.5

4-φ2.4 mounting holeφ4 counterbore

(3)

X axis clamp

Z axis clamp

(9.5

)

26

3450

±3

4-φD mounting hole

10.5B

161.

5

φE counterbore

MAX66

40A

MA

X32 7-C depth 5

40A

2

A

A

B

X axis clamp

Z axis clamp

26

MA

X32

φE counterbore

9

4-φD mounting hole

7-C depth 5

34

50±

3

B

161.

5

40

AA

2

(9.5

)

A40

A

B

X axis clamp

Z axis clamp

MAX34

26

B

40AA

2

B

X axis clamp

(9.5

)A

A

40M

AX

32

7-C depth 5

φE counterbore4-φD mounting hole

Z axis clamp

50±

33416

1.5

MAX74

Part NumberA

(mm)B

(mm)C

D(mm)

E(mm)

TSD-404S 16 32 M3 3.5 6

TSD-404SUU 15.875 31.75 6-32UNC 4 6.5

Part NumberA

(mm)B

(mm)C

D(mm)

E(mm)

TSD-404SR 16 32 M3 3.5 6

TSD-404SRUU 15.875 31.75 6-32UNC 4 6.5

Part NumberA

(mm)B

(mm)C

D(mm)

E(mm)

TSD-404C 16 32 M3 3.5 6

TSD-404CUU 15.875 31.75 6-32UNC 4 6.5

E118

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□65mm

□60mm

Ball Guide

XZ axis Stages

XZ axis Steel Extended Contact Slide Stages TSD-604 Stage size □60mm

TSD-654 Stage size □65mm

These stages are combinations of ball bearing slide guide X axis stages and lat Z axis stages.

Speciications

Part NumberMETRIC TSD-604C TSD-604S TSD-654C-M6 TSD-654S-M6

INCH − − TSD-654CUU TSD-654SUU

(Opposite Model)METRIC − TSD-604SR − TSD-654SR-M6

INCH − − − TSD-654SRUU

Table Size [mm] 60×60 60×60 65×65 65×65

Axes of Travel XZ axis

Micrometer Position Center Side Center Side

Travel [mm] X axis ±6.5 Z axis ±5 X axis ±6.5 Z axis ±5 X axis ±6.5 Z axis ±5 X axis ±6.5 Z axis ±5

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Extended contact ball guide

Primary Material Steel

Finish Super black chrome + Black matte

Load Capacity [N] 147 (15.0kgf) 147 (15.0kgf) 147 (15.0kgf) 147 (15.0kgf)

Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5

Max. Moment Capacity

Pitch [N・m] 6.9 6.9 6.9 6.9

Roll [N・m] 6.9 6.9 6.9 6.9

Moment StiffnessPitch [″/N・cm] 0.73 0.73 0.73 0.73

Roll [″/N・cm] 0.64 0.64 0.64 0.64

Parallelism [μm] 110 110 110 110

Options FP FP FP FP

Weight [kg] 1.5 1.5 1.7 1.7

Option

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008

* Please add an option code as the part number sufix to specify various optional speciications.* The load capacity of the FP type is 39.2N (4.0kgf).* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

Guide

Attention

▶Vacuum-compatible stainless steel stages (TSDS-604/654) are also

available. E206

▶The structure does not allow upside down installation since the

spring inside the stage might not be able to withstand the load and

may stretch.

▶Since the structure uses the principle of leverage, the feed rate

luctuates against the scale depending on the travel (about ±0.02mm for micrometer head 0.5mm/rotation).

E119WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□65mm

□60mm

Ball Guide

XZ axis Stages

W7060

W7137

CatalogCode

CatalogCode

Outline Drawing

Hexagonal socket head cap screw M4×6…4 screwsTSD-604C

Hexagonal socket head cap screw M4×6…4 screwsTSD-604S Hexagonal socket head cap screw M4×6…4 screwsTSD-604SR

Hexagonal socket head cap screw M6×6…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)TSD-654C-M6/654CUU

Hexagonal socket head cap screw M6×6…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)

TSD-654S-M6/654SUUHexagonal socket head cap screw M6×6…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)

TSD-654SR-M6/654SRUU

1.5 50

73±

5 5518

MA

X44

(11)

6025

2532

10.5

MAX6625

3225

60

33

50

4-φ4.5 mounting holeφ8 counterbore

4-M3 depth 6

M16 P1 depth 6

7-M4 depth 6 X axis clamp

Z axis clamp

181.

5 50

5525

2573

±5

MA

X44

(11)

60

MAX88

10.5

32

32

25 2560

33

50

φ8 counterbore4-φ4.5 mounting hole

4-M3 depth 6

M16 P1 depth 67-M4 depth 6 X axis clamp

Z axis clamp

6025

3225

33

50

50

10.5

4-φ4.5 mounting holeφ8 counterbore

73±

55518

1.5

MAX88

MA

X44

60

3225

25(1

1)

M16 P1 depth 64-M3 depth 6

7-M4 depth 6

X axis clamp

Z axis clamp

A65

MA

X41

Z axis clamp

A657-C depth 6

A

A

12

MAX69

B

φD counterbore4-φ7 mounting hole

2055

1.5

75±

5

B

35

X axis clamp

(11)

Z axis clamp

A65

7-C depth 6 A

B

B

35

X axis clamp

MAX91

75±

55520

1.54-φ7 mounting hole

φD counterbore

A

65

A

MA

X41

(11)(5)

A65

MA

X41

Z axis clamp

A657-C depth 6

A

A

12.5

B

φD counterbore4-φ7 mounting hole

2055

1.5

75±

5

B

35

X axis clamp

MAX91

(11)

Part NumberA

(mm)B

(mm)C

D(mm)

TSD-654S-M6 25 50 M6 P1 11

TSD-654SUU 25.4 50.8 1/4-20UNC 12

Part NumberA

(mm)B

(mm)C

D(mm)

TSD-654SR-M6 25 50 M6 P1 11

TSD-654SRUU 25.4 50.8 1/4-20UNC 12

Part NumberA

(mm)B

(mm)C

D(mm)

TSD-654C-M6 25 50 M6 P1 11

TSD-654CUU 25.4 50.8 1/4-20UNC 12

E120

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□65mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□100mm

□80mm

Ball Guide

XZ axis Stages

XZ axis Steel Extended Contact Slide Stages TSD-804 Stage size □80mm

TSD-1004 Stage size □100mm

These stages are combinations of ball bearing slide guide X axis stages and lat Z axis stages.

SpeciicationsPart Number METRIC TSD-804C TSD-804S TSD-1004C TSD-1004S

(Opposite Model) METRIC − TSD-804SR − TSD-1004SR

Table Size [mm] 80×80 80×80 100×100 100×100

Axes of Travel XZ axis

Micrometer Position Center Side Center Side

Travel [mm] X axis ±12.5 Z axis ±5 X axis ±12.5 Z axis ±5 X axis ±12.5 Z axis ±10 X axis ±12.5 Z axis ±10

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Extended contact ball guide

Primary Material Steel

Finish Super black chrome + Black matte

Load Capacity [N] 147 (15.0kgf) 147 (15.0kgf) 245 (25.0kgf) 245 (25.0kgf)

Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5

Max. Moment Capacity

Pitch [N・m] 6.9 6.9 9.8 9.8

Roll [N・m] 6.9 6.9 9.8 9.8

Moment StiffnessPitch [″/N・cm] 0.61 0.61 0.42 0.42

Roll [″/N・cm] 0.57 0.57 0.39 0.39

Parallelism [μm] 110 110 130 130

Options FP FP FP FP

Weight [kg] 2.1 2.1 5.0 5.0

Attention

▶The structure does not allow upside down installation since the

spring inside the stage might not be able to withstand the load and

may stretch.

▶Since the structure uses the principle of leverage, the feed rate

luctuates against the scale depending on the travel (about ±0.02mm for micrometer head 0.5mm/rotation).

Option for □100mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62555 0.25 − E008

Option for □80mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw AdjustersX axis: FPSA-62550

0.25 − E008Z axis: FPSA-62540

* Please add an option code as the part number sufix to specify various optional speciications.* The load capacity of the FP type is 39.2N (4.0kgf).* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

E121WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□65mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□100mm

□80mm

Ball Guide

XZ axis Stages

W7061

W7062

CatalogCode

CatalogCode

Outline Drawing

Hexagonal socket head cap screw M4×8…4 screwsTSD-804C

Hexagonal socket head cap screw M4×8…4 screwsTSD-804S Hexagonal socket head cap screw M4×8…4 screwsTSD-804SR

Hexagonal socket head cap screw M4×8…4 screwsTSD-1004C

Hexagonal socket head cap screw M4×8…4 screwsTSD-1004S Hexagonal socket head cap screw M4×8…4 screwsTSD-1004SR

3 70

25

75±

5 5520

MA

X34

257080

(11)

12

MAX94

25257080

3570

4-M4 depth 6

4-φ4.5 mounting holeφ8 counterbore

M16 P1 depth 6

7-M4 depth 6

X axis clamp

Z axis clamp

35

3 70

2525

5520

75±

5M

AX

34(1

1)80 70

MAX122

12.5

7025 25

80

70

4-M4 depth 6

4-φ4.5 mounting holeφ8 counterbore

M16 P1 depth 6

7-M4 depth 6 X axis clamp

Z axis clamp

(11)

110±

1010

0M

AX

87

2.5

20

90

90

10.5

90 50

2525

30.5

90

90100 MAX109

φ8 counterbore4-φ4.5 mounting hole

6-M4 depth 8 M16 P1 depth 6

4-M4 depth 8X axis clamp

Z axis clamp

(11)

110±

1020

2.5

90

90

MAX149

MA

X87

100

90 50

2525

10.5

30.5

90

10090

4-φ4.5 mounting holeφ8 counterbore

M16 P1 depth 6

4-M4 depth 8

6-M4 depth 8

X axis clamp

Z axis clamp

8070

25 25

35

70

70

7-M4 depth 6M16 P1 depth 6

25

70 80(1

1)MA

X34

MAX122

4-M4 depth 6

25

12.5

φ8 counterbore4-φ4.5 mounting hole

55

75±

5

203

X axis clamp

Z axis clamp

25 25

90

10090

90

30.5

4-φ4.5 mounting hole

10.5

2.5

9011

0±10

20

φ8 counterbore

MAX149

100

MA

X87

50 90(1

1)

M16 P1 depth 6

6-M4 depth 8 4-M4 depth 8(6)

X axis clamp

Z axis clamp

E122

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□65mm

□80mm

□100mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□120mm

Ball Guide

XZ axis Stages

XZ axis Steel Extended Contact Slide Stages TSD-1204 Stage size □120mm

Speciications

Part NumberMETRIC TSD-1204C TSD-1204S TSD-1204C-M6 TSD-1204S-M6

INCH − − TSD-1204CUU TSD-1204SUU

(Opposite Model)METRIC − TSD-1204SR − TSD-1204SR-M6

INCH − − − TSD-1204SRUU

Table Size [mm] 120×120 120×120 120×120 120×120

Axes of Travel XZ axis

Micrometer Position Center Side Center Side

Travel [mm] X axis ±20 Z axis ±5 X axis ±20 Z axis ±5 X axis ±20 Z axis ±5 X axis ±20 Z axis ±5

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Extended contact ball guide

Primary Material Steel

Finish Super black chrome + Black matte

Load Capacity [N] 245 (25.0kgf) 245 (25.0kgf) 245 (25.0kgf) 245 (25.0kgf)

Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5

Max. Moment Capacity

Pitch [N・m] 9.8 9.8 9.8 9.8

Roll [N・m] 9.8 9.8 9.8 9.8

Moment StiffnessPitch [″/N・cm] 0.4 0.4 0.4 0.4

Roll [″/N・cm] 0.38 0.38 0.38 0.38

Parallelism [μm] 150 150 150 150

Weight [kg] 6.2 6.2 6.2 6.2

These stages are combinations of ball bearing slide guide X axis stages and lat Z axis stages.

