01339481
TRANSCRIPT
-
7/29/2019 01339481
1/8
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, VOL. 51, NO. 5, OCTOBER 2004 1081
Space-Vector Modulation in a Two-Phase InductionMotor Drive for Constant-Power Operation
M. A. Jabbar, Senior Member, IEEE, Ashwin M. Khambadkone, Member, IEEE, and Zhang Yanfeng
AbstractIn the paper, a space-vector pulsewidth-modulation(SVPWM) inverter is proposed for constant-power operation of atwo-phase induction motor. The operating principle of SVPWM isdescribed, and the algorithm for constant-power operation is pre-sented. Analysis for dynamic operation using a simple scalar con-trol scheme is carried out and parameters for implementation ofthe scheme are obtained. Experimental investigation of the schemeis carried out and comparative analysis of the performance of thescheme is presented.
Index TermsConstant-power operation, space-vectorpulsewidth modulation (SVPWM), three-phase inverter,two-phase induction motor.
I. INTRODUCTION
MOST domestic appliances, such as portable drills and
vacuum cleaners, need variable-speed constant-power
operation. AC series motors have a natural constant-power op-
eration characteristics and are commonly used for these appli-
cations. However, ac series motors cannot run at high speeds be-
cause of the brush and commutation problems. Significant radio
frequency interference (RFI) problems have to be solved and the
brush wear and noise become excessive.
Permanent-magnet motors along with variable-speed drives
can also be used and are highly efficient. However, costs andmechanical problems such as mounting of magnetic poles in the
rotor at very high speed limit their use. On the other hand, in-
duction machines along with variable-frequency drives can be
used to achieve constant-power operation above rated speed.
Usually, for low-power operation, fractional horsepower mo-
tors are used. They operate from a single-phase supply and uti-
lize a phase-splitting capacitor to develop a rotating field in the
air gap. However, due to an elliptical rotating field, a pulsating
torque is produced that causes higher noise than a three-phase
induction motor.
In recent years various schemes have been proposed for in-
verter-driven two-phase induction motors. In [1] and [2], square
voltage waveforms with quadrature phase shift are supplied to
the two-phase windings of a two-phase induction motor driven
by an inverter. Though this drive is simpler and cheaper, the
control range of speed is limited and the harmonic content of
the output voltage is high. In [3] and [4], phase-difference angle
Manuscript received October 25, 2002; revised March 15, 2004. Abstractpublished on the Internet July 15, 2004.
M. A. Jabbar and A. M. Khambadkone are with the Department of Elec-trical and Computer Engineering, National University of Singapore, Singapore117576 (e-mail: [email protected]).
Z. Yanfeng was with the Singapore Power System, Singapore. He is nowwithManufacturing Integration Technology Ltd., Singapore 569872.
Digital Object Identifier 10.1109/TIE.2004.834969
control of a two-phase induction motor is used which can ex-
tend the speed control range without a substantial increase in
cost of the drive. However, under phase-difference angle con-
trol, the torque pulsation still exists. In [5], rotor-flux-oriented
control is used to eliminate the ac term of the electromagnetic
torque in an unbalanced two-phase motor.
This paper introduces a fractional horsepower variable-speed
drive with a two-phase motor supplied from a voltage-source
inverter. The windings of the motor are symmetrical. To obtain
a rotating magnetic field in the motor, it is supplied from a two-
phase variable-frequency variable-voltage source.The scheme followed in this work is to operate a two-phase
induction motor with space-vector pulsewidth-modulation
(SVPWM) control to mimic the torquespeed characteristic of
an ac series motor and, thus, obtain a constant-power operation
characteristic.
II. DEVELOPMENT OF THE DESIGN
A. System Configuration
Fig. 1 shows the system that uses a domestic single-phase
supply with a rectifier and an inverter to supply the two-phase
motor with V/f control. In this work we have modified an un-balanced two-phase induction motor and rewound it into a sym-
metrical two-phase induction motor.
A two-phase drive can be obtained by using different config-
urations of inverters and windings.
