sputtering.ppt

8/10/2019 Sputtering.ppt

1/27

Sputtering

The removal of surface atoms dueto energetic particle bombardment


2/27

Sputtering


3/27

Sputtering

First observations

of cathode erosion ingas discharges

W.R. Grove 1853


4/27

Sputtering

Firstobservations! W.R. Grove 1853" #.$. Gassiot and %. Farada& 185'"1858. #. $l(c)er 1858. *seful for thin film coating+

First s&stematic studies! W. ,roo)es 18-1" G. Granuist 18-/. 0ndependent

of target temperature. #. Star) 1-8" 1--. 2ot spots+ inar& elastic collisions+

,osine emission distribution R. Seeliger 1-35. Rules out the collision theor&+

,r&stal structure effects" G.4. Wehner 1-5. ,ollisions bac) in. Sputtering

&ields al6a&s decrease at high energ& ! 17.

9inear collision cascades" relation to nuclear stopping po6er" #. 9indhard etal. 1-3" #. :avies et al. 1-;'. $. Sigmund 1-/;-.

,< %onte ,arlo" %iegler 1-/'


5/27

Sputter deposition

:,; and RF sputter deposition is a convenient and ine?pensive coating

Techniue.


6/27

Sputter deposition

%agnetron sputter deposition is ver& 6idel& used and allo6s lo6 pressure

discharge" high coating ualit& and fast deposition


7/27

Secondar& 0on %ass Spectrometr& @S0%SA


8/27

Secondar& 0on %ass Spectrometr& @S0%SA

#T divertor

1---;B1

1--8;B'

#.$. ,oad et al.

#. Cucl. %ater

33;35@B/A

lemental mapping b& static S0%S


9/27

Sputtering

5 310 10Y

1 1

Sputtering yield

atoms removed( , )

incident particle

Differential sputtering yields

Y, , ,q q

q

Y E

YY Y Y

E

=

=


10/27

Sputtering &ield measurements


11/27



12/27


Dield energ& dependence. Eection angle distribution"

. mmoth" 2. ergs)er et al 1-8-" 1--


13/27

Sputtering

elocit& distribution of sputtered atoms" measured b& laser induced fluoresence.

W. 2usins)& et al. 1-8


14/27

Sputtering

nerg& distribution of sputtered

Tungsten atoms and tungstenclusters.

G. Staudenmaier 1-8'


15/27

,r&stal structure effect in Sputtering

Single cr&stal effects in sputtering" G. 4. Wehner" $h&s. Rev. 1B@1-5A-;/'


16/27

Con linear Sputtering &ield 6ith heav& ions

Con linear sputtering &ield"

evidence of spi)es . 2.2.


17/27

Three different regimes for theor&

Single )noc);on regime 9inear cascade regime Spi)e regime


18/27

Cuclear stopping po6er


19/27

lectronic stopping po6er


20/27

Results from linear cascade theor&

( )3 30

1

2

0 0

2

113 2

1 1 1 0

( , , , ) ( ; , )

( , ) , 0 1

( , ) ( ) !

1( , ,0) cos

" ( )

m m

m

m

mD m

m

v G r v v t Nv K v v v d v d v G G Gt

d E T C E T dT m

F E E E E

EY mF E

E NC E U

+ =

=

+

:

The linear cascade regime theor& got its semi;final form from

$. Sigmund" 1--


21/27

%onte ,arlo calculations

TR0% " #.$. iersac) and W. c)stein 1-8' %


22/27


%olecular d&namics" ,. rginso& et al 1-'


23/27


TR0%


24/27

< simple plasma impurit& model

, 0

,1 1

inH HH

inZ ZZ

in out out

Z HZ H ZZ Z

in out

j j j

H HZ HZZ

ZZ ZZ

dN N

dt

dN N

dtY Y

d

dt

Y Y

Y Y

=

=

= +

= = =

= =


25/27

Sputtering in fusion devices


26/27

Sputtering in fusion devices

0. Gudo6s)a" 2. ergs)er et al.

#. Cucl. %ater. 1/;1//@1--A33

0mpurit& flu?es in THT=R


27/27

,onclusions

Sputtering b& particle bombartment has been observedsince 15 &ears.

sputtering.ppt

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