Attention

▶The structure does not allow upside down installation since the

spring inside the stage might not be able to withstand the load and

may stretch.

▶Since the structure uses the principle of leverage, the feed rate

luctuates against the scale depending on the travel (about ±0.02mm for micrometer head 0.5mm/rotation).

E123WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□65mm

□80mm

□100mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□120mm

Ball Guide

XZ axis Stages

W7063CatalogCode

Outline Drawing

Hexagonal socket head cap screw M4×8…4 screwsTSD-1204C

Hexagonal socket head cap screw M4×8…4 screwsTSD-1204S Hexagonal socket head cap screw M4×8…4 screwsTSD-1204SR

Hexagonal socket head cap screw M6×8…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)TSD-1204C-M6/1204CUU

Hexagonal socket head cap screw M6×8…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)

TSD-1204S-M6/1204SUUHexagonal socket head cap screw M6×8…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)

TSD-1204SR-M6/1204SRUU

(11)

2525

100

112±

1022

3.5

9050

MA

X77

5012

0

50

12

32.510

0

12050 50

MAX147

4-φ4.5 mounting holeφ8 counterbore

M16 P1 depth 6

6-M4 depth 8

7-M4 depth 8

X axis clamp

Z axis clamp

(11)

11.3

MAX189

100

112±

10

3.5

2290

50M

AX

7750

50120

32.5

100

12050

25 2550

4-φ4.5 mounting holeφ8 counterbore

M16 P1 depth 6

7-M4 depth 86-M4 depth 8 X axis clamp

Z axis clamp

5050

2525

M16 P1 depth 6

6-M4 depth 8

50

507-M4 depth 8 50

120

MAX189

11.3

90

112±

10

22

MA

X77

Z axis clamp32.5

(11)

120

X axis clamp

100

3.5100

φ8 counterbore4-φ4.5 mounting hole

22 2

90M

AX

77

112±

10

120

A

22-C depth 8

(11)

4-φD mounting holeφE counterbore

120A

32.5

B

A A A

AA

A

Z axis clamp

X axis clamp

B

MAX147

12

222

90M

AX

7711

2±10

120

A

22-C depth 8

(11)

4-φD mounting holeφE counterbore

120A

32.5

B

A A A

AA

A

Z axis clamp

MAX189

X axis clamp

11.3

120A

32.5

A A A

Z axis clamp

X axis clamp

4-φD mounting holeφE counterbore

112±

109022

11.3

A

120

AA

(11)

A

MA

X77

22-C depth 8

B

B

2

MAX189

Part NumberA

(mm)B

(mm)C

D(mm)

E(mm)

TSD-1204S-M6 25 50 M6 P1 6.5 11

TSD-1204SUU 25.4 50.8 1/4-20UNC 7 12

Part NumberA

(mm)B

(mm)C

D(mm)

E(mm)

TSD-1204SR-M6 25 50 M6 P1 6.5 11

TSD-1204SRUU 25.4 50.8 1/4-20UNC 7 12

Part NumberA

(mm)B

(mm)C

D(mm)

E(mm)

TSD-1204C-M6 25 50 M6 P1 6.5 11

TSD-1204CUU 25.4 50.8 1/4-20UNC 7 12

E124

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□60mm

□65mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□40mm

□25mm

Ball Guide

XZ axis Stages

XZ axis Steel Extended Contact Slide Stages (Vertical) TSD-254L Stage size □25mm

TSD-404L Stage size □40mm

These stages are combinations of ball bearing slide guide X axis stages and lat Z axis stages.

Guide

▶Vacuum-compatible stainless steel stages (TSDS-254＊L/404＊L)

are also available. E208

Speciications

Part NumberMETRIC TSD-254CL TSD-254SL TSD-404CL TSD-404SL

INCH − − TSD-404CLUU TSD-404SLUU

(Opposite Model)METRIC − TSD-254SRL − TSD-404SRL

INCH − − − TSD-404SRLUU

Table Size [mm] 25×25 25×25 40×40 40×40

Axes of Travel XZ axis

Micrometer Position Center Side Center Side

Travel [mm] X axis ±3 Z axis ±3 X axis ±3 Z axis ±3 X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Extended contact ball guide

Primary Material Steel

Finish Super black chrome

Load Capacity [N] 14.7 (1.5kgf) 14.7 (1.5kgf) 49 (5.0kgf) 49 (5.0kgf)

Travel Accuracy Straightness [μm] 1 1 1.0 1.0

Max. Moment Capacity

Pitch [N・m] 2.2 2.2 5.0 5.0

Roll [N・m] 2.1 2.1 5.0 5.0

Moment Stiffness Pitch [″/N・cm] 5.1 5.1 0.9 0.9

Options FP FP FP FP

Weight [kg] 0.17 0.17 0.5 0.5

Option for □25mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-42525 0.25 − E008

Option for □40mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008

* Please add an option code as the part number sufix to specify various optional speciications.* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

E125WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□60mm

□65mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□40mm

□25mm

Ball Guide

XZ axis Stages

W7065

W7066

CatalogCode

CatalogCode

Outline Drawing

Hexagonal socket head cap screw M2×4…4 screwsTSD-254CL

Hexagonal socket head cap screw M2×4…4 screwsTSD-254SL Hexagonal socket head cap screw M2×4…4 screwsTSD-254SRL

Hexagonal socket head cap screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)TSD-404CL/404CLUU

Hexagonal socket head cap screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)

TSD-404SL/404SLUUHexagonal socket head cap screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)

TSD-404SRL/404SRLUU

9.5

1010

(7)127 2549

.5

37±

3

MAX41

20

25

1.5 20

73.2

20

1237

.525

M4 depth 4

φ4 counterbore4-φ2.4 mounting hole

6-M2 depth 4

X axis clamp

Z axis clamp

7

37±

3

MAX49

20

25

49.5

1.5

20

73.2

20

1010

7 12 1225

1237

.525

M4 depth 4

4-φ2.4 mounting holeφ4 counterbore

6-M2 depth 4

X axis clamp

Z axis clamp

(73.

2)

25

1010

M4 depth 420

6-M2 depth 4

20

25

201.5

φ4 counterbore4-φ2.4 mounting hole

7

37±

3

49.5

2512 12

MAX49

37.5

127

Z axis clamp

X axis clamp

0.5

51±

6.5 71

10.5

10.5

MAX66B40

(9.5)D depth 5

19.5 40

B

A

981.

5

A

5540

4-φE mounting hole

16

φF counterbore

8-C depth 5

AA

X axis clamp

Z axis clamp

10.5

9

7151

±6.

5

0.5

40B

55

40A

A

16

B 4-φE mounting holeφF counterbore

981.

5

A40

8-C depth 5A19.5 18

Z axis clamp

D depth 5

MAX34X axis clamp

10.5

7151

±6.

5

0.5

40B

55

40

AA

16

B 4-φE mounting holeφF counterbore

981.

5

A

40

8-C depth 5A

19.5 18

Z axis clamp

D depth 5

X axis clampMAX34

9

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

TSD-404SL 16 32 M3 M6 P1 3.5 6

TSD-404SLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

TSD-404CL 16 32 M3 M6 P1 3.5 6

TSD-404CLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

TSD-404SRL 16 32 M3 M6 P1 3.5 6

TSD-404SRLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5

E126

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□65mm

□60mm

Ball Guide

XZ axis Stages

XZ axis Steel Extended Contact Slide Stages (Vertical) TSD-604L Stage size □60mm

TSD-654L Stage size □65mm

Speciications

Part NumberMETRIC TSD-604CL TSD-604SL TSD-654CL-M6 TSD-654SL-M6

INCH − − TSD-654CLUU TSD-654SLUU

(Opposite Model)METRIC − TSD-604SRL − TSD-654SRL-M6

INCH − − − TSD-654SRLUU

Table Size [mm] 60×60 60×60 65×65 65×65

Axes of Travel XZ axis

Micrometer Position Center Side Center Side

Travel [mm] X axis ± 6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Extended contact ball guide

Primary Material Steel

Finish Super black chrome

Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)

Travel Accuracy Straightness [μm] 1 1 1 1

Max. Moment Capacity

Pitch [N・m] 8.0 8.0 8.0 8.0

Roll [N・m] 8.0 8.0 8.0 8.0

Moment Stiffness Pitch [″/N・cm] 0.45 0.45 0.45 0.45

Options FP FP FP FP

Weight [kg] 1.3 1.3 1.6 1.6

These stages are combinations of ball bearing slide guide X axis stages and lat Z axis stages.

Guide

▶Vacuum-compatible stainless steel stages (TSDS-604＊L/654＊L)

are also available. E208

Option

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008

* Please add an option code as the part number sufix to specify various optional speciications.* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

E127WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□65mm

□60mm

Ball Guide

XZ axis Stages

W7067

W7138

CatalogCode

CatalogCode

Outline Drawing

Hexagonal socket head cap screw M4×6…4 screwsTSD-604CL

Hexagonal socket head cap screw M4×6…4 screwsTSD-604SL Hexagonal socket head cap screw M4×6…4 screwsTSD-604SRL

Hexagonal socket head cap screw M6×6…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)TSD-654CL-M6/654CLUU

Hexagonal socket head cap screw M6×6…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)

TSD-654SL-M6/654SLUUHexagonal socket head cap screw M6×6…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)

TSD-654SRL-M6/654SRLUU

(11)

MAX66

10.5

114.

3

50

60

3.5

68±

6.5 98

1.5

50

12

32

20.8

25 25

60

25 8018

60

25

32φ8 counterbore

4-M3 depth 5

4-φ4.5 mounting hole

9-M4 depth 6

X axis clamp

Z axis clamp

60

50

MAX88

10.5

114.

3

9868

±6.

5

3.5

501.5

12

32

25

20.8

25

60

18

2525

32

8060

20.8

φ8 counterbore4-φ4.5 mounting hole

9-M4 depth 6

4-M3 depth 5

X axis clamp

Z axis clamp

60

114.

3

20.89-M4 depth 6

4-M3 depth 5322525

8060

2525

20.8

32

5060MAX88

68±

6.5

3.5

12

98

φ8 counterbore4-φ4.5 mounting hole501.

5

18

10.5

X axis clamp

Z axis clamp

12

4-φ7 mounting holeφD counterbore

B B

70±

6.5

6

12 A

82.565

A

AA

9-C depth 6

65

6520.8 (11)

20

102.

5

MAX69

(116

.3)

X axis clamp

Z axis clamp

1.5

4-φ7 mounting holeφD counterbore

B B

70±

6.5

6

12 A

82.565

A

AA

9-C depth 6

65

6520.8

20

102.

5

(116

.3)

X axis clamp

Z axis clamp

1.5

12.5

MAX91

20.5

4-φ7 mounting holeφD counterbore

B B

70±

6.5

6

12 A

82.565

A

AA

9-C depth 6

65

6520.8

20

102.