Fig. 2 shows one of the ways of connecting the two-phase
windings. This is a cheaper method because it uses only four
switches. Fig. 2 also shows that two capacitors are connected in
series in the dc link to form a midpoint that is connected to neu-
tral point . In practice, two large resistors are also needed in
parallel with the capacitors to balance the voltage of the capac-
itors. This increases the losses in the system. For an H-bridge
inverter, the maximum output voltage (peak value) of one phaseusing sinusoidal PWM is
(1)
However, at low speed, an H-bridge inverter suffers from un-
balanced operation due to uneven discharging of the dc-link ca-
pacitor [6]. This leads to significant voltage ripple at low speeds.
Moreover, both capacitors in the dc link should be rated for
dc-link voltage and, hence, increase the cost.
The alternative means to connect the neutral point in this
system is to use a three-phase inverter to generate two-phase
0278-0046/04$20.00 2004 IEEE
-
7/29/2019 01339481
2/8
1082 IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, VOL. 51, NO. 5, OCTOBER 2004
Fig. 1. System configuration for constant-power operation.
Fig. 2. H-bridge inverter with phase connections.
output, as shown in Fig. 3. Instead of connecting point to
the dc link, we connect it to one of the inverter outputs which
simplifies the dc-link circuit and eliminates the problems in the
H-bridge inverter.
The three-phase system is used to generate two-phase voltage
outputs in which SPWM was used [6]. The two main legs of
the inverter are controlled using SPWM while the neutral leg
is switched 50% duty cycle to get neutral point . This
method can eliminate the voltage ripple problem in H-bridge
inverters. However, the maximum voltage output is as the same
as (1).
We propose SVPWM method instead of SPWM. As shown in
Fig. 3, this type of inverter is very much like the inverter used in
a three-phase induction motor drive. The only difference is the
magnitude and the location of the basic space vectors, which
is discussed in Section II-B. With this scheme, the maximum
output voltage (peak value) of one phase using SVPWM can be
increased to
(2)
B. Space-Vector Modualtion for the Two-Phase System
SVPWM refers to a special switching sequence of the upperthree power transistors of a three-phase inverter. It has been
Fig. 3. Three-phase inverter with phase connections.
TABLE ISWITCHING PATTERNS AND OUTPUT VOLTAGES
OF A THREE-PHASE POWER INVERTER
shown to generate less harmonic distortion in the output volt-
ages or currents applied to the phases of an ac motor and pro-
vides more efficient use of supply voltage in comparison with
direct sinusoidal modulation technique [7].
As shown in Fig. 3, there are eight possible switching com-
binations for the three upper power transistors that feed the
three-phase power inverter. The switching states of the lower
power transistors are opposite to the upper ones and so are com-
pletely determined once the states of the upper power transistors
are known. The eight combinations and the derived output phase
voltages in terms of dc-link voltages are shown in Table I,
where are the states of the switches and and arethe orthogonal phase voltages.
-
7/29/2019 01339481
3/8
JABBAR et al.: SPACE-VECTOR MODULATION IN A TWO-PHASE INDUCTION MOTOR DRIVE FOR CONSTANT-POWER OPERATION. 1083
Fig. 4. Basic space vectors and switch patterns.
Fig. 5. Symmetric space-vector PWM switching pattern.
From Table I, we can get six nonzero vectors and two zero
vectors. In these basic space vectors, and are two
zero space vectors. Thus, SVPWM can be implemented in this
system. Unlike a normal three-phase inverter in which the space
vectors form a symmetric hexagon, the space vectors in this
system form an asymmetric hexagon, as shown in Fig. 4. From
Fig. 4, it is known that the magnitude of must be limited tothe envelope defined by the circle (dashed circle in Fig. 4). This
gives a maximum magnitude of for .
The objective of SVPWM is to approximate the reference
voltage vector by a combination of the eight switching pat-
terns. One simple means of approximation is to require the av-
erage output of the inverter (in a small period, ) to be the
same as the average of in the same period. Supposing that
is located in the sector formed by and , we can get
(3)
where and are the respective durations in time for which
switching patterns and are applied within period .From (3), we can say that for every PWM period, the desired
reference voltage can be approximated by having the power
inverter inswitching patterns and for and durations
of time, respectively. Since the sum of and is less than or
equal to , the rest of the switching period is occupied by
the zero switching state. Therefore, we define as
(4)
By properly calculating , , and , the correct switching
signals can be generated. An example of symmetric SVPWM
waveforms is shown in Fig. 5 where it is assumed that the ref-
erence voltage is in the sector formed by vectors and.
TABLE IIQUANTITIES IN CONSTANT MATRIX
M
FOR EACH SECTOR
Fig. 6. Switching sequence for each sector.
This switching pattern depends on the sector of operation.
The switching sequence is decided to ensure that only one
switch commutates to achieve the transition from one switching
state to another. This ensures a minimum number of com-
mutations. For a given sector the switching sequence can be
generalized as ,
where and are the active vertex vectors of the sector. The
switching state corresponding to for a sector is decided on
the condition that only one commutation is required to transit
from to . Similarly, the choice of for a sector ensures
one commutation to transit from to . Table II defines the
respective and vectors for all six sectors. We can see that
all states require one commutation to and all statesrequire one commutation to the state. In order to maintain
the minimum commutation condition the sequence of switching
will depend on the sector as shown in Fig. 6. For example, in
sector 1, is chosen as , while is chosen as ,
which results in .
We can define that
(5)
(6)
where and stand for the magnitudes of the resulting
switching state vectors and and are their angles measuredin a clockwise direction with respect to the real axis .
-
7/29/2019 01339481
4/8
1084 IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, VOL. 51, NO. 5, OCTOBER 2004
Fig. 7. Switching time ofT
,T
, andT
in one period.
Fig. 8. Simulation phase current and mid-bridge current waveforms.
Based on Fig. 6, the quantities in (5) and (6) for each sector
can be derived, and these are shown in Table II.
Supposing and substituting (5) and (6) into (3),
we can get
(7)
where
(8)
Once the sector of reference is determined, we can com-
pute the matrix using Table II and (8). The actual values of
the components of matrix are either 1, 1, or 0. After is
known, and can be easily calculated by using (7). Fig. 7
shows the switching time of and in one period in which
the switching frequency is set at 10 kHz.
The current of the return bridge in a three-leg topology in-
verter with the SVM scheme is also times phase currents
which can be easily seen from Fig. 8. Thus, when designing
these kinds of inverters, the rated current of the insulated gate
bipolar transistors (IGBTs) in the return bridge should be higher.
C. Comparison of Steady-State Performance
To evaluate the performance of the proposed scheme a com-
parison is given in Table III. The estimated switching losses are
obtained by assuming dc-bus voltage is 325 V, switching fre-quency is 10 kHz, output fundamental frequency is 50 Hz, and
TABLE IIICOMPARISON OF THREE TYPES OF INVERTERS
the load is 375 W. In domestic appliances, normally, a single-
phase supply is used which limits the dc-bus voltage to 325 V
(230-V supply). For the same dc-bus voltage, a higher output
voltage of an inverter means that higher output torque as well as
a larger speed range can be easily obtained. We can see that the
proposed scheme produces 41% more voltage than the H-bridge
configuration with only a 21% increase in losses. On the other
hand, the use of SPWM with 50% duty cycle for the return legproduces higher losses at a lower maximum voltage.
III. CONTROL STRATEGY OF TWO-PHASE INDUCTION MOTORS
FOR CONSTANT-POWER OPERATION
Induction motors can be controlled such that they can produce
low torque at high speeds and vice versa. This would require an
active control of the stator frequency and voltage in accordance
with the change in actual torque and speed of the machine.
By properly setting the frequency and amplitude of the supply
voltage of a two-phase induction machine, it can be operated
at the intersection point of the torquespeed curve of induction
motors and the trajectory of constant-power operation (Fig. 9).When load torque changes, the frequency and amplitude of the
supply voltage of the induction machine are adjusted so that
the machine can operate at another intersection point. If we do
that through the whole speed range, a constant-power operation
can be maintained at every operating point. Thus, a two-phase
induction machine will operate just like a universal motor.
For any kind of electrical machine, the output power can be
expressed as
(9)
To obtain constant-power operation, the product of and
should be a constant. In steady state, the electromagnetic torqueequals the load torque. Thus, we can use the electromagnetic
-
7/29/2019 01339481
5/8
JABBAR et al.: SPACE-VECTOR MODULATION IN A TWO-PHASE INDUCTION MOTOR DRIVE FOR CONSTANT-POWER OPERATION. 1085
Fig. 9. Torquespeed characteristics of a two-phase induction machine withopen-loop V/f control and constant-power operation trajectory.