5

(116

.3)

Z axis clamp

1.5

20.5

12.5

X axis clamp

MAX91

Part NumberA

(mm)B

(mm)C

D(mm)

TSD-654SL-M6 25 50 M6 P1 11

TSD-654SLUU 25.4 50.8 1/4-20UNC 12

Part NumberA

(mm)B

(mm)C

D(mm)

TSD-654SRL-M6 25 50 M6 P1 11

TSD-654SRLUU 25.4 50.8 1/4-20UNC 12

Part NumberA

(mm)B

(mm)C

D(mm)

TSD-654CL-M6 25 50 M6 P1 11

TSD-654CLUU 25.4 50.8 1/4-20UNC 12

E128

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□65mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□60mm

□40mm

Crossed Roller

XZ axis Stages

XZ axis Aluminum Crossed Roller Slide Stages (Vertical) TAM-4L Stage size □40/□60mm

Stages that combined a light-weight Z axis aluminum stage, which integrated the stage with a Z axis bracket, with an X axis aluminum stage.Crossed roller guide enables smooth travel.

Speciications

Part NumberMETRIC TAM-404CL TAM-404SL TAM-604CL TAM-604SL

INCH TAM-404CLUU TAM-404SLUU − −

(Opposite Model)METRIC − TAM-404SRL − TAM-604SRL

INCH − TAM-404SRLUU − −Table Size [mm] 40×40 60×60

Axes of Travel XZ axis

Micrometer Position Center Side Center Side

Travel [mm] X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Crossed roller

Primary Material Aluminum

Finish Black anodized

Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)

Travel Accuracy Straightness [μm] 2 2 2 2

Max. Moment Capacity

Pitch [N・m] 2.75 2.75 5.0 5.0

Roll [N・m] 3.0 3.0 5.0 5.0

Moment Stiffness Pitch [″/N・cm] 1.4 1.4 0.6 0.6

Options FP FP FP FP

Weight [kg] 0.3 0.3 0.6 0.6

Option

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008

* Please add an option code as the part number sufix to specify various optional speciications.* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

E129WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□65mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□60mm

□40mm

Crossed Roller

XZ axis Stages

W7202CatalogCode

Outline Drawing

Hexagonal socket head cap screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)TAM-404CL/404CLUU

Pan head screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)

TAM-404SL/401SLUUPan head screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)

TAM-404SRL/401SRLUU

Hexagonal socket head cap screw M4×8…4 screwsTAM-602CL

Hexagonal socket head cap screw M4×8…4 screwsTAM-602SL Hexagonal socket head cap screw M4×8…4 screwsTAM-602SRL

50

60

MAX66

15.5

50

60

1.5

2.5

63±

6.5 93

114

12.3 21

25

60

25

2370

25

25

(14)

4-φ4.5 mounting holeφ8 counterbore

M16 P1 depth 6

8-M4 depth 8

Z axis clamp

X axis clamp

60

50

MAX88

12.3

12.3

63±

6.5

1.5

2.5 50

114

93

25 25

6021 21

23

25

70

60

25

φ8 counterbore4-φ4.5 mounting hole

M16 P1 depth 6

8-M4 depth 8

Z axis clamp

X axis clamp

A

40

B

94.5

2110.4

11.5

MAX66

69

4

49±

6.5

40B G

A

(12)

5019

4-φE mounting holeφF counterbore

40A

A

X axis clamp

8-D depth 5

Z axis clamp

C depth 7

AA

40

94.5

2110.4

10.5

MAX73

69

4

49±

6.5

40B G B

A A

21

5019

C depth 7

40

8-D depth 5

φF counterbore4-φE mounting hole

Z axis clamp

X axis clamp

AA

40

94.5

2110.4

10.5

MAX73

69

4

49±

6.5

40B G B

A A

21

5019

C depth 7

40

8-D depth 5

φF counterbore4-φE mounting hole

Z axis clamp

X axis clamp

2.5 50 4-φ4.5 mounting hole

φ8 counterbore50

60

MAX88

63±

6.5

12.3

1.5

93

25

60

70

21

114

25

8-M4 depth 8

M16 P1 depth 6

21 60

2525

23

12.3

Z axis clamp

X axis clamp

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

G(mm)

TAM-404CL 16 32 M6 P1 M3 3.5 6 2

TAM-404CLUU 15.875 31.75 1/4-20UNC 6-32UNC 4 6.5 1.5

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

G(mm)

TAM-404SL 16 32 M6 P1 M3 3.5 6 2

TAM-404SLUU 15.875 31.75 1/4-20UNC 6-32UNC 4 6.5 1.5

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

G(mm)

TAM-404SRL 16 32 M6 P1 M3 3.5 6 2

TAM-404SRLUU 15.875 31.75 1/4-20UNC 6-32UNC 4 6.5 1.5

E130

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□80mm

□65mm

Crossed Roller

XZ axis Stages

XZ axis Aluminum Crossed Roller Slide Stages (Vertical) TAM-4L Stage size □65/□80mm

Stages that combined a light-weight Z axis aluminum stage, which integrated the stage with a Z axis bracket, with an X axis aluminum stage.Crossed roller guide enables smooth travel.

Speciications

Part NumberMETRIC TAM-654CL-M6 TAM-654SL-M6 TAM-804CL TAM-804SL

INCH TAM-654CLUU TAM-654SLUU − −

(Opposite Model)METRIC − TAM-654SRL-M6 − −INCH − TAM-654SRLUU − −

Table Size [mm] 65×65 65×65 80×80 80×80

Axes of Travel XZ axis

Micrometer Position Center Side Center Side

Travel [mm] X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5 X axis ±7.5 Z axis ±7.5 X axis ±7.5 Z axis ±7.5

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Crossed roller

Primary Material Aluminum

Finish Black anodized

Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)

Travel Accuracy Straightness [μm] 2 2 2 2

Max. Moment Capacity

Pitch [N・m] 5.0 5.0 7.0 7.0

Roll [N・m] 5.0 5.0 7.0 7.0

Moment Stiffness Pitch [″/N・cm] 0.6 0.6 0.25 0.25

Options FP FP FP FP

Weight [kg] 0.7 0.7 1.2 1.2

Option for □65mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008

Option for □80mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62550 0.25 − E008

* Please add an option code as the part number sufix to specify various optional speciications.* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

E131WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□80mm

□65mm

Crossed Roller

XZ axis Stages

W7202CatalogCode

Outline Drawing

Hexagonal socket head cap screw M6×8…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)TAM-654CL-M6/654CLUU

Hexagonal socket head cap screw M6×8…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)

TAM-654SL-M6/654SLUUHexagonal socket head cap screw M6×8…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)

TAM-654SRL-M6/654SRLUU

Hexagonal socket head cap screw M4×8…4 screwsTAM-804CL

Hexagonal socket head cap screw M4×8…4 screwsTAM-804SL(14)

70

80

14.5

MAX113

14.5

149.

5

84±

7.5

6.5

124

3

70

25 25

22

70

80

100

22

25

24

8070

25

4-φ4.5 mounting holeφ8 counterbore

(PCDφ62)4-M4 depth 8

(PCDφ42)

8-M4 depth 8

4-M4 depth 8

M16 P1 depth 6

4-M3 depth 8

Z axis clampX axis clamp

MAX84

16

149.

5

124

70

80

6.5

84±

7.5

70

14.5

2525

22 80

70

25 100

3

24

70

25

80

(14)

φ8 counterboreM16 P1 depth 6

4-M4 depth 8(PCDφ62)

4-φ4.5 mounting hole

8-M4 depth 8

4-M4 depth 8

4-M3 depth 8(PCDφ42)

Z axis clamp

X axis clamp

125

13.870

±6.

5AA

AA

65

9-C depth 8

17.5

B

6521 (14)

3 B

102.

5 77.5

25

Z axis clamp

2.5

65MAX68

4-φD mounting holeφ11 counterbore

X axis clamp77

.5

2.5

102.

5

70±

6.5

125

65B

X axis clampB3

25

4-φD mounting holeφ11 counterbore

13.8 65A

21A

(14)

65

AA

9-C depth 8

Z axis clamp

MAX94

14.3

77.5

2.5

102.

5

70±

6.5

125

65B B3

25

4-φD mounting holeφ11 counterbore

13.8 65A

21A

65

AA

9-C depth 8

Z axis clamp

MAX94

X axis clamp

21

14.3

Part NumberA

(mm)B

(mm)C

D(mm)

TAM-654SL-M6 25 50 M6 P1 6.5

TAM-654SLUU 25.4 50.8 1/4-20UNC 7

Part NumberA

(mm)B

(mm)C

D(mm)

TAM-654SRL-M6 25 50 M6 P1 6.5

TAM-654SRLUU 25.4 50.8 1/4-20UNC 7

Part NumberA

(mm)B

(mm)C

D(mm)

TAM-654CL-M6 25 50 M6 P1 6.5

TAM-654CLUU 25.4 50.8 1/4-20UNC 7

E132

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Crossed Roller

Lapping

V Groove Screw

Ohters

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□65mm

□60mm

□40mm

□25mm

□15mm

Dovetail

XZ axis Stages

XZ axis Preset Stages TASB-4 Stage size □15/□25/□40/□60/□65mm

Speciications

Part NumberMETRIC TASB-154 TASB-254 TASB-404 TASB-604 TASB-654-M6

INCH − − TASB-404UU − TASB-654UU

Table Size [mm] 15×15 25×25 40×40 60×60 65×65

Axes of Travel XZ axis

Travel [mm]X axis ±2

Z axis +2 / −0X axis ±3

Z axis +3 / −0X axis ±7

Z axis +5 / −0X axis ±10

Z axis +7 / −0X axis ±12.5

Z axis +7 / −0

Screw Pitch [mm] 0.4 0.5 0.5 0.5 0.5

Bearing type Dovetail slide method

Primary Material Brass

Finish Black matte

Load Capacity [N] 4.9 (0.5kgf) 6.9 (0.7kgf) 29.4 (3.0kgf) 98.1 (10.0kgf) 98.1 (10.0kgf)

Travel Accuracy Straightness [μm] 30 30 30 30 30

Max. Moment Capacity

Pitch [N・m] − 0.3 0.5 1.0 1.0

Roll [N・m] − 0.3 0.5 1.0 1.0

Moment StiffnessPitch [″/N・cm] − 8.2 5.2 1.1 1.1

Roll [″/N・cm] − 5.6 3.1 2.1 2.1

Parallelism [μm] 150 150 150 150 150

Weight [kg] 0.03 0.11 0.4 1.4 1.8

Space-saving, compact XZ axis stages with horizontal table top, suitable for less frequent operations that require ine adjustment.

◦Ideal for less frequent operations and ine adjustment.◦Elimination of adjustment knobs can prevent errant operations, and elimination of protrusions makes these stages

suitable for assembly in systems.

Mounting Method Detailed Illustration

Guide

▶A hex wrench with knob and clamping wrench are included.

Clamp with a screwfrom the top

Clamp with a screwfrom the bottom

Clamp

Top mounting

Tapped holes are used as

counterbores because screws

are smaller than tapped holes

and will go in without any

interference.

Bottom mounting

Clamp with screws that match

the speciication of tapped holes.

About Mounting Holes

The bottom mounting holes of preset stages are tapped holes.These stages allow mounting from the top or the bottom, convenient for securing on optical breadboards or other instruments as well as assembling in systems.Use the screws of the sizes listed in the table on the right for mounting.

* When mounting from the top surface, slide the top surface to insert screws in mounting holes.

Part NumberSecure from

the topSecure from the bottom

TASB-154 M2 M2.6

TASB-254 M2 M3

TASB-404 M3 M4

TASB-404UU 6-32UNC −TASB-604 M4 M5

TASB-654-M6 M6 M8

TASB-654UU 1/4-20UNC 5/16-18UNC

E133WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Crossed Roller

Lapping

V Groove Screw

Ohters

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□65mm

□60mm

□40mm

□25mm

□15mm

Dovetail

XZ axis Stages

W7203CatalogCode

Outline Drawing

Pan head screw M2×5…3 screws, One 2.5mm hex wrench with knob, One 0.89mm hex wrenchTASB-154 X axis=Wrench size for adjustment 2.5mm, Z axis=Adjustment hole size φ1.8mm

Wrench size for clamp common to X and Z axes=0.89mm

Pan head screw M2×6…3 screws, One 3mm hex wrench with knob, One 0.89mm hex wrenchTASB-254 Wrench size for adjustment X axis=3mm,

Wrench size for clamp common to X and Z axes=0.89mm

Pan head screw M3×8…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrenchHexagonal socket head cap screw 6-32UNC×3/8…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench (UU)TASB-404/404UUWrench size for adjustment X axis=3mm, Wrench size for clamp common to X and Z axes=1.5mmOne 3mm hex wrench with knob,hex wrench size for clamp 1.5mm (UU)

Hexagonal socket head cap screw M4×10…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench

TASB-604

X axis=Wrench size for adjustment 3mm, Z axis=Adjustment hole size φ3mmWrench size for clamp common to X and Z axes=1.5mm

Hexagonal socket head cap screw M6×12…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench (M6)Hexagonal socket head cap screw 6-32UNC×3/8…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench (UU)

TASB-654-M6/654UU

Hex wrench size with knob 3mm, hex wrench size for clamp 1.5mm (M6)Hex wrench size with knob 3mm, hex wrench size for clamp 1.5mm (UU)

21

5

25

60

25

505.5

10

38

59

φ8

32

32

60

25 25

5

50

4-φ4.2 φ8 counterbore (Top mounting)

4-M5 (Bottom mounting)

X axis clamp

4-M3 depth 8

φ2 locking hole

8-M4 depth 8 Z axis clamp

1010

1010

6.7

3

20

325

38

φ6

23 15

25 420

3-M3 (Bottom mounting)3-φ2.5 φ4.5 counterbore (Top mounting)

Z axis clamp

X axis clampφ1.5 locking hole

6-M2 depth 3.5M4 depth 4.5

3

10

4

1015

3

φ4

23

15

10

8

10

15

4-M2 depth 3

3-φ2.2 φ4 counterbore (Top mounting)3-M2.6 (Bottom mounting)

X axis clamp

Z axis clamp

23

15

10

8

Z axis clamp

[Enlarged view of clamp position]

440

AA 6-D depth 5

B

8.8

540

AA

C depth 5

5

X axis clamp

Z axis clamp

1834

B

φ1.5 locking hole

4-φE φF counterbore (Top mounting)G (Bottom mounting)

φ6

52+5 0

B

11

65

A

5

A 8-C depth 8

4.5

X axis clamp

B

4.5

A

65

A

φ2 locking hole

2338

Z axis clamp

4-φ6.7 φ11 counterbore (Top mounting)4-D (Bottom mounting)

φ8

61+7 0

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

G

TASB-404 16 32 M4 M3 3.3 6 M4

TASB-404UU 15.875 31.75 8-32UNC 6-32UNC 4 6.5

Part NumberA

(mm)B

(mm)C D

TASB-654-M6 25 50 M6 M8

TASB-654UU 25.4 50.8 1/4-20UNC 5/16-18UNC

E134

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Crossed Roller

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□65mm

□80mm

□100mm

□120mm

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

Others

□60mm

Dovetail

XZ axis Stages

Speciications

Part NumberMETRIC TAS-24304L TAS-20604L TAR-25504L TAR-34804L TAR-38404L-M6 TAR-60554D TAR-60704D

INCH − − − − TAR-38404LUU − −Table Size [mm] 24×30 18×60 25×50 34×40 38×40 60×60 60×60

Axes of Travel XZ axis

Travel [mm]X axis ±4Z axis ±4

X axis ±7.5Z axis ±7.5

X axis ±10Z axis ±10

X axis ±25Z axis +25 / −20

X axis ±15Z axis +45 / −0

X axis +27 / −0Z axis +18 / −0

X axis +37 / −0Z axis +33 / −1

Lead of Actuator [mm/rotation] 0.5 0.5 about 20 about 20 about 20Coars: about 20Fine: about 2.5

Coars: about 20Fine: about 2.5

Vernier Readable Resolution [mm] − 0.1

Bearing type Dovetail slide method

Primary Material Brass

Finish Super black chrome

Load Capacity [N] 4.9 (0.5kgf) 9.8 (1.0kgf) 9.8 (1.0kgf) 14.7 (1.5kgf) 14.7 (1.5kgf) 24.5 (2.5kgf) 24.5 (2.5kgf)

Travel Accuracy Straightness [μm] 20 20 30 30 30 30 30

Max. Moment Capacity

Pitch [N・m] 0.5 0.2 0.5 0.5 0.5 0.4 0.4

Roll [N・m] 0.2 0.2 0.5 0.5 0.5 0.5 0.5

Moment Stiffness Pitch [″/N・cm] − − 3.98 2 2 − −

Weight [kg] 0.42 1.0 0.52 1.1 1.2 0.83 0.85

XZ axis Leadscrew Stages (Vertical) TAS-4L

XZ axis Rack and Pinion Dovetail Stages (Vertical) TAR-4L

The TAS type stages have dovetail groove guide and leadscrew adjustment system, suitable for less frequent operations that require ine adjustment.The TAR type stages have dovetail groove guide and rack and pinion system, suitable for frequent operations that require quick motion and long travel.

Guide

▶Micrometer brackets may extend above the top surface of some

stages. Check drawings for more information.

▶Note that some samples might not be able to be ixed on the stage depending on their shapes, or required travel might not be ensured.

W7069

W7070

CatalogCode

CatalogCode

◦The feed handle offers excellent operability.

■Mounting Method of TAR-25504L

Use M3 pan head screws (only on

both edges) to secure from the top,

and M4 pan head screws to secure

from the bottom.

Part Number TAR-25504L

Z axis TARW-25503L

X axis TARW-25501

■Components

TAR-34804L include a base plate that allows mounting on instruments

or bases itted with M4 tapped holes on □50mm,

preventing the handle from contacting the mounting surface.

Bottom Plate

60

602050

50

36

4

10

4

4-φ4.5 stage surface mounting holeφ8 counterbore

4-φ4.5 mounting holeφ8 counterbore

Primary material: AluminumFinish: Black Anodized

E135WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XYZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Crossed Roller

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□65mm

□80mm

□100mm

□120mm

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

Others

□60mm

Dovetail

XZ axis Stages

Outline Drawing

Pan head screw M3×5…4 screwsTAS-24304L Hexagonal socket head cap screw M4×10…4 screwsTAS-20604L

Pan head screw M3×8…4 screwsTAR-25504L Hexagonal socket head cap screw M4×8…4 screwsTAR-34804L

Hexagonal socket head cap screw M6×10…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)TAR-38404L-M6/38404LUU

Hexagonal socket head cap screw M4×8…4 screwsTAR-60554D Hexagonal socket head cap screw M4×8…4 screwsTAR-60704D

93

60113

5060

50

25.5

516

5060

1338

φ18

57.5

±7.

5

4-φ4.5 mounting hole

X axis clamp

4-M4 depth 6

Z axis clamp

10

203071

35.5

±4

1

10

32

40

15

24

φ14

(15)

7.75

φ6 counterbore4-φ3.5 mounting hole

6-M3 depth 5 Z axis clamp

X axis clamp

(22) 60

80

16

50

9

4

119

50

60φ

30

35

24

34

35

14 40

4

X axis clamp

φ8 counterbore4-φ4.5 mounting hole

Z axis clamp

4-M3 depth 5

79+

25

–20

1010

1010

22

3.8

1020 2025 3.2

63

50 φ20

20

20

25

60±

10MA

X95

40

50

3-M4 depth 5

10-M3 depth 5

4-M4 (Bottom mounting)

2-φ3.3 φ6 counterbore (Top mounting)

Z axis clampX axis clamp

A

3827

φ30

B

65

38

3

Z axis clamp

B65(14)

18

82+

25−

20

122

X axis clamp

4-φD mounting hole φ11 counterbore

A 40

4-C depth 6

5

2.5

Clamp

φ30

φ22

6050

Fine knob

4.5

Coars knob

55

φ8 counterbore4-φ4.5 mounting hole

51Tr

avel

18

(134)107

50 6034

2560

25

25

60

25

M16 P1 depth 76-M4 depth 7

3230

(144)

51

107

φ30

φ22

2560

Trav

el 3

360

25

Fine knob

Coars knob

6-M4 depth 7

25

70

47

5060

4.5 4-φ4.5 mounting hole

φ8 counterbore

Clamp

346050

25 M16 P1 depth 7

30

XZ axis Fine and Coarse Drive Rack and pinion Dovetail Stages (Vertical) TAR-4D W7516CatalogCode

Part NumberA

(mm)B

(mm)C

D(mm)

TAR-38404L-M6 25 50 M6 6.5

TAR-38404LUU 25.4 50.8 1/4-20UNC 7

E136

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□60mm

□65mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□40mm

□25mm

Ball Guide

XYZ axis Stages

XYZ axis Steel Extended Contact Slide Stages TSD-255 Stage size □25mm

TSD-405 Stage size □40mm

These stages are combinations of ball bearing slide guide XY axis stages and lat Z axis stages.

Speciications

Part NumberMETRIC TSD-255C TSD-255S TSD-405C TSD-405S

INCH − − TSD-405CUU TSD-405SUU

(Opposite Model)METRIC − TSD-255SR − TSD-405SR

INCH − − − TSD-405SRUU

Table Size [mm] 25×25 25×25 40×40 40×40

Axes of Travel XYZ axis

Micrometer Position Center Side Center Side

Travel [mm] XY axis ±3 Z axis ±3 XY axis ±3 Z axis ±3 XY axis ±6.5 Z axis ±3 XY axis ±6.5 Z axis ±3

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Extended contact ball guide

Primary Material Steel

Finish Super black chrome + Black matte

Load Capacity [N] 29.4 (3.0kgf) 29.4 (3.0kgf) 88.3 (9.0kgf) 88.3 (9.0kgf)

Travel Accuracy Straightness [μm] 5 5 2.5 2.5

Max. Moment Capacity

Pitch [N・m] 1.0 1.0 3.9 3.9

Roll [N・m] 1.0 1.0 3.9 3.9

Moment StiffnessPitch [″/N・cm] 10.55 10.55 2.34 2.34

Roll [″/N・cm] 10.55 10.55 2.34 2.34

Parallelism [μm] 130 130 130 130

Options FP FP FP FP

Weight [kg] 0.2 0.2 0.55 0.55

Option for □25mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-42525 0.25 − E008

Option for □40mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw AdjustersXY axis: FPSA-62540

0.25 − E008Z axis: FPSA-42525

* Please add an option code as the part number sufix to specify various optional speciications.* The load capacity of the FP type is 39.2N (4.0kgf). (□40mm)* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

Guide

Attention

▶Vacuum-compatible stainless steel stages (TSDS-255/405) are also

available. E210

▶The structure does not allow upside down installation since the

spring inside the stage might not be able to withstand the load and

may stretch.

▶Since the structure uses the principle of leverage, the feed rate

luctuates against the scale depending on the travel (about ±0.02mm for micrometer head 0.5mm/rotation).