Fig. 10. Relationship of synchronous speed and desired rotor speed.
torque to obtain the speed command instead of the load torque.Since we need only the average torque for the control, it is ob-
tained from estimating stator-flux vector and current. As a dy-
namic and accurate position of flux is not required, a low-pass
filter is used to obtain the stator-flux vector. The torque calcu-
lated is averaged over five periods of the sampling with the sam-
pling frequency of 10 kHz.
A. Estimation of Slip for Constant-Power Operation
Normally, in medium and large induction motors, the slip is
very small. However, in fractional horsepower induction mo-
tors, the torquespeed characteristic becomes soft, so the slip is
large; in order to operate with constant-power characteristic, thisslip must be compensated. To this end, the torquespeed charac-
teristics of a two-phase induction machine for different frequen-
cies (open-loop V/f control is applied) are measured (Fig. 9).
Secondly, the intersection points of the torquespeed curves
and constant-power operation trajectory are calculated and, at
the same time, the corresponding synchronous speeds are also
recorded. Thus, we get two variables: one is the desired rotor
speed and the other is the corresponding synchronous speed.
Finally, by using an interpolation technique and polynomial
fit, we can obtain the function of synchronous speed and
desired rotor speed as for a given output power
as shown in Fig. 10. Thus, once the desired rotor speed is known,
the corresponding synchronous speed can be determined by thisfunction.
This slip estimation method is easy to implement. Most tasks
can be done offline, which greatly saves the computational time
of the microcontroller.
B. Speed Rate of Change Limitation
An abrupt change of supply frequency will cause transient
current in the motor which should not exceed the rated currentof the inverter. By limiting the step change of supply frequency,
this transient current can be limited in the permitted range.
Let denote the supply frequency at any instant, denote
the rated voltage, and denote the rated angular frequency. It
is assumed that the supply voltage is proportional throughout to
the supply frequency, which maintains the flux in the machine
at a practically constant level. Thus, the supply voltage at can
be defined as
(10)
We rewrite the stator voltage equation in a reference frame ro-tating at the angular velocity with natural (non-p.u.) values
(11)
where is the stator voltage space vector, is the stator current
space vector, isthestator flux-linkage space vector, and is
the stator resistance. Reverting to p.u. form, the above equation
becomes
(12)
Assume that the supply frequency of the machine, previouslya constant at angular velocity , is slightly increased by .
Therefore, we get
(13)
Neglecting second-order quantities, applying Laplace trans-
forms, and making use of (12), the above equation yields
(14)
In these equations, provided that is not less than 0.1, one
may write to a very fair approximation [8], which
modifies the equations as follows:
(15)
The solution of (15) is obtained by inversion to a time function
as
(16)
-
7/29/2019 01339481
6/8
1086 IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, VOL. 51, NO. 5, OCTOBER 2004
Fig. 11. Block diagram of control algorithm.
Fig. 12. Five-step control.
Then, we can get amplitude relationship of and
(17)
This equation indicates that if the stator flux has no change
after an abrupt change of supply frequencies there should be no
inrush current in the stator windings. This can be true if (10) is
maintained. However, beyond the rated angular speed, supply
voltage can no longer increase with frequency. Thus, the flux is
also not a constant so that an inrush current appears. Since the
stator flux is proportional to , we can get
(18)
Substituting (18) in (17), we obtain
(19)
To limit the inrush current to 0.5 p.u., and using (19), we know
that should be limited to 1/9 p.u. .
C. Control Strategy
The entire control block diagram is shown in Fig. 11.
This block diagram can be explained with the five simple
steps shown in Fig. 12.
1) The electromagnetic torque is calculated based on feed-
back voltage and currents.
2) The desired rotor speed is obtained by obtaining the re-quired slip.
Fig. 13. Maximum output voltages of a three-phase inverter with SVPWM.
Fig. 14. Experimental torquespeed characteristic (solid line) and idealconstant-power operation (dashed line).
3) The reference frequency is determined by using the syn-
chronous speed and rotor speed relationship curve shown
in Fig. 10. The maximum rotor speed change given by
(19) is maintained.
4) The reference voltage is obtained from a lookup table
based on voltage and frequency profiles.