E137WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□60mm

□65mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□40mm

□25mm

Ball Guide

XYZ axis Stages

W7071

W7072

CatalogCode

CatalogCode

Outline Drawing

Hexagonal socket head cap screw M2×4…4 screws

TSD-255C

Hexagonal socket head cap screw M2×4…4 screwsTSD-255S Hexagonal socket head cap screw M2×4…4 screwsTSD-255SR

Hexagonal socket head cap screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)

TSD-405C/405CUU

Hexagonal socket head cap screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)

TSD-405S/405SUUHexagonal socket head cap screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)

TSD-405SR/405SRUU

9.5

10 10

1010

201.5

2024

44±

3

17.5

25

25M

AX

41

MAX41

20

27

7-M2 depth 4

4-φ2.4 mounting holeφ4 counterbore

(3)

X axis clamp

Z axis clamp

Y axis clamp1520

44±

3 241.

5

20

MAX4912

10

MA

X38

1010

(7)

25

10

25

7

27

20

7-M2 depth 4

φ4 counterbore4-φ2.4 mounting hole

X axis clamp

Z axis clamp

Y axis clamp

MA

X38

MAX49 (7)25

1010

Z axis clamp

2425

1010

7-M2 depth 4

2044

±3

20

4-φ2.4 mounting holeφ4 counterbore

15 1.5

20

27

7

Y axis clamp

X axis clamp

MA

X49

37

40A A Y axis clamp

B

10.5

21.5

1.5 B 4-φD mounting hole

φE counterbore

Z axis clamp

MA

X66

AA

40(9

.5)

7-C depth 5

MAX66

X axis clamp

3427

61±

3

937

MA

X74

MAX74

1.5

20

34

61±

3

27

4-φD mounting holeφE counterbore

B

40(9

.5)4018

7-C depth 5

B

A A

AA

X axis clampY axis clamp

Z axis clamp

37

1.54-φD mounting hole

φE counterboreB

40(9

.5)

40

B

A A

AA

X axis clampY axis clamp

Z axis clamp

61±

3

20 2734

7-C depth 5

MAX74

MA

X74

(9.5) 9

MA

X32

Part NumberA

(mm)B

(mm)C

D(mm)

E(mm)

TSD-405S 16 32 M3 3.5 6

TSD-405SUU 15.875 31.75 6-32UNC 4 6.5

Part NumberA

(mm)B

(mm)C

D(mm)

E(mm)

TSD-405SR 16 32 M3 3.5 6

TSD-405SRUU 15.875 31.75 6-32UNC 4 6.5

Part NumberA

(mm)B

(mm)C

D(mm)

E(mm)

TSD-405C 16 32 M3 3.5 6

TSD-405CUU 15.875 31.75 6-32UNC 4 6.5

E138

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□65mm

□60mm

Ball Guide

XYZ axis Stages

XYZ axis Steel Extended Contact Slide Stages TSD-605 Stage size □60mm

TSD-655 Stage size □65mm

These stages are combinations of ball bearing slide guide XY axis stages and lat Z axis stages.

Speciications

Part NumberMETRIC TSD-605C TSD-605S TSD-655C-M6 TSD-655S-M6

INCH − − TSD-655CUU TSD-655SUU

(Opposite Model)METRIC − TSD-605SR − TSD-655SR-M6

INCH − − − TSD-655SRUU

Table Size [mm] 60×60 60×60 65×65 65×65

Axes of Travel XYZ axis

Micrometer Position Center Side Center Side

Travel [mm] XY axis ±6.5 Z axis ±5 XY axis ±6.5 Z axis ±5 XY axis ±6.5 Z axis ±5 XY axis ±6.5 Z axis ±5

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Extended contact ball guide

Primary Material Steel

Finish Super black chrome + Black matte

Load Capacity [N] 147 (15.0kgf) 147 (15.0kgf) 147 (15.0kgf) 147 (15.0kgf)

Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5

Max. Moment Capacity

Pitch [N・m] 6.9 6.9 6.9 6.9

Roll [N・m] 6.9 6.9 6.9 6.9

Moment StiffnessPitch [″/N・cm] 0.81 0.81 0.81 0.81

Roll [″/N・cm] 0.81 0.81 0.81 0.81

Parallelism [μm] 130 130 130 130

Options FP FP FP FP

Weight [kg] 1.9 1.9 2.0 2.0

Guide

Attention

▶Vacuum-compatible stainless steel stages (TSDS-605/655) are also

available. E210

▶The structure does not allow upside down installation since the

spring inside the stage might not be able to withstand the load and

may stretch.

▶Since the structure uses the principle of leverage, the feed rate

luctuates against the scale depending on the travel (about ±0.02mm for micrometer head 0.5mm/rotation).

Option

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008

* Please add an option code as the part number sufix to specify various optional speciications.* The load capacity of the FP type is 39.2N (4.0kgf).* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

E139WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□65mm

□60mm

Ball Guide

XYZ axis Stages

W7073

W7141

CatalogCode

CatalogCode

Outline Drawing

Hexagonal socket head cap screw M4×6…4 screws

TSD-605C

Hexagonal socket head cap screw M4×6…4 screwsTSD-605S Hexagonal socket head cap screw M4×6…4 screwsTSD-605SR

Hexagonal socket head cap screw M6×6…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)

TSD-655C-M6/655CUU

Hexagonal socket head cap screw M6×6…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)

TSD-655S-M6/655SUUHexagonal socket head cap screw M6×6…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)

TSD-655SR-M6/655SRUU

87±

5

3255

MA

X88

50

1.5

MAX88

24.5

25 2532

60

25

MA

X44

(11)

32 25

47

10.5

50

6020.8

4-φ4.5 mounting holeφ8 counterbore

7-M4 depth 6

M16 P1 depth 6

4-M3 depth 6Y axis clamp

X axis clamp

Z axis clamp

32 (11)

24.5

1.5 50

87±

532

5525

MA

X66

2532

60

10.5

47

50

MAX66 602525

(11)

φ8 counterbore4-φ4.5 mounting hole

M16 P1 depth 6

4-M3 depth 6

7-M4 depth 6

Y axis clamp

X axis clamp

Z axis clamp

25

32

60

4-φ4.5 mounting hole 1.5

50

φ8 counterbore

32

4-M3 depth 6

25

60 7-M4 depth 625 25

MA

X88

MAX88

MA

X44

47

50

10.5

M16 P1 depth 6

24.5

87±

55532

Z axis clamp

Y axis clamp

(11)

X axis clamp

B

24

1.5

5532

87±

5

4-φ7 mounting holeφD counterbore

Z axis clamp

B

Y axis clamp

X axis clampA A

65MAX69

AA

65(1

1)M

AX

69

(11)7-C depth 6

12

47

(11)

65

AA

(11)A

65A

7-C depth 6

B

X axis clamp

Y axis clamp

MA

X91

MA

X41

MAX91

B

Z axis clamp

24.5

87±

5 5532

1.54-φ7 mounting hole

φD counterbore

20.5

11

47

20.5A

65A

(11)

(11)

MAX

41

AA

65MA

X91

MAX91

7-C depth 6

B

X axis clamp

Y axis clamp

47Z axis clamp

BφD counterbore4-φ7 mounting hole

3255

87±

5

24.5

1.5

Part NumberA

(mm)B

(mm)C

D(mm)

TSD-655S-M6 25 50 M6 P1 11

TSD-655SUU 25.4 50.8 1/4-20UNC 12

Part NumberA

(mm)B

(mm)C

D(mm)

TSD-655SR-M6 25 50 M6 P1 11

TSD-655SRUU 25.4 50.8 1/4-20UNC 12

Part NumberA

(mm)B

(mm)C

D(mm)

TSD-655C-M6 25 50 M6 P1 11

TSD-655CUU 25.4 50.8 1/4-20UNC 12

E140

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□65mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□100mm

□80mm

Ball Guide

XYZ axis Stages

Option for □80mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw AdjustersXY axis: FPSA-62550

0.25 − E008X axis: FPSA-62540

XYZ axis Steel Extended Contact Slide Stages TSD-805 Stage size □80mm

TSD-1005 Stage size □100mm

These stages are combinations of ball bearing slide guide XY axis stages and lat Z axis stages.

SpeciicationsPart Number METRIC TSD-805C TSD-805S TSD-1005C TSD-1005S

(Opposite Model) METRIC TSD-805SR − TSD-1005SR

Table Size [mm] 80×80 80×80 100×100 100×100

Axes of Travel XYZ axis

Micrometer Position Center Side Center Side

Travel [mm] XY axis ±12.5 Z axis ±5 XY axis ±12.5 Z axis ±5 XY axis ± 12.5 Z axis ±10 XY axis ±12.5 Z axis ±10

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Extended contact ball guide

Primary Material Steel

Finish Super black chrome + Black matte

Load Capacity [N] 147 (15.0kgf) 147 (15.0kgf) 245 (25.0kgf) 245 (25.0kgf)

Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5

Max. Moment Capacity

Pitch [N・m] 6.9 6.9 9.8 9.8

Roll [N・m] 6.9 6.9 9.8 9.8

Moment StiffnessPitch [″/N・cm] 0.67 0.67 0.45 0.45

Roll [″/N・cm] 0.67 0.67 0.45 0.45

Parallelism [μm] 130 130 150 150

Options FP FP FP FP

Weight [kg] 2.6 2.6 6.1 6.1

Attention

▶The structure does not allow upside down installation since the

spring inside the stage might not be able to withstand the load and

may stretch.

▶Since the structure uses the principle of leverage, the feed rate

luctuates against the scale depending on the travel (about ±0.02mm for micrometer head 0.5mm/rotation).

Option for □100mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62555 0.25 − E008

* Please add an option code as the part number sufix to specify various optional speciications.* The load capacity of the FP type is 39.2N (4.0kgf).* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

E141WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□65mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□100mm

□80mm

Ball Guide

XYZ axis Stages

W7074

W7075

CatalogCode

CatalogCode

Outline Drawing

Hexagonal socket head cap screw M4×8…4 screwsTSD-805C

Hexagonal socket head cap screw M4×8…4 screwsTSD-805S Hexagonal socket head cap screw M4×8…4 screwsTSD-805SR

Hexagonal socket head cap screw M4×8…4 screwsTSD-1005C

Hexagonal socket head cap screw M4×8…4 screwsTSD-1005S Hexagonal socket head cap screw M4×8…4 screwsTSD-1005SR

24

MA

X94

3 70

87±

532

55MAX94

2570

25

8025

25

70 80

(11)

(11)

12

47

70

4-M4 depth 6

7-M4 depth 6

M16 P1 depth 6

φ8 counterbore4-φ4.5 mounting hole

Y axis clamp

X axis clamp

Z axis clamp

24.5

70

3287

±5 55

70 3

MA

X12

2

MAX122

25

25 2570

25

MA

X34

47

80

11

(11)

70

20.8 80

7-M4 depth 6

M16 P1 depth 6

φ8 counterbore4-φ4.5 mounting hole

4-M4 depth 6

Z axis clamp

Y axis clamp

X axis clamp

(11)

124±

10

2.5

MAX149

34 10.5

90

90

24.5

MA

X14

9

25 25

MA

X87

9050 100

44.5

90

2290

100

4-φ4.5 mounting holeφ8 counterbore

M16 P1 depth 6

6-M4 depth 8

4-M4 depth 8

X axis clamp

Y axis clamp

Z axis clamp

90

24.5

2.5 90

MA

X10

990

3412

4±10

2525

50 90 100

(11)

10.5

44.5

90

MAX109 100 (11)

4-M4 depth 8

6-M4 depth 8

M16 P1 depth 6

φ8 counterbore4-φ4.5 mounting hole

X axis clamp

Y axis clamp

Z axis clamp

MAX149

50 90 100

90

2.5

MA

X87

90100

2525

90

44.5

MA

X14

9

6-M4 depth 84-M4 depth 8

M16 P1 depth 6

(11) 10.5

24.5

90

124±

10

34

φ8 counterbore4-φ4.5 mounting hole

Y axis clamp X axis clamp

Z axis clamp

47

2525

(11)

8070

70

7-M4 depth 6

2525

8070 4-M4 depth 6

70

20.8

MAX122

MAX3

4

MA

X12

2

M16 P1 depth 6

11

32

87±

555

4-φ4.5 mounting holeφ8 counterbore

24.5

3

Y axis clamp X axis clamp

Z axis clamp

E142

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□65mm

□80mm

□100mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□120mm

Ball Guide

XYZ axis Stages

XYZ axis Steel Extended Contact Slide Stages TSD-1205 Stage size □120mm

These stages are combinations of ball bearing slide guide XY axis stages and lat Z axis stages.

Speciications

Part NumberMETRIC TSD-1205C TSD-1205S TSD-1205C-M6 TSD-1205S-M6

INCH − − TSD-1205CUU TSD-1205SUU

(Opposite Model)METRIC − TSD-1205SR − TSD-1205SR-M6

INCH − − − TSD-1205SRUU

Table Size [mm] 120×120 120×120 120×120 120×120

Axes of Travel XYZ axis

Micrometer Position Center Side Center Side

Travel [mm] XY axis ±20 Z axis ±10 XY axis ±20 Z axis ±10 XY axis ±20 Z axis ±10 XY axis ±20 Z axis ±10

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Extended contact ball guide

Primary Material Steel

Finish Super black chrome + Black matte

Load Capacity [N] 245 (25.0kgf) 245 (25.0kgf) 245 (25.0kgf) 245 (25.0kgf)

Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5

Max. Moment Capacity

Pitch [N・m] 9.8 9.8 9.8 9.8

Roll [N・m] 9.8 9.8 9.8 9.8

Moment StiffnessPitch [″/N・cm] 0.41 0.41 0.41 0.41

Roll [″/N・cm] 0.41 0.41 0.41 0.41

Parallelism [μm] 150 150 150 150

Weight [kg] 7.3 7.3 7.3 7.3

Attention

▶The structure does not allow upside down installation since the

spring inside the stage might not be able to withstand the load and

may stretch.

▶Since the structure uses the principle of leverage, the feed rate

luctuates against the scale depending on the travel (about ±0.02mm for micrometer head 0.5mm/rotation).

E143WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□65mm

□80mm

□100mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□120mm

Ball Guide

XYZ axis Stages

W7142CatalogCode

Outline Drawing

Hexagonal socket head cap screw M4×8…4 screws

TSD-1205C

Hexagonal socket head cap screw M4×8…4 screwsTSD-1205S Hexagonal socket head cap screw M4×8…4 screwsTSD-1205SR

Hexagonal socket head cap screw M6×8…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)

TSD-1205C-M6/1205CUU

Hexagonal socket head cap screw M6×8…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)

TSD-1205S-M6/1205SUUHexagonal socket head cap screw M6×8…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)

TSD-1205SR-M6/1205SRUU

50 50

3812

8±10 90

MA

X18

9

100 3.5

MA

X77

MAX189

27.5

25 25

12050

5050

(11)

11.3

48.5

100

22 120

φ8 counterbore4-φ4.5 mounting hole

M16 P1 depth 6

6-M4 depth 8

7-M4 depth 8

X axis clampY axis clamp

Z axis clamp

(11)

28 38

3.5 100

50

2525

MA

X14

7

90

128±

10

48.5

12

120

5050

100

(11)MAX147 12050 50

6-M4 depth 8

4-φ4.5 mounting holeφ8 counterbore

M16 P1 depth 6

7-M4 depth 8X axis clamp

Y axis clamp

Z axis clamp

X axis clamp

1205050

128±

10903.

54-φ4.5 mounting holeφ8 counterbore

38

MA

X77

MAX189

50

Z axis clamp

120

(11)

50M16 P1 depth 6

7-M4 depth 85025 25

6-M4 depth 8

X axis clamp

100

MA

X18

9

100

27.5

11.3

48.5

120

B

MA

X14

7

B

28 3812

8±10

4-φD mounting holeφE counterbore

90

12

48.5

(11)

22-C depth 8 A A A A120MAX147

2

(11)Y axis clamp

X axis clamp

Z axis clamp

AA

AA

B120

MA

X18

9

22

MAX189

B

90

128±

10

φE counterbore4-φD mounting hole

38

MA

X77

11.3

48.5

12022-C depth 8 (1

1)

X axis clampY axis clamp

Z axis clamp

AA

AA

A AA A

27.3

2

B120

MA

X18

9

MAX189

B

MA

X77

48.5

120

(11)

X axis clamp

Z axis clamp

AA

AA

A AA A

90

128±

10

38

4-φD mounting holeφE counterbore

22-C depth 8

Y axis clamp

11.3

2

27.3

(11)

Part NumberA

(mm)B

(mm)C

D(mm)

E(mm)

TSD-1205S-M6 25 100 M6 P1 6.5 11

TSD-1205SUU 25.4 101.6 1/4-20UNC 7 12

Part NumberA

(mm)B

(mm)C

D(mm)

E(mm)

TSD-1205SR-M6 25 100 M6 P1 6.5 11

TSD-1205SRUU 25.4 101.6 1/4-20UNC 7 12

Part NumberA

(mm)B

(mm)C

D(mm)

E(mm)

TSD-1205C-M6 25 100 M6 P1 6.5 11

TSD-1205CUU 25.4 101.6 1/4-20UNC 7 12

E144

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□60mm

□65mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□40mm

□25mm

Ball Guide

XYZ axis Stages

XYZ axis Steel Extended Contact Slide Stages (Vertical) TSD-255L Stage size □25mm

TSD-405L Stage size □40mm

These stages are combinations of ball bearing slide guide XY axis stages and vertical mounting type Z axis stages.

Guide

▶Vacuum-compatible stainless steel stages (TSDS-255＊L/405＊L)

are also available. E212

Speciications

Part NumberMETRIC TSD-255CL TSD-255SL TSD-405CL TSD-405SL

INCH − − TSD-405CLUU TSD-405SLUU

(Opposite Model)METRIC − TSD-255SRL − TSD-405SRL

INCH − − − TSD-405SRLUU

Table Size [mm] 25×25 25×25 40×40 40×40

Axes of Travel XYZ axis

Micrometer Position Center Side Center Side

Travel [mm] XY axis ±3 Z axis ±3 XY axis ±3 Z axis ±3 XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Extended contact ball guide

Primary Material Steel

Finish Super black chrome

Load Capacity [N] 14.7 (1.5kgf) 14.7 (1.5kgf) 49 (5.0kgf) 49 (5.0kgf)

Travel Accuracy Straightness [μm] 1 1 1 1

Max. Moment Capacity

Pitch [N・m] 2.2 2.2 5.0 5.0

Roll [N・m] 2.1 2.1 5.0 5.0

Moment Stiffness Pitch [″/N・cm] 6.7 6.7 1.1 1.1

Options FP FP FP FP

Weight [kg] 0.2 0.2 0.6 0.6

Option for □25mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-42525 0.25 − E008

Option for □40mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008

* Please add an option code as the part number sufix to specify various optional speciications.* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

E145WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□60mm

□65mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□40mm

□25mm

Ball Guide

XYZ axis Stages

W7077

W7078

CatalogCode

CatalogCode

Outline Drawing

Hexagonal socket head cap screw M2×4…4 screwsTSD-255CL

Hexagonal socket head cap screw M2×4…4 screwsTSD-255SL Hexagonal socket head cap screw M2×4…4 screwsTSD-255SRL

Hexagonal socket head cap screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×3/6…4 screws (UU)TSD-405CL/405CLUU

Hexagonal socket head cap screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×3/6…4 screws (UU)

TSD-405SL/405SLUUHexagonal socket head cap screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×3/6…4 screws (UU)

TSD-405SRL/405SRLUU

1010

7

25 127

45±

3 57.5

20

25

MAX49

(6.5)

81.2

MAX49

1.5

15

20

20

2037

.525

4-φ2.4 mounting holeφ4 counterbore

6-M2 depth 4

M4 depth 4

1010

17.5

(7)257

81.2

45±

3

25

20

MAX41 (6.5)

57.5

9.5

MAX41 20

20

1.5

2037

.525

6-M2 depth 4

M4 depth 4

φ4 counterbore

4-φ2.4 mounting hole

Z axis clamp

Y axis clamp

X axis clamp

57.5

MAX49

1.5

45±

3

2025

20

20

7 25

81.2

MAX49

37.510

10

25

6-M2 depth 4

M4 depth 4

7 15

4-φ2.4 mounting holeφ4 counterbore

20

12

12

Z axis clamp

Y axis clamp　

X axis clamp

0.5

62±

6.5

(9.5)

82

109

MAX66

21.5

40

B

10.5

A40

55A

4-φE mounting holeφF counterbore

27

MAX66

10.5

1.5

B

D depth 5

8-C depth 5

(9.5)A

40A

X axis clamp Y axis clamp

Z axis clamp

MAX7440B

9

AA

55

40

18

82

109

A

φF counterbore4-φE mounting hole

27

A

20

(9.5)

62±

6.50.5

MAX74

B1.5

10.5 40

8-C depth 5

D depth 5

Y axis clamp

Z axis clamp

X axis clamp

40B

AA

55

40

8210

9

A

27

A

62±

6.50.5

MAX74

B1.5

10.5 40

8-C depth 5

D depth 5

Y axis clamp

Z axis clamp

X axis clamp

20

φF counterbore4-φE mounting hole

MAX74

19.5

18

9

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

TSD-405SL 16 32 M3 M6 P1 3.5 6

TSD-405SLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

TSD-405CL 16 32 M3 M6 P1 3.5 6

TSD-405CLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

TSD-405SRL 16 32 M3 M6 P1 3.5 6

TSD-405SRLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5

E146

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□65mm

□60mm

Ball Guide

XYZ axis Stages Speciications

Part NumberMETRIC TSD-605CL TSD-605SL TSD-655CL-M6 TSD-655SL-M6

INCH − − TSD-655CLUU TSD-655SLUU

(Opposite Model)METRIC − TSD-605SRL − TSD-655SRL-M6

INCH − − − TSD-655SRLUU

Table Size [mm] 60×60 60×60 65×65 65×65

Axes of Travel XYZ axis

Micrometer Position Center Side Center Side

Travel [mm] XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Extended contact ball guide

Primary Material Steel

Finish Super black chrome

Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)

Travel Accuracy Straightness [μm] 1 1 1 1

Max. Moment Capacity

Pitch [N・m] 8.0 8.0 8.0 8.0

Roll [N・m] 8.0 8.0 8.0 8.0

Moment Stiffness Pitch [″/N・cm] 0.58 0.58 0.58 0.58

Options FP FP FP FP

Weight [kg] 1.7 1.7 1.9 1.9

XYZ axis Steel Extended Contact Slide Stages (Vertical) TSD-605L Stage size □60mm

TSD-655L Stage size □65mm

These stages are combinations of ball bearing slide guide XY axis stages and vertical mounting type Z axis stages.

Guide

▶Vacuum-compatible stainless steel stages (TSDS-605＊L/655＊L)

are also available. E212

Option

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008

* Please add an option code as the part number sufix to specify various optional speciications.* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

E147WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Crossed Roller

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□65mm

□60mm

Ball Guide

XYZ axis Stages

W7079

W7143

CatalogCode

CatalogCode

Outline Drawing

Hexagonal socket head cap screw M4×6…4 screwsTSD-605CL

Hexagonal socket head cap screw M4×6…4 screwsTSD-605SL Hexagonal socket head cap screw M4×6…4 screwsTSD-605SRL

Hexagonal socket head cap screw M6×6…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)TSD-655CL-M6/655CLUU

Hexagonal socket head cap screw M6×6…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)

TSD-655SL-M6/655SLUUHexagonal socket head cap screw M6×6…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)

TSD-655SRL-M6/655SRLUU

12

50

MAX88

60

10.5

128.