5) The desired two-phase voltages are generated by
the SVPWM scheme based on reference voltage
and frequency.
IV. EXPERIMENTAL RESULTS
To verify the proposed space-vector modulation and control
algorithm, the system shown in Fig. 1 was constructed. Thecontrol was implemented on a digital signal processor (DSP)
fixed-point microcontroller TMS320C240. The PWM unit of
the microcontroller was used to implement the SVPWM. The
PWM switching frequency and sample frequency are both set at
10 kHz. In this system, a four-pole two-phase induction motor
was used.
Fig. 13 shows the maximum output voltages (fundamental)
of the inverter. We obtained 40% more voltage output with the
three-phase inverter using space-vector modulation compared to
that of the H-bridge inverter.
Fig. 14 shows the torquespeed characteristic of the proposed
system. The results show a significant constant-power operation
characteristic over a wide speed range. For most domestic ap-pliances such a speed range is satisfactory.
-
7/29/2019 01339481
7/8
JABBAR et al.: SPACE-VECTOR MODULATION IN A TWO-PHASE INDUCTION MOTOR DRIVE FOR CONSTANT-POWER OPERATION. 1087
Fig. 15. Startup of the two-phase induction motor drive system; output power
is set at 10 W.
Fig. 16. Stator current response of constant-power operation to a step change
in the load torque from 0.042 to 0.144 N 1 m; output power is set at 10 W.
V. DYNAMIC PERFORMANCE OF TWO-PHASE INDUCTION
MOTOR DRIVES
In this section, the dynamic performance of two-phase induc-
tion motor drives is presented.
Fig. 15 shows the startup of this two-phase induction motor
drive. At the beginning, the drive starts up with open-loop V/f
control and no-load condition until the drive operates with
50-Hz power supply in the steady state. Then, the closed-loop
constant-power operation control algorithm is applied. Finally,
the drive operates with 10-W power output. The rotor speed is
about 2200 r/min which is limited by the friction torque (about
0.042 N m) of the drive system.
To investigate the robustness of the proposed control algo-
rithm, we analyzed the phase current, flux, and speed response
of the motor drive to step changes in load torque. Figs. 16 18
show the stator current, stator flux, and shaft speed response of
the two-phase induction motor drive to a step change in load
torque from 0.042 N m (friction torque) to 0.144 N m. In Fig. 18
it is shown that in about 4 s the rotor speed of the two-phase
motor changes from 2200 to 670 r/min to keep the output power
as a constant ( 10 W). From Fig. 17 we can see that the stator
flux increases. This is because, above 50 Hz (base frequency),
the amplitude of the two-phase supply is fixed, thus, the stator
flux at higher speed becomes smaller; below 50 Hz, V/f with
drop compensation control is applied, thus, the stator fluxes arealmost constant.
Fig. 17. Stator flux response of constant-power operation to a step change inthe load torque from 0.042 to 0.144 N
1
m: output power is set as 10 W.
Fig. 18. Speed response of constant-power operation to a step change in theload torque from 0.042 N.m to 0.144 N.m: output power is set at 10 W.
From these figures we can see that the response of the drive
system is not very fast. In order to reduce the cost of the system,
the scalar control scheme without speed feedback is used in this
project. To avoid large current and unstable operation, the max-
imum speed change should be limited as given by (19). There-
fore, the fast response performance is sacrificed. However, for
domestic appliances, in most cases, fast response is not critical.
Therefore, such a dynamic performance is still acceptable in do-
mestic appliances.
VI. CONCLUSION
A scheme has been developed to use small two-phase
induction motors with SVPWM inverters in domestic appli-
ances to achieve constant-power operation characteristic. This
scheme eliminates problems generated by ac series motors. A
three-phase inverter topology with SVPWM was used to pro-
duce higher output voltage with lower distortion as compared
to an H-bridge inverter. Off-the-shelf components can be used
for this drive. Hence, the method is simple and cost effective
for high-volume manufacturing.
REFERENCES
[1] L. M. C. Mhango and R. Perryman, Analysis and simulation of ahigh-speed two-phase AC drive for aerospace applications, Proc.
IEEElect. Power Applicat., vol. 144, no. 2, pp. 149157, Mar. 1997.
[2] I. R. Smith, D. Creighton, and L. M. C. Mhango, Analysis and perfor-mance of a novel two-phase drive for fan and water-pumping applica-tions, IEEE Trans. Ind. Electron., vol. 36, pp. 530538, Nov. 1989.
-
7/29/2019 01339481
8/8
1088 IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, VOL. 51, NO. 5, OCTOBER 2004
[3] D. Jang and G. Cha, Phase-difference control of 2-phase inverter-fedinduction motor, in Conf. Rec. IEEE-IAS Annu. Meeting, 1989, pp.377383.
[4] DoHyun and J. S. Won, Voltage, frequency and phase-difference anglecontrolof PWM inverters-fed two-phase induction motors,IEEE Trans.Power Electronics, vol. 9, pp. 377383, July 1994.
[5] C. B. Jacobina, Rotor-flux-oriented control of a single-phase inductionmotor drive, IEEE Trans. Ind. Electron., vol. 47, pp. 832841, Aug.
2000.[6] S. S.Wekhande, B. N. Chaudhari, and S. V. Dhopte, A lowcost inverterdrive for 2-phaseinduction motor, in Proc. IEEE Int.Conf. Power Elec-tronics and Drive Systems, July 1999, pp. 428431.
[7] J. Holtz, Pusle modulation for electric power conversion, Proc. IEEE,vol. 82, pp. 11941214, Aug. 1994.
[8] P. K. Kovacs, Transient Phenomena in Electrical Machines. Ams-terdam, The Netherlands: Elsevier, 1984.
M. A. Jabbar (SM84) was born in Bangladesh.He received the B.Sc. degree in electrical engi-neering from Bangladesh University of Engineering
and Technology, Dhaka, Bangladesh, in 1968, andthe Ph.D. degree from Southampton University,Southampton, U.K., in 1977.
He is currently an Associate Professor in the De-partment of Electrical and Computer Engineering,National University of Singapore, Singapore. Sincereceiving the Ph.D. degree, he has been involvedin teaching and research in the areas of magnetic
systems and small devices. He has worked in industrial research for developing
new types of products for various companies. He spent more than a decade inindustry working in the U.K., Singapore, and Bangladesh. He has been involved
in product design and development since the early 1970s. He has been anacademic, as well, in three different countries. For five years before he joinedthe National University of Singapore in 1992, he was the Head of Research and
Development at Maxtor Corporation, Singapore, a leading American disk drivemanufacturer. He has published very widely in these areas.
Dr. Jabbar was awarded a Commonwealth Scholarship for higher studies in1972. He is a Chartered Engineer in the U.K. and a Corporate Member of theInstitution of Electrical Engineers, U.K. He is also a Fellow of the Institution ofEngineers, Bangladesh.
Ashwin M. Khambadkone (M95) received theDr.-Ing. degree from Wuppertal University, Wup-pertal, Germany, in 1995. He also holds a GraduateCertificate in Education from the University ofQueensland, Brisbane, Australia.
In 1987, he joined the Electrical Machines andDrives Laboratory, Wuppertal University, as a Re-search Assistant. He was involved in research in the
areas of PWM methods, field-oriented control, pa-rameter identification, and sensorless vector control.He was also involved in industrial development of
vector control drives. From 1995 to 1997, he was a Lecturer at the Universityof Queensland. He was also with the Indian Institute of Science, Bangalore,India, in 1998. Since 1998, he has been an Assistant Professor at the NationalUniversity of Singapore, Singapore. His research activities are in the control ofac drives, design and control of power electronic converters, and fuel-cell-basedsystems.
Dr. Khambadkone was the recipient of the Outstanding Paper Award forthe year 1991 and the Best Paper Award for the year 2002 of the IEEETRANSACTIONS ON INDUSTRIAL ELECTRONICS.
Zhang Yanfeng received the M.S. degree fromZhejiang University, Hangzhou, China, in 1999, andthe M.Eng. degree from the National University ofSingapore, Singapore, in 2003.
In 2002, he joined the Singapore Power Systemas an R&D Engineer for voltage dip compensation.In 2003, he joined Manufacturing Integration Tech-nology Ltd., Singapore, as an Electrical Engineer.
He is involved in the development of semiconductorautomation equipment.