3

(11)

1.5

82±

6.5 11

2

3.5

24.5

50

MAX88

2525

32

32

60 20.8

25 8032

25

60

φ8 counterbore4-φ4.5 mounting hole

9-M4 depth 6

4-M3 depth 5

Z axis clamp

Y axis clamp

X axis clamp

60

50

MAX66

24.5

128.

3

(11)

82±

6.53.5

10.5

112

MAX66 50

12 2525

32

60

1.5

32

60

2525

32

80

(11)

φ8 counterbore

4-M3 depth 5

4-φ4.5 mounting hole

9-M4 depth 6

Z axis clamp

Y axis clampX axis clamp

112

82±

6.5

60

50

MAX88

3.5

12

32

6025 25

32

50MAX88

128.

3

1.5

32

25

60

80

25

4-M3 depth 59-M4 depth 6

10.5

20.8

24.5

4-φ4.5 mounting holeφ8 counterbore

20.8

Z axis clamp

X axis clamp

Y axis clamp

4-φ7 mounting holeφD counterbore

B

82±

6.56

12A

82.565

A

AA

9-C depth 665 (11)

32

114.

5

Z axis clamp

(128

.3)

12

MAX69B65MAX69

1.5X axis clamp Y axis clamp

24

(11)

4-φ7 mounting holeφD counterbore

82±

6.56

12A

82.565

A

AA

9-C depth 665

32

114.

5

Y axis clamp

Z axis clamp

11

B

65

128.

3

(11)

24.5

MAX91

1.5

20.8

B

X axis clamp

MAX91

4-φ7 mounting holeφD counterbore

82±

6.56

12A

82.565

A

AA

9-C depth 66520.8

32

114.

5

Y axis clamp

Z axis clamp

B65

128.

3

1.5

MAX26

B

X axis clamp

MAX91

11 24.5

20.5

Part NumberA

(mm)B

(mm)C

D(mm)

TSD-655SL-M6 25 50 M6 P1 11

TSD-655SLUU 25.4 50.8 1/4-20UNC 12

Part NumberA

(mm)B

(mm)C

D(mm)

TSD-655CL-M6 25 50 M6 P1 11

TSD-655CLUU 25.4 50.8 1/4-20UNC 12

Part NumberA

(mm)B

(mm)C

D(mm)

TSD-655SRL-M6 25 50 M6 P1 11

TSD-655SRLUU 25.4 50.8 1/4-20UNC 12

E148

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□65mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□60mm

□40mm

Crossed Roller

XYZ axis Stages

XYZ axis Aluminum Crossed Roller Slide Stages (Vertical) TAM-5L Stage size □40/□60mm

Light-weight XYZ axis aluminum stages integrating a stage and Z bracket.Crossed roller guide enables smooth travel.

Speciications

Part NumberMETRIC TAM-405CL TAM-405SL TAM-605CL TAM-605SL

INCH TAM-405CLUU TAM-405SLUU − −

(Opposite Model)METRIC − TAM-405SRL − TAM-605SRL

INCH − TAM-405SRLUU − −Table Size [mm] 40×40 40×40 60×60 60×60

Axes of Travel XYZ axis

Micrometer Position Center Side Center Side

Travel [mm] XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Crossed roller

Primary Material Aluminum

Finish Black anodized

Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)

Travel Accuracy Straightness [μm] 2 2 2 2

Max. Moment Capacity

Pitch [N・m] 2.75 2.75 5.0 5.0

Roll [N・m] 3.0 3.0 5.0 5.0

Moment Stiffness Pitch [″/N・cm] 1.9 1.9 0.9 0.9

Options FP FP FP FP

Weight [kg] 0.4 0.4 0.9 0.9

Option

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008

* Please add an option code as the part number sufix to specify various optional speciications.* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

E149WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□65mm

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□60mm

□40mm

Crossed Roller

XYZ axis Stages

W7081CatalogCode

Outline Drawing

Pan head screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)TAM-405CL/405CLUU

Pan head screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)

TAM-405SL/405SLUUPan head screw M3×6…4 screws, Spring washersHexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)

TAM-405SRL/405SRLUU

Hexagonal socket head cap screw M4×8…4 screwsTAM-605CL

Hexagonal socket head cap screw M4×8…4 screwsTAM-605SL Hexagonal socket head cap screw M4×8…4 screwsTAM-605SRL

4-φE mounting holeφF counterbore

8-D depth 5

Z axis clampC depth 7

11.5

107.

5

62±

6.5 82

24.5

40

B

MAX66 (12)

4

10.4

A40 50

BMAX66 G

32

40

AA

(12)

A

X axis clamp Y axis clamp

10.5

107.

5

62±

6.5 82

MAX73

40B

23.5

(12)

4

10.4

5040A

21

G

32

MAX73

B

A

A

40

A

8-D depth 5C depth 7Z axis clamp

Y axis clamp

φF counterbore4-φE mounting hole

X axis clamp

MAX73

40B

(12)

4

10.4

5040A

MAX73B

A

A40

A 8-D depth 5C depth 7

Z axis clamp

Y axis clamp

X axis clamp

23.5 62

±6.

5 8210

7.5

214-φE mounting holeφF counterbore

G

10.5

21

(14)

60

50

30.5

MAX66

12.3

78±

6.5

15.5

(14)MAX66 50

1.5

129

108

2525

60

382.5

7060

2525

φ8 counterbore4-φ4.5 mounting hole

M16 P1 depth 6

8-M4 depth 8

Z axis clamp

X axis clampY axis clamp

M16 P1 depth 6

60

50

MAX88

60

27.3

12.3

129

(14)

108

78±

6.51.5

12.3

50

MAX88

2.5

25

60 21

25 25

25

7038

φ8 counterbore4-φ4.5 mounting hole

8-M4 depth 8

Z axis clamp

X axis clamp

Y axis clamp

50

108

6050

MAX88

1.5

78±

6.5

12.325

60

25

2.5

129

(14) MAX88

60 70

25

38

25

8-M4 depth 8M16 P1 depth 6

27.3 12

.3

φ8 counterbore4-φ4.5 mounting hole

21

Z axis clamp

21

Y axis clamp

X axis clamp

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

G(mm)

TAM-405CL 16 32 M6 P1 M3 3.5 6 2

TAM-405CLUU 15.875 31.75 1/4-20UNC 6-32UNC 4 6.5 1.5

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

G(mm)

TAM-405SL 16 32 M6 P1 M3 3.5 6 2

TAM-405SLUU 15.875 31.75 1/4-20UNC 6-32UNC 4 6.5 1.5

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

G(mm)

TAM-405SRL 16 32 M6 P1 M3 3.5 6 2

TAM-405SRLUU 15.875 31.75 1/4-20UNC 6-32UNC 4 6.5 1.5

E150

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□80mm

□65mm

Crossed Roller

XYZ axis Stages

XYZ axis Aluminum Crossed Roller Slide Stages (Vertical) TAM-5L Stage size □65/□80mm

Light-weight XYZ axis aluminum stages integrating a stage and Z bracket.Crossed roller guide enables smooth travel.

Speciications

Part NumberMETRIC TAM-655CL-M6 TAM-655SL-M6 TAM-805CL TAM-805SL

INCH TAM-655CLUU TAM-655SLUU − −

(Opposite Model)METRIC − TAM-655SRL-M6 − −INCH − TAM-655SRLUU − −

Table Size [mm] 65×65 65×65 80×80 80×80

Axes of Travel XYZ axis

Micrometer Position Center Side Center Side

Travel [mm] XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5 XY axis ±7.5 Z axis ±7.5 XY axis ±7.5 Z axis ±7.5

Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5

Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01

Bearing type Crossed roller

Primary Material Aluminum

Finish Black anodized

Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)

Travel Accuracy Straightness [μm] 2 2 2 2

Max. Moment Capacity

Pitch [N・m] 5.0 5.0 7.0 7.0

Roll [N・m] 5.0 5.0 7.0 7.0

Moment Stiffness Pitch [″/N・cm] 0.9 0.9 0.35 0.35

Options FP FP FP FP

Weight [kg] 1.15 1.15 1.5 1.5

Option for □65mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008

Option for □80mm

Option CodeCompatible product Lead of Actuator

[mm/rotation]Micrometer Readable Resolution

[mm]Products Name Part Number

FP Fine-pitch Screw Adjusters FPSA-62550 0.25 − E008

* Please add an option code as the part number sufix to specify various optional speciications.* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010

E151WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Dovetail

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□80mm

□65mm

Crossed Roller

XYZ axis Stages

W7081CatalogCode

Outline Drawing

Hexagonal socket head cap screw M6×8…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)TAM-655CL-M6/655CLUU

Hexagonal socket head cap screw M6×8…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)

TAM-655SL-M6/655SLUUHexagonal socket head cap screw M6×8…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)

TAM-655SRL-M6/655SRLUU

Hexagonal socket head cap screw M4×8…4 screwsTAM-805CL

Hexagonal socket head cap screw M4×8…4 screwsTAM-805SL2280

30.5

100±

7.5

MAX113

70

80 (14)

14.5

140

6.5

14.5

165.

5

70

MAX113

3 40

70

2525

25 25

70

10080

8-M4 depth 8

(PCDφ42)

M16 P1 depth 6

4-φ4.5 mounting holeφ8 counterbore

(PCDφ62)4-M4 depth 8

4-M3 depth 8

4-M4 depth 8

Z axis clamp

X axis clamp

Y axis clamp

13.885

±6.

5AA

AA

9-C depth 8

32.5

B

65 (14)

B

117.

5 77.5

40

Z axis clamp

2.5

65MAX684-φD mounting holeφ11 counterbore

(14)MAX68

140

3

X axis clampY axis clamp

17.5

77.5

2.5 117.

5

85±

6.5

65

B X axis clamp B

40

4-φD mounting holeφ11 counterbore

13.8 65A

21A

(14)

65

AA

9-C depth 8

Z axis clamp

MAX94

140

14.3

Y axis clamp

3

MAX94

29.3

2.5 117.

585

±6.

5

65

B X axis clamp

13.8

MAX94

140

21

29.3

77.5

B

40

65A

21A

(14)

65

AA

9-C depth 8

Z axis clamp

Y axis clamp

4-φD mounting holeφ11 counterbore

3

MAX94

16

MAX84 70

3 40

25 25

70

80

70

2525

80

100

(14)

4-φ4.5 mounting holeφ8 counterbore

(PCDφ62)4-M4 depth 8

4-M3 depth 8(PCDφ42)

M16 P1 depth 6

8-M4 depth 8

4-M4 depth 8

Z axis clamp

Y axis clampMAX84

32

6.5

100±

7.5

8070

(14)

14.5

140 16

5.5

X axis clamp

65

Part NumberA

(mm)B

(mm)C

D(mm)

TAM-655SL-M6 25 50 M6 P1 6.5

TAM-655SLUU 25.4 50.8 1/4-20UNC 7

Part NumberA

(mm)B

(mm)C

D(mm)

TAM-655SRL-M6 25 50 M6 P1 6.5

TAM-655SRLUU 25.4 50.8 1/4-20UNC 7

Part NumberA

(mm)B

(mm)C

D(mm)

TAM-655CL-M6 25 50 M6 P1 6.5

TAM-655CLUU 25.4 50.8 1/4-20UNC 7

E152

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Crossed Roller

Lapping

V Groove Screw

Ohters

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□65mm

□60mm

□40mm

□25mm

□15mm

Dovetail

XYZ axis Stages

XYZ axis Preset Stages TASB-5 Stage size □15/□25/□40/□60/□65mm

Speciications

Part NumberMETRIC TASB-155 TASB-255 TASB-405 TASB-605 TASB-655-M6

INCH − − TASB-405UU − TASB-655UU

Table Size [mm] 15×15 25×25 40×40 60×60 65×65

Axes of Travel XYZ axis

Travel [mm]XY axis ±2

Z axis +2 / −0XY axis ±3

Z axis +3 / −0XY axis ±7

Z axis +5 / −0XY axis ±10

Z axis +7 / −0XY axis ±12.5Z axis +7 / −0

Screw Pitch [mm] 0.4 0.5 0.5 0.5 0.5

Bearing type Dovetail slide method

Primary Material Brass

Finish Black matte

Load Capacity [N] 4.9 (0.5kgf) 6.9 (0.7kgf) 29.4 (3.0kgf) 98.1 (10.0kgf) 98.1 (10.0kgf)

Travel Accuracy Straightness [μm] 30 30 30 30 30

Max. Moment Capacity

Pitch [N・m] − 0.3 0.5 1.0 1.0

Roll [N・m] − 0.3 0.5 1.0 1.0

Moment StiffnessPitch [″/N・cm] − 9.7 5.8 1.5 1.5

Roll [″/N・cm] − 7.7 3.7 2.5 2.5

Parallelism [μm] 200 200 200 200 200

Weight [kg] 0.04 0.16 0.53 1.73 2.22

Space-saving, compact XYZ axis stages with horizontal table top, suitable for less frequent operations that require ine adjustment.

◦Ideal for less frequent operations and ine adjustment.◦Elimination of adjustment knobs can prevent errant operations, and elimination of protrusions makes these stages

suitable for assembly in systems.

Mounting Method Detailed Illustration

Guide

▶A hex wrench with knob and clamping wrench are included.

Clamp with a screwfrom the top

Clamp with a screwfrom the bottom

Clamp

Top mounting

Tapped holes are used as

counterbores because screws

are smaller than tapped holes

and will go in without any

interference.

Bottom mounting

Clamp with screws that match

the speciication of tapped holes.

About Mounting Holes

The bottom mounting holes of preset stages are tapped holes.These stages allow mounting from the top or the bottom, convenient for securing on optical breadboards or other instruments as well as assembling in systems.Use the screws of the sizes listed in the table on the right for mounting.

* When mounting from the top surface, slide the top surface to insert screws in mounting holes.

Part NumberSecure from

the topSecure from the bottom

TASB-155 M2 M2.6

TASB-255 M2 M3

TASB-405 M3 M4

TASB-405UU 6-32UNC −TASB-605 M4 M5

TASB-655-M6 M6 M8

TASB-655UU 1/4-20UNC 5/16-18UNC

E153WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Crossed Roller

Lapping

V Groove Screw

Ohters

□80mm

□100mm

□120mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□65mm

□60mm

□40mm

□25mm

□15mm

Dovetail

XYZ axis Stages

W7082CatalogCode

Outline Drawing

Pan head screw M2×5…3 screws, One 2.5mm hex wrench with knob, One 0.89mm hex wrenchTASB-155 XY axis=Wrench size for adjustment 2.5mm, Z axis=Adjustment hole size φ1.8mm

Wrench size for clamp common to XYZ axes=0.89mm

Pan head screw M2×6…3 screws, One 3mm hex wrench with knob, One 0.89mm hex wrenchTASB-255 Wrench size for adjustment XY axes=3mm,

Wrench size for clamp common to XYZ axes=0.89mm

Pan head screw M3×8…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrenchHexagonal socket head cap screw 6-32UNC×3/8…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench (UU)

TASB-405/405UU Wrench size for adjustment XY axis=3mm, Wrench size for clamp common to XYZ axes=1.5mmOne 3mm hex wrench with knob,hex wrench size for clamp 1.5mm (UU)

Hexagonal socket head cap screw M4×10…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench

TASB-605

XY axes=Wrench size for adjustment 3mm, Z axis=Adjustment hole size φ3mmWrench size for clamp common to XYZ axes=1.5mm

Hexagonal socket head cap screw M6×12…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench (M6)Hexagonal socket head cap screw 1/4-20UNC×1/2…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench (UU)

TASB-655-M6/655UU

Hex wrench size with knob 3mm, hex wrench size for clamp 1.5mm (M6)Hex wrench size with knob 3mm, hex wrench size for clamp 1.5mm (UU)

1015

3

3

10

10

3

φ4

1415

29

10

15

10 4

Y axis clamp

3-M2.6 (Bottom mounting)

X axis clamp

3-φ2.2 φ4 counterbore (Top mounting)

4-M2 depth 3

Z axis clamp

1415

29

10

4

X axis clampZ axis clamp

1010

1010

425

20

3

17.7

φ6

49

23

20

26

25 4

6.7φ1.5 locking hole

3-M3 (Bottom mounting)

3-φ2.5 φ4.5 counterbore (Top mounting)

X axis clampM4 depth 4.5

φ1.5 locking holeY axis clamp

6-M2 depth 3.5

Z axis clamp

[Enlarged view of clamp position]

40

A

440

C depth 5

AA

φ1.5 locking hole 5

A 6-D depth 5

34

64+5 0

30

B

Z axis clamp 8.8 X axis clamp

B

5

Y axis clamp

4-φE φF counterbore (Top mounting)

20.8

4-G (Bottom mounting)

φ1.5 locking hole

10

2525

605

24

505.5

38 35

73

φ8

32

32

60

25 25

5

50

4-φ4.2 φ8 counterbore (Top mounting)4-M5 (Bottom mounting)

Z axis clampφ2 locking hole

4-M3 depth 8

Y axis clamp

φ2 locking hole

8-M4 depth 8X axis clamp

38

B

37

X axis clamp

4-D (Bottom mounting)4-φ6.7φ11 counterbore (Top mounting)

25

Y axis clamp

B

Z axis clamp

φ2 locking hole

11

4.5

AA

65 5

65

A

5

A

8-C depth 8

φ2 locking hole

75＋7　0

Part NumberA

(mm)B

(mm)C D

E(mm)

F(mm)

G

TASB-405 16 32 M4 M3 3.3 6 M4

TASB-405UU 15.875 31.75 8/32UNC 6-32UNC 4 6.5

Part NumberA

(mm)B

(mm)C D

TASB-655-M6 25 50 M6 M8

TASB-655UU 25.4 50.8 1/4-20UNC 5/16-18UNC

E154

Manual Pos i t ioners

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Crossed Roller

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□65mm

□80mm

□100mm

□120mm

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

Others

Dovetail

XYZ axis Stages

XYZ axis Leadscrew Stages (Vertical) TAS-5L

XYZ axis Rack and Pinion Dovetail Stages (Vertical) TAR-5L

The TAS type stages have dovetail groove guide and leadscrew adjustment system, suitable for less frequent operations that require ine adjustment.The TAR type stages have dovetail groove guide and rack and pinion system, suitable for frequent operations that require quick motion and long travel.

Attention

▶Micrometer brackets may extend above the top surface of some

stages. Check drawings for more information.

▶Note that some samples might not be able to be ixed on the stage depending on their shapes, or required travel might not be ensured.

Speciications

Part NumberMETRIC TAS-24305L TAS-20605L TAR-25505L TAR-34805L TAR-38405L-M6

INCH − − − − TAR-38405LUU

Table Size [mm] 24×30 18×60 25×50 34×40 38×40

Axes of Travel XYZ axis

Travel [mm]XY axis ±4Z axis ±4

XY axis ±7.5Z axis ±7.5

XY axis ±10Z axis ±10

X axis +20 / −25Y axis ±25

Z axis +25 / −20

XY axis ±15Z axis +45 / −0

Lead of Actuator [mm/rotation] 0.5 0.5 about 20 about 20 about 20

Vernier Readable Resolution [mm] − 0.1

Bearing type Dovetail slide method

Primary Material Brass

Finish Super black chrome

Load Capacity [N] 4.9 (0.5kgf) 9.8 (1.0kgf) 9.8 (1.0kgf) 14.7 (1.5kgf) 14.7 (1.5kgf)

Travel Accuracy Straightness [μm] 30 30 30 30 30

Max. Moment Capacity

Pitch [N・m] 0.1 0.1 0.5 0.5 1.5

Roll [N・m] 0.1 0.1 0.5 0.5 1.0

Weight [kg] 0.62 1.5 0.75 2.1 1.8

■Mounting Method of TAR-25505L

Use M3 pan head screws (only on both

edges) to secure from the top, and M4 pan

head screws to secure from the bottom.

Part Number TAR-25505L

Z axis TARW-25503L

XY axis TARW-25502

■Components

Guide

TAR-34805L include a base plate that allows mounting on instruments

or bases itted with M4 tapped holes on □50mm,

preventing the handle from contacting the mounting surface.

Bottom Plate

60

60

2050

50

36

4

10

4

4-φ4.5 stage surface mounting holeφ8 counterbore

4-φ4.5 mounting holeφ8 counterbore

Primary material: AluminumFinish: Black Anodized

E155WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

X axis Stages

XY axis Stages

Z axis Stages

XZ axis Stages

θ axis Stages

Goniometer

Inclination

Vacuum

Ball Guide

Crossed Roller

Lapping

V Groove Screw

Ohters

□15mm

□25mm

□40mm

□60mm

□65mm

□80mm

□100mm

□120mm

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

Others

Dovetail

XYZ axis Stages

W7083

W7084

CatalogCode

CatalogCode

Outline Drawing

Pan head screw M3×5…4 screwsTAS-24305L Hexagonal socket head cap screw M4×10…4 screwsTAS-20605L

Pan head screw M3×8…4 screwsTAR-25505L

Hexagonal socket head cap screw M4×8…4 screwsTAR-34805L

Hexagonal socket head cap screw M6×10…4 screws (M6)Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)TAR-38405L-M6/38405LUU

1010

1010

28.8

25

50

3.2 3.8

5040

17.5

63

50

44

φ20

2025

20

82±

10(117

)

12.5

20

10-M3 depth 5

3-M4 depth 5

4-M4 (Bottom mounting)2-φ3.3 φ6 counterbore (Top mounting)

Z axis clamp

X axis clamp

Y axis clamp

φ30

35

22

50

60

5060

80

36±20144

104

+25

−20

24

14 40

34

9

35

4

4-φ4.5 mounting holeφ8 counterbore

Z axis clamp

+−Y axis

−

4-M3 depth 5

−

Z axis

+

+X axis

X axis clamp

Y axis clamp

133

560 50

31.5

76±

7.5

50

36

50

13

38

φ18

16

93

60604-φ4.5 mounting hole

4-M4 depth 6

Y axis clamp

Z axis clamp

X axis clamp

86

φ14

7.75

(15)

1

32

10

40

30 20

10

51±

4

24

46.5

24

15

(15)23

.25

4-φ3.5 mounting holeφ6 counterbore

6-M3 depth 5Y axis clamp

Z axis clamp

X axis clamp

B

65 （14）

3

B

65 (14)

2.5150

5

A

3827

A 40φ30

4-C depth 6

φ11 counterbore4-φD mounting hole

Y axis clamp

X axis clamp

Z axis clamp

110+

25−

20

Part NumberA

(mm)B

(mm)C

D(mm)

TAR-38405L-M6 25 50 M6 6.5

TAR-38405LUU 25.4 50.8 1/4-20UNC